JPS58159842A - 感光体の製造方法 - Google Patents

感光体の製造方法

Info

Publication number
JPS58159842A
JPS58159842A JP57040673A JP4067382A JPS58159842A JP S58159842 A JPS58159842 A JP S58159842A JP 57040673 A JP57040673 A JP 57040673A JP 4067382 A JP4067382 A JP 4067382A JP S58159842 A JPS58159842 A JP S58159842A
Authority
JP
Japan
Prior art keywords
gas
photoreceptor
conductive support
reaction
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57040673A
Other languages
English (en)
Japanese (ja)
Inventor
Yukio Ide
由紀雄 井手
Koichi Ooshima
大嶋　孝一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP57040673A priority Critical patent/JPS58159842A/ja
Priority to DE19833309651 priority patent/DE3309651A1/de
Publication of JPS58159842A publication Critical patent/JPS58159842A/ja
Priority to US07/217,036 priority patent/US4908292A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08278—Depositing methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP57040673A 1982-03-17 1982-03-17 感光体の製造方法 Pending JPS58159842A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP57040673A JPS58159842A (ja) 1982-03-17 1982-03-17 感光体の製造方法
DE19833309651 DE3309651A1 (de) 1982-03-17 1983-03-17 Verfahren zum herstellen eines photoempfindlichen teils
US07/217,036 US4908292A (en) 1982-03-17 1988-07-11 Method of making an electrophotographic inorganic photosensitive element using ultraviolet radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57040673A JPS58159842A (ja) 1982-03-17 1982-03-17 感光体の製造方法

Publications (1)

Publication Number Publication Date
JPS58159842A true JPS58159842A (ja) 1983-09-22

Family

ID=12587041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57040673A Pending JPS58159842A (ja) 1982-03-17 1982-03-17 感光体の製造方法

Country Status (3)

Country Link
US (1) US4908292A (enExample)
JP (1) JPS58159842A (enExample)
DE (1) DE3309651A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60174864A (ja) * 1984-02-15 1985-09-09 Showa Alum Corp 薄膜形成用アルミニウム基材の表面処理方法
JPS63229711A (ja) * 1987-03-19 1988-09-26 Yasuo Tarui 成膜装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2579825B1 (fr) * 1985-03-28 1991-05-24 Sumitomo Electric Industries Element semi-conducteur, procede pour le realiser et articles dans lesquels cet element est utilise
JPH0752305B2 (ja) * 1985-12-11 1995-06-05 キヤノン株式会社 電子写真感光体の製造方法
DE3786364T2 (de) * 1986-04-14 1993-11-18 Canon Kk Verfahren zur Herstellung einer niedergeschlagenen Schicht.
US20060040499A1 (en) * 2004-08-20 2006-02-23 Steve Walther In situ surface contaminant removal for ion implanting
US7442274B2 (en) * 2005-03-28 2008-10-28 Tokyo Electron Limited Plasma etching method and apparatus therefor
RU2635981C2 (ru) * 2015-12-28 2017-11-17 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" (Университет ИТМО) Способ нанесения тонкого слоя аморфного кремния

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4138306A (en) * 1976-08-31 1979-02-06 Tokyo Shibaura Electric Co., Ltd. Apparatus for the treatment of semiconductors
US4265991A (en) * 1977-12-22 1981-05-05 Canon Kabushiki Kaisha Electrophotographic photosensitive member and process for production thereof
US4349617A (en) * 1979-10-23 1982-09-14 Fuji Photo Film Co., Ltd. Function separated type electrophotographic light-sensitive members and process for production thereof
JPS5711351A (en) * 1980-06-25 1982-01-21 Shunpei Yamazaki Electrostatic copying machine
US4409308A (en) * 1980-10-03 1983-10-11 Canon Kabuskiki Kaisha Photoconductive member with two amorphous silicon layers
US4348428A (en) * 1980-12-15 1982-09-07 Board Of Regents For Oklahoma Agriculture And Mechanical Colleges Acting For And On Behalf Of Oklahoma State University Of Agriculture And Applied Sciences Method of depositing doped amorphous semiconductor on a substrate
US4438188A (en) * 1981-06-15 1984-03-20 Fuji Electric Company, Ltd. Method for producing photosensitive film for electrophotography

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60174864A (ja) * 1984-02-15 1985-09-09 Showa Alum Corp 薄膜形成用アルミニウム基材の表面処理方法
JPS63229711A (ja) * 1987-03-19 1988-09-26 Yasuo Tarui 成膜装置

Also Published As

Publication number Publication date
DE3309651A1 (de) 1983-09-29
DE3309651C2 (enExample) 1989-01-19
US4908292A (en) 1990-03-13

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