JPS60181367U - plasma processing equipment - Google Patents
plasma processing equipmentInfo
- Publication number
- JPS60181367U JPS60181367U JP6654584U JP6654584U JPS60181367U JP S60181367 U JPS60181367 U JP S60181367U JP 6654584 U JP6654584 U JP 6654584U JP 6654584 U JP6654584 U JP 6654584U JP S60181367 U JPS60181367 U JP S60181367U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- processing equipment
- plasma
- electrode
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案によるプラズマ処理装置の一１実施例
を示す電極部の部分平面図、第２図は、第１図のＡ−Ａ
視測面図である。
１・・・・・・電極、２・・・・・・試料の設置位置、
３・・・・・・シート。FIG. 1 is a partial plan view of an electrode section showing an eleventh embodiment of a plasma processing apparatus according to the present invention, and FIG.
FIG. 1... Electrode, 2... Sample installation position,
3...Sheet.
Claims (1)
た試料をプラズマを利用して同時に処理する装置におい
て、シートを前記電極の前記試料の設置位置を除く面に
熱膨張による伸びを吸収可能に設けたことを特徴とする
プラズマ処理装置。In a device that uses plasma to simultaneously process multiple samples placed on electrodes installed inside a processing chamber that is evacuated to a reduced pressure, the sheet is placed on the surface of the electrode other than where the sample is placed to absorb elongation due to thermal expansion. A plasma processing apparatus characterized in that it is capable of being installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6654584U JPS60181367U (en) | 1984-05-09 | 1984-05-09 | plasma processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6654584U JPS60181367U (en) | 1984-05-09 | 1984-05-09 | plasma processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60181367U true JPS60181367U (en) | 1985-12-02 |
Family
ID=30599554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6654584U Pending JPS60181367U (en) | 1984-05-09 | 1984-05-09 | plasma processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60181367U (en) |
-
1984
- 1984-05-09 JP JP6654584U patent/JPS60181367U/en active Pending
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