JPS58194720A - 窒化けい素粉末の製造方法 - Google Patents

窒化けい素粉末の製造方法

Info

Publication number
JPS58194720A
JPS58194720A JP7798382A JP7798382A JPS58194720A JP S58194720 A JPS58194720 A JP S58194720A JP 7798382 A JP7798382 A JP 7798382A JP 7798382 A JP7798382 A JP 7798382A JP S58194720 A JPS58194720 A JP S58194720A
Authority
JP
Japan
Prior art keywords
silicon
silicon nitride
nitriding
metal
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7798382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6111887B2 (enrdf_load_stackoverflow
Inventor
Akira Senda
晃 千田
Mitsuo Umemura
梅村 光雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP7798382A priority Critical patent/JPS58194720A/ja
Publication of JPS58194720A publication Critical patent/JPS58194720A/ja
Publication of JPS6111887B2 publication Critical patent/JPS6111887B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682Preparation by direct nitridation of silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP7798382A 1982-05-10 1982-05-10 窒化けい素粉末の製造方法 Granted JPS58194720A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7798382A JPS58194720A (ja) 1982-05-10 1982-05-10 窒化けい素粉末の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7798382A JPS58194720A (ja) 1982-05-10 1982-05-10 窒化けい素粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS58194720A true JPS58194720A (ja) 1983-11-12
JPS6111887B2 JPS6111887B2 (enrdf_load_stackoverflow) 1986-04-05

Family

ID=13649100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7798382A Granted JPS58194720A (ja) 1982-05-10 1982-05-10 窒化けい素粉末の製造方法

Country Status (1)

Country Link
JP (1) JPS58194720A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06181803A (ja) * 1992-12-17 1994-07-05 Takashi Taniyama 中空金属ボタンの表部材と裏部材の組合せ方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06181803A (ja) * 1992-12-17 1994-07-05 Takashi Taniyama 中空金属ボタンの表部材と裏部材の組合せ方法及びその装置

Also Published As

Publication number Publication date
JPS6111887B2 (enrdf_load_stackoverflow) 1986-04-05

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