JPS58207645A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS58207645A
JPS58207645A JP57090679A JP9067982A JPS58207645A JP S58207645 A JPS58207645 A JP S58207645A JP 57090679 A JP57090679 A JP 57090679A JP 9067982 A JP9067982 A JP 9067982A JP S58207645 A JPS58207645 A JP S58207645A
Authority
JP
Japan
Prior art keywords
adhered
semiconductor element
projections
die stage
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57090679A
Other languages
English (en)
Inventor
Michio Ono
小野　道夫
Akihiro Kubota
昭弘 窪田
Tsuyoshi Aoki
強 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57090679A priority Critical patent/JPS58207645A/ja
Publication of JPS58207645A publication Critical patent/JPS58207645A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49503—Lead-frames or other flat leads characterised by the die pad
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8312—Aligning
    • H01L2224/83136—Aligning involving guiding structures, e.g. spacers or supporting members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83385—Shape, e.g. interlocking features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 （ａ）　　発明の技術分野 本発明はリードフレームの素子搭載部への半導体チップ
の固着を接着剤により行なう樹脂封止型半導体装置に関
する。
（ｂ）　　技術の背景 外部にリード端子を配設し、セラミック又はガラス等の
耐熱性絶縁基板に半導体素子を搭載し、　。
該基板と同−材又は金属材料でなるキャップを用いてハ
ーメチックシール構造とする気密封止形半導体パンケー
ジに対して、パッシベーション技術の向上及び樹脂の改
善によ！１ｌ１１産的で安価な樹脂封止形が多用されて
いる。
この方式は多連のリードフレームに半導体素子を搭載し
、エポキン系又はシリコン系仙脂で多数個一度にモール
ドした上で個々に切断する方法で一般のＩＣからＬＳＩ
まで広範囲に用いられている。−男手導体素子は微細加
工技術の発展に伴い高密度集積化され、より小型化され
る傾向があり、ダイステージに半導体素子の取付方法も
作業性、コスト面から従来の導電性飯属を融着して固定
するマウント方法から、導電性金属粉を樹脂内に混合攪
拌して接着固定する方法が用いられつ＼ある。
この場合接着強度及び均一な接着層の形成等重要な課題
となっている。
（ｃ）　　従来技術と問題点 第１図は従来の多連リードフレームを示す平面図である
。
第２図は従来の樹脂側止型半導体装置の断面図である。
図中１はリードフレーム、２はダイステージ、３はリー
ド、４はガイドフレーム、５は半導体素子、６はワイヤ
、７は樹脂接着部、８は接着樹脂、を示す。
゛　　一連続してプレス打抜形成される多連リードフレ
ーム１は、仲数のリード端子３とグイステージ２を有し
両ｆｌｌｌｌに設けたガイドフレーム４により形成させ
ている。
ダイステージ２に半導体素子５を搭載し、接着樹脂８に
より接着固定する。接着樹脂８はエポキシ系樹脂に金又
は銀粉末を混合した接着剤で導電性に優れ、加熱硬化（
１５０℃〜２００°Ｃ）により固定する。
［＾１定された半導体素子５は素子面に形成されたボン
デング用バットとリード３の先端をワイヤ６でボンデン
グ接続することによシ外リードと電気的に結合する。
グイステージ２に半導体素子５を接九−固定するには先
づダイステージ２面に接着剤を塗布し、ＩＣ素子５を載
置するので、接着面の均一性が得難く接着層の厚さにバ
ラツキを生ずる。接着層が厚くなると導体抵抗が増加し
小さいと接着強度が低下損うことなく、接着層の厚みが
均一に得られるようグイステージに突起を設けた、リー
ドフレーム導体素子搭載面に少くとも３個の突起を有す
るリードフレームに前記半導体素子を接着固定し、樹に
半導体素子を取付けた状態を矢印入方向から見た図であ
る。
ｍ　３１ｒ’ｌにおいてリードフレーム１１のグイステ
ージ１２に突起１３を形成する。その形成法は多連のリ
ードフレーム１１のプレス打抜の際同時に行ないグイス
テージ１２の半導体素子取付面に少くとも３ケ所形成す
る。
突起１３は同一形状に形成され、そめ高さ寸法は略１０
〜１００μｍ程度の同一高さであることが望捷しい。
その取付方法はまずグイステージ１２に銀又は金粉末を
混合したエポキシ系樹脂でなる接着樹脂１４を塗布１２
、半導体素子１５を載置し、その底面がグイステージ１
２の突起１３に接するように軽く押圧する。次に１５０
°Ｃ〜２００６Ｃ範囲で加熱硬化処理を行う。
このように接着樹脂１４による接着層は略突起１３の高
さ寸法によって決するから常に均一な接着層が得られ従
来に比しバラツキは減少し改善される。
また作業も簡易化されるため自動化が容易である０ （ｇ）発明の効果 以上詳細に説明し／とように、グイステージに突起を設
けて半導体素子を接木固定することにより従来に比して
接着層の厚みは均一化されるから接着強度が向上する優
れた効果がある。
【図面の簡単な説明】
第３図は本発明の一実施例である多連リードフレームの
平面図、第４図は本発明の一実施例であるグイステージ
に半導体素子を取付けた状態を矢印Ａ方向から兄だ図で
ある。 １１曲リードフレーム、１２曲ダイステージ、１３・・
・・突起、１４曲接着樹脂、１５曲半導体素子。 第　１　霞 工 ２２霞 第３閃 １９１

Claims (1)

    【特許請求の範囲】
  1. ダイステージの半導体素子搭載面に少くとも一３個の突
    起を肩するリードフレームに前記半導体素子を接着固定
    し、樹脂封止してなることを特徴とする半導体装置。
JP57090679A 1982-05-28 1982-05-28 半導体装置 Pending JPS58207645A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57090679A JPS58207645A (ja) 1982-05-28 1982-05-28 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57090679A JPS58207645A (ja) 1982-05-28 1982-05-28 半導体装置

Publications (1)

Publication Number Publication Date
JPS58207645A true JPS58207645A (ja) 1983-12-03

Family

ID=14005217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57090679A Pending JPS58207645A (ja) 1982-05-28 1982-05-28 半導体装置

Country Status (1)

Country Link
JP (1) JPS58207645A (ja)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626478A (en) * 1984-03-22 1986-12-02 Unitrode Corporation Electronic circuit device components having integral spacers providing uniform thickness bonding film
US5138428A (en) * 1989-05-31 1992-08-11 Siemens Aktiengesellschaft Connection of a semiconductor component to a metal carrier
US5214307A (en) * 1991-07-08 1993-05-25 Micron Technology, Inc. Lead frame for semiconductor devices having improved adhesive bond line control
US5397915A (en) * 1991-02-12 1995-03-14 Matsushita Electronics Corporation Semiconductor element mounting die pad including a plurality of extending portions
US5917237A (en) * 1994-04-28 1999-06-29 Rohm Co., Ltd. Semiconductor integrated circuit device and lead frame therefor
US6303985B1 (en) * 1998-11-12 2001-10-16 Micron Technology, Inc. Semiconductor lead frame and package with stiffened mounting paddle
EP1134806A3 (en) * 2000-03-16 2003-11-12 Microchip Technology Inc. Stress reducing lead-frame for plastic encapsulation
US8674520B2 (en) 2011-02-22 2014-03-18 Fujitsu Limited Semiconductor device, method for manufacturing the same, and power supply unit
WO2014061204A1 (ja) * 2012-10-18 2014-04-24 株式会社デンソー 半導体装置およびその製造方法
US8728867B2 (en) 2011-02-22 2014-05-20 Fujitsu Limited Semiconductor device, manufacturing method of semiconductor device, and power source device
IT202000008119A1 (it) * 2020-04-16 2021-10-16 St Microelectronics Srl Produzione di dispositivi integrati da lead-frame con distanziatori
JPWO2020175619A1 (ja) * 2019-02-28 2021-12-16 京セラ株式会社 電子部品搭載用パッケージ、電子装置及び発光装置
US11916353B2 (en) 2020-04-16 2024-02-27 Stmicroelectronics (Grenoble 2) Sas Electronic chip support device and corresponding manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122137A (en) * 1980-02-29 1981-09-25 Toshiba Corp Resin-sealed type semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122137A (en) * 1980-02-29 1981-09-25 Toshiba Corp Resin-sealed type semiconductor device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626478A (en) * 1984-03-22 1986-12-02 Unitrode Corporation Electronic circuit device components having integral spacers providing uniform thickness bonding film
US5138428A (en) * 1989-05-31 1992-08-11 Siemens Aktiengesellschaft Connection of a semiconductor component to a metal carrier
US5397915A (en) * 1991-02-12 1995-03-14 Matsushita Electronics Corporation Semiconductor element mounting die pad including a plurality of extending portions
US5214307A (en) * 1991-07-08 1993-05-25 Micron Technology, Inc. Lead frame for semiconductor devices having improved adhesive bond line control
US5917237A (en) * 1994-04-28 1999-06-29 Rohm Co., Ltd. Semiconductor integrated circuit device and lead frame therefor
US6303985B1 (en) * 1998-11-12 2001-10-16 Micron Technology, Inc. Semiconductor lead frame and package with stiffened mounting paddle
EP1134806A3 (en) * 2000-03-16 2003-11-12 Microchip Technology Inc. Stress reducing lead-frame for plastic encapsulation
US8674520B2 (en) 2011-02-22 2014-03-18 Fujitsu Limited Semiconductor device, method for manufacturing the same, and power supply unit
US8728867B2 (en) 2011-02-22 2014-05-20 Fujitsu Limited Semiconductor device, manufacturing method of semiconductor device, and power source device
US9082756B2 (en) 2011-02-22 2015-07-14 Fujitsu Limited Semiconductor device and power source device
WO2014061204A1 (ja) * 2012-10-18 2014-04-24 株式会社デンソー 半導体装置およびその製造方法
JPWO2020175619A1 (ja) * 2019-02-28 2021-12-16 京セラ株式会社 電子部品搭載用パッケージ、電子装置及び発光装置
IT202000008119A1 (it) * 2020-04-16 2021-10-16 St Microelectronics Srl Produzione di dispositivi integrati da lead-frame con distanziatori
US11916353B2 (en) 2020-04-16 2024-02-27 Stmicroelectronics (Grenoble 2) Sas Electronic chip support device and corresponding manufacturing method

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