JPS582856U - 透過走査像観察装置 - Google Patents

透過走査像観察装置

Info

Publication number
JPS582856U
JPS582856U JP9485381U JP9485381U JPS582856U JP S582856 U JPS582856 U JP S582856U JP 9485381 U JP9485381 U JP 9485381U JP 9485381 U JP9485381 U JP 9485381U JP S582856 U JPS582856 U JP S582856U
Authority
JP
Japan
Prior art keywords
sample
detector
electron beam
scanning image
image observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9485381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321886Y2 (enrdf_load_stackoverflow
Inventor
森脇　弘暢
裕 佐々木
Original Assignee
株式会社日電子テクニクス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日電子テクニクス filed Critical 株式会社日電子テクニクス
Priority to JP9485381U priority Critical patent/JPS582856U/ja
Publication of JPS582856U publication Critical patent/JPS582856U/ja
Application granted granted Critical
Publication of JPS6321886Y2 publication Critical patent/JPS6321886Y2/ja
Granted legal-status Critical Current

Links

JP9485381U 1981-06-26 1981-06-26 透過走査像観察装置 Granted JPS582856U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9485381U JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9485381U JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Publications (2)

Publication Number Publication Date
JPS582856U true JPS582856U (ja) 1983-01-10
JPS6321886Y2 JPS6321886Y2 (enrdf_load_stackoverflow) 1988-06-16

Family

ID=29889774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9485381U Granted JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Country Status (1)

Country Link
JP (1) JPS582856U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327683U (enrdf_load_stackoverflow) * 1986-08-05 1988-02-23
JP2015181101A (ja) * 2014-03-03 2015-10-15 Ｊｆｅスチール株式会社 電子線を用いた試料観察方法、並びに、電子顕微鏡用アタッチメントおよび電子顕微鏡
JPWO2014192361A1 (ja) * 2013-05-30 2017-02-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114172A (en) * 1978-02-27 1979-09-06 Jeol Ltd Electronic microscope
JPS55136446A (en) * 1979-04-10 1980-10-24 Internatl Precision Inc Scanning type electron microscope with two-stage sample tables

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114172A (en) * 1978-02-27 1979-09-06 Jeol Ltd Electronic microscope
JPS55136446A (en) * 1979-04-10 1980-10-24 Internatl Precision Inc Scanning type electron microscope with two-stage sample tables

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327683U (enrdf_load_stackoverflow) * 1986-08-05 1988-02-23
JPWO2014192361A1 (ja) * 2013-05-30 2017-02-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法
JP2015181101A (ja) * 2014-03-03 2015-10-15 Ｊｆｅスチール株式会社 電子線を用いた試料観察方法、並びに、電子顕微鏡用アタッチメントおよび電子顕微鏡

Also Published As

Publication number Publication date
JPS6321886Y2 (enrdf_load_stackoverflow) 1988-06-16

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