JPS58197873A - 半導体装置の製造法 - Google Patents

半導体装置の製造法

Info

Publication number
JPS58197873A
JPS58197873A JP57079970A JP7997082A JPS58197873A JP S58197873 A JPS58197873 A JP S58197873A JP 57079970 A JP57079970 A JP 57079970A JP 7997082 A JP7997082 A JP 7997082A JP S58197873 A JPS58197873 A JP S58197873A
Authority
JP
Japan
Prior art keywords
oxidation
region
conductor
polycrystalline
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57079970A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462179B2 (enrdf_load_stackoverflow
Inventor
Akihisa Uchida
明久 内田
Toshihiko Takakura
俊彦 高倉
Takashi Ishikawa
孝 石川
Nobuhiko Ono
大野　信彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57079970A priority Critical patent/JPS58197873A/ja
Publication of JPS58197873A publication Critical patent/JPS58197873A/ja
Publication of JPH0462179B2 publication Critical patent/JPH0462179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/10—ROM devices comprising bipolar components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/20—Programmable ROM [PROM] devices comprising field-effect components

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP57079970A 1982-05-14 1982-05-14 半導体装置の製造法 Granted JPS58197873A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57079970A JPS58197873A (ja) 1982-05-14 1982-05-14 半導体装置の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57079970A JPS58197873A (ja) 1982-05-14 1982-05-14 半導体装置の製造法

Publications (2)

Publication Number Publication Date
JPS58197873A true JPS58197873A (ja) 1983-11-17
JPH0462179B2 JPH0462179B2 (enrdf_load_stackoverflow) 1992-10-05

Family

ID=13705171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57079970A Granted JPS58197873A (ja) 1982-05-14 1982-05-14 半導体装置の製造法

Country Status (1)

Country Link
JP (1) JPS58197873A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07214008A (ja) * 1993-10-12 1995-08-15 Elpatronic Ag 循環流からリターン回収可能なボトルを除去分離する方法及び装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128861A (en) * 1979-03-28 1980-10-06 Hitachi Ltd Semiconductor integrated circuit device and method of fabricating the same
JPS5642367A (en) * 1979-09-14 1981-04-20 Toshiba Corp Manufacture of bipolar integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128861A (en) * 1979-03-28 1980-10-06 Hitachi Ltd Semiconductor integrated circuit device and method of fabricating the same
JPS5642367A (en) * 1979-09-14 1981-04-20 Toshiba Corp Manufacture of bipolar integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07214008A (ja) * 1993-10-12 1995-08-15 Elpatronic Ag 循環流からリターン回収可能なボトルを除去分離する方法及び装置

Also Published As

Publication number Publication date
JPH0462179B2 (enrdf_load_stackoverflow) 1992-10-05

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