JPS5826661B2 - サンカマクノ ケイセイホウホウ - Google Patents

サンカマクノ ケイセイホウホウ

Info

Publication number
JPS5826661B2
JPS5826661B2 JP50143472A JP14347275A JPS5826661B2 JP S5826661 B2 JPS5826661 B2 JP S5826661B2 JP 50143472 A JP50143472 A JP 50143472A JP 14347275 A JP14347275 A JP 14347275A JP S5826661 B2 JPS5826661 B2 JP S5826661B2
Authority
JP
Japan
Prior art keywords
c2hct3
stacking faults
temperature
silicon substrate
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50143472A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5267268A (en
Inventor
毅 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP50143472A priority Critical patent/JPS5826661B2/ja
Priority to CA266,270A priority patent/CA1074630A/en
Priority to GB49901/76A priority patent/GB1549256A/en
Priority to FR7636267A priority patent/FR2334200A1/fr
Priority to NL7613392A priority patent/NL7613392A/xx
Priority to DE19762654493 priority patent/DE2654493A1/de
Publication of JPS5267268A publication Critical patent/JPS5267268A/ja
Publication of JPS5826661B2 publication Critical patent/JPS5826661B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10P14/6309—
    • H10P14/6322—

Landscapes

  • Formation Of Insulating Films (AREA)
  • Bipolar Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP50143472A 1975-12-01 1975-12-01 サンカマクノ ケイセイホウホウ Expired JPS5826661B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP50143472A JPS5826661B2 (ja) 1975-12-01 1975-12-01 サンカマクノ ケイセイホウホウ
CA266,270A CA1074630A (en) 1975-12-01 1976-11-22 Method of forming an oxide layer on a silicon substrate
GB49901/76A GB1549256A (en) 1975-12-01 1976-11-30 Methods of forming an oxide layer on silicon
FR7636267A FR2334200A1 (fr) 1975-12-01 1976-12-01 Procede pour former une couche d'oxyde sur un substrat de silicium
NL7613392A NL7613392A (nl) 1975-12-01 1976-12-01 Werkwijze voor de vorming van een oxydelaag op een siliciumsubstraat.
DE19762654493 DE2654493A1 (de) 1975-12-01 1976-12-01 Verfahren zur erzeugung einer oxidschicht auf einem siliciumsubstrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143472A JPS5826661B2 (ja) 1975-12-01 1975-12-01 サンカマクノ ケイセイホウホウ

Publications (2)

Publication Number Publication Date
JPS5267268A JPS5267268A (en) 1977-06-03
JPS5826661B2 true JPS5826661B2 (ja) 1983-06-04

Family

ID=15339483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143472A Expired JPS5826661B2 (ja) 1975-12-01 1975-12-01 サンカマクノ ケイセイホウホウ

Country Status (6)

Country Link
JP (1) JPS5826661B2 (cg-RX-API-DMAC10.html)
CA (1) CA1074630A (cg-RX-API-DMAC10.html)
DE (1) DE2654493A1 (cg-RX-API-DMAC10.html)
FR (1) FR2334200A1 (cg-RX-API-DMAC10.html)
GB (1) GB1549256A (cg-RX-API-DMAC10.html)
NL (1) NL7613392A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3142548A1 (de) * 1981-10-27 1983-05-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von oxidschichten auf aus silizium oder anderem oxidierbarem material bestehenden substratscheiben in extrem trockener sauerstoffatmosphaere bzw. in sauerstoffatmosphaere mit chlorwasserstoffgas-zusaetzen
CN111785612B (zh) * 2020-08-21 2022-05-17 中电晶华(天津)半导体材料有限公司 一种vdmos功率器件用二氧化硅层的制备方法

Also Published As

Publication number Publication date
FR2334200A1 (fr) 1977-07-01
GB1549256A (en) 1979-08-01
FR2334200B1 (cg-RX-API-DMAC10.html) 1983-02-11
NL7613392A (nl) 1977-06-03
JPS5267268A (en) 1977-06-03
DE2654493A1 (de) 1977-06-08
CA1074630A (en) 1980-04-01

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