JPS58196838U - Plasma CVD equipment - Google Patents

Plasma CVD equipment

Info

Publication number
JPS58196838U
JPS58196838U JP9424582U JP9424582U JPS58196838U JP S58196838 U JPS58196838 U JP S58196838U JP 9424582 U JP9424582 U JP 9424582U JP 9424582 U JP9424582 U JP 9424582U JP S58196838 U JPS58196838 U JP S58196838U
Authority
JP
Japan
Prior art keywords
plasma cvd
cvd equipment
equipment
convex curved
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9424582U
Other languages
Japanese (ja)
Other versions
JPH029549Y2 (en
Inventor
喜美 塩谷
小山　堅二
泰 大山
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP9424582U priority Critical patent/JPS58196838U/en
Publication of JPS58196838U publication Critical patent/JPS58196838U/en
Application granted granted Critical
Publication of JPH029549Y2 publication Critical patent/JPH029549Y2/ja
Granted legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

、第１図は従来のプライマＣＶＤ装置を示す構成図、第
２図は本考案の一実施例であるプラズマＣＶＤ装置を示
す構成図である。 図中、２１・・・・・・チャンバ、２２・・・・・・上
部電極、２３・・・・・・下部型・極、２４・・・・・
・ウェハ、２５・・・・・・凸曲面。1 is a block diagram showing a conventional primer CVD apparatus, and FIG. 2 is a block diagram showing a plasma CVD apparatus according to an embodiment of the present invention. In the figure, 21...chamber, 22...upper electrode, 23...lower mold/pole, 24...
・Wafer, 25... Convex curved surface.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 試料上に絶縁膜または金属膜を生成させる平行平板型プ
ラズマＣＶＤ装置であって、該装置の上部、下部電極の
対向する両端面の周辺を凸状曲面に形成してなることを
特徴とするプラズマＣＶＤ装置。A parallel plate plasma CVD apparatus for producing an insulating film or a metal film on a sample, characterized in that the periphery of both opposing end surfaces of upper and lower electrodes of the apparatus are formed into convex curved surfaces. CVD equipment.
JP9424582U 1982-06-23 1982-06-23 Plasma CVD equipment Granted JPS58196838U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9424582U JPS58196838U (en) 1982-06-23 1982-06-23 Plasma CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9424582U JPS58196838U (en) 1982-06-23 1982-06-23 Plasma CVD equipment

Publications (2)

Publication Number Publication Date
JPS58196838U true JPS58196838U (en) 1983-12-27
JPH029549Y2 JPH029549Y2 (en) 1990-03-09

Family

ID=30225682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9424582U Granted JPS58196838U (en) 1982-06-23 1982-06-23 Plasma CVD equipment

Country Status (1)

Country Link
JP (1) JPS58196838U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245393A (en) * 2012-05-29 2013-12-09 Shimadzu Corp Sample holder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115336A (en) * 1979-02-26 1980-09-05 Anelva Corp Plasma cvd electrode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115336A (en) * 1979-02-26 1980-09-05 Anelva Corp Plasma cvd electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245393A (en) * 2012-05-29 2013-12-09 Shimadzu Corp Sample holder
CN103451628A (en) * 2012-05-29 2013-12-18 株式会社岛津制作所 Sample holder

Also Published As

Publication number Publication date
JPH029549Y2 (en) 1990-03-09

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