JPS58217184A - ウエハ乾燥装置 - Google Patents

ウエハ乾燥装置

Info

Publication number
JPS58217184A
JPS58217184A JP10026082A JP10026082A JPS58217184A JP S58217184 A JPS58217184 A JP S58217184A JP 10026082 A JP10026082 A JP 10026082A JP 10026082 A JP10026082 A JP 10026082A JP S58217184 A JPS58217184 A JP S58217184A
Authority
JP
Japan
Prior art keywords
bowl
rotor
wafer
semiconductor wafer
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10026082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
山崎　雅敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10026082A priority Critical patent/JPS58217184A/ja
Publication of JPS58217184A publication Critical patent/JPS58217184A/ja
Publication of JPS6253942B2 publication Critical patent/JPS6253942B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP10026082A 1982-06-09 1982-06-09 ウエハ乾燥装置 Granted JPS58217184A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10026082A JPS58217184A (ja) 1982-06-09 1982-06-09 ウエハ乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10026082A JPS58217184A (ja) 1982-06-09 1982-06-09 ウエハ乾燥装置

Publications (2)

Publication Number Publication Date
JPS58217184A true JPS58217184A (ja) 1983-12-17
JPS6253942B2 JPS6253942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-12

Family

ID=14269237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10026082A Granted JPS58217184A (ja) 1982-06-09 1982-06-09 ウエハ乾燥装置

Country Status (1)

Country Link
JP (1) JPS58217184A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02721U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-14 1990-01-05
JPH0224537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-08-01 1990-02-19
JP2010065858A (ja) * 2008-09-08 2010-03-25 Kuroda Kazunari 物品搬送用容器の脱水乾燥装置
JP2010247282A (ja) * 2009-04-16 2010-11-04 Disco Abrasive Syst Ltd 研削装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508858U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-05-21 1975-01-29
JPS5036534A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-08-06 1975-04-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508858U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-05-21 1975-01-29
JPS5036534A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-08-06 1975-04-05

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02721U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-14 1990-01-05
JPH0224537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-08-01 1990-02-19
JP2010065858A (ja) * 2008-09-08 2010-03-25 Kuroda Kazunari 物品搬送用容器の脱水乾燥装置
JP2010247282A (ja) * 2009-04-16 2010-11-04 Disco Abrasive Syst Ltd 研削装置

Also Published As

Publication number Publication date
JPS6253942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-12

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