JPS5814537A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5814537A
JPS5814537A JP56111951A JP11195181A JPS5814537A JP S5814537 A JPS5814537 A JP S5814537A JP 56111951 A JP56111951 A JP 56111951A JP 11195181 A JP11195181 A JP 11195181A JP S5814537 A JPS5814537 A JP S5814537A
Authority
JP
Japan
Prior art keywords
film
nitride film
oxide film
pinhole
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56111951A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6351375B2 (enrdf_load_stackoverflow
Inventor
Yutaka Tomita
豊 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56111951A priority Critical patent/JPS5814537A/ja
Publication of JPS5814537A publication Critical patent/JPS5814537A/ja
Publication of JPS6351375B2 publication Critical patent/JPS6351375B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP56111951A 1981-07-17 1981-07-17 半導体装置の製造方法 Granted JPS5814537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56111951A JPS5814537A (ja) 1981-07-17 1981-07-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56111951A JPS5814537A (ja) 1981-07-17 1981-07-17 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5814537A true JPS5814537A (ja) 1983-01-27
JPS6351375B2 JPS6351375B2 (enrdf_load_stackoverflow) 1988-10-13

Family

ID=14574234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56111951A Granted JPS5814537A (ja) 1981-07-17 1981-07-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5814537A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170440U (ja) * 1984-04-20 1985-11-12 株式会社河合楽器製作所 防音室の床構造
JPS62135738U (enrdf_load_stackoverflow) * 1986-02-21 1987-08-26
US5079191A (en) * 1985-11-29 1992-01-07 Hitachi, Ltd. Process for producing a semiconductor device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504434A (enrdf_load_stackoverflow) * 1973-05-17 1975-01-17
JPS5394780A (en) * 1977-01-14 1978-08-19 Hitachi Ltd Manufacture of semiconductor device
JPS5438780A (en) * 1977-08-31 1979-03-23 Cho Lsi Gijutsu Kenkyu Kumiai Semiconductor
JPS54109771A (en) * 1978-02-16 1979-08-28 Fujitsu Ltd Stabilizing method for surface protective film of semiconductor
JPS5522863A (en) * 1978-08-07 1980-02-18 Nec Corp Manufacturing method for semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504434A (enrdf_load_stackoverflow) * 1973-05-17 1975-01-17
JPS5394780A (en) * 1977-01-14 1978-08-19 Hitachi Ltd Manufacture of semiconductor device
JPS5438780A (en) * 1977-08-31 1979-03-23 Cho Lsi Gijutsu Kenkyu Kumiai Semiconductor
JPS54109771A (en) * 1978-02-16 1979-08-28 Fujitsu Ltd Stabilizing method for surface protective film of semiconductor
JPS5522863A (en) * 1978-08-07 1980-02-18 Nec Corp Manufacturing method for semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170440U (ja) * 1984-04-20 1985-11-12 株式会社河合楽器製作所 防音室の床構造
US5079191A (en) * 1985-11-29 1992-01-07 Hitachi, Ltd. Process for producing a semiconductor device
JPS62135738U (enrdf_load_stackoverflow) * 1986-02-21 1987-08-26

Also Published As

Publication number Publication date
JPS6351375B2 (enrdf_load_stackoverflow) 1988-10-13

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