JPS58127033A - 清浄室装置 - Google Patents

清浄室装置

Info

Publication number
JPS58127033A
JPS58127033A JP57008851A JP885182A JPS58127033A JP S58127033 A JPS58127033 A JP S58127033A JP 57008851 A JP57008851 A JP 57008851A JP 885182 A JP885182 A JP 885182A JP S58127033 A JPS58127033 A JP S58127033A
Authority
JP
Japan
Prior art keywords
air
clean
room
tunnel
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57008851A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314257B2 (enrdf_load_stackoverflow
Inventor
Katsuto Yagi
八木　克人
Kozo Takahashi
高橋　耕造
Yuji Isayama
諌山　雄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57008851A priority Critical patent/JPS58127033A/ja
Priority to KR1019830000169A priority patent/KR910006190B1/ko
Publication of JPS58127033A publication Critical patent/JPS58127033A/ja
Publication of JPS6314257B2 publication Critical patent/JPS6314257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP57008851A 1982-01-25 1982-01-25 清浄室装置 Granted JPS58127033A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57008851A JPS58127033A (ja) 1982-01-25 1982-01-25 清浄室装置
KR1019830000169A KR910006190B1 (ko) 1982-01-25 1983-01-18 청정실장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57008851A JPS58127033A (ja) 1982-01-25 1982-01-25 清浄室装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP59121704A Division JPS6036838A (ja) 1984-06-15 1984-06-15 清浄室装置
JP62035537A Division JPH0686951B2 (ja) 1987-02-20 1987-02-20 清浄室装置
JP16075289A Division JPH02133737A (ja) 1989-06-26 1989-06-26 清浄室装置

Publications (2)

Publication Number Publication Date
JPS58127033A true JPS58127033A (ja) 1983-07-28
JPS6314257B2 JPS6314257B2 (enrdf_load_stackoverflow) 1988-03-30

Family

ID=11704237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57008851A Granted JPS58127033A (ja) 1982-01-25 1982-01-25 清浄室装置

Country Status (2)

Country Link
JP (1) JPS58127033A (enrdf_load_stackoverflow)
KR (1) KR910006190B1 (enrdf_load_stackoverflow)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965716U (ja) * 1982-10-27 1984-05-02 株式会社竹中工務店 空気清浄装置
WO1985004240A1 (en) * 1984-03-12 1985-09-26 Foster Leo J Portable clean air space system
US4549472A (en) * 1983-09-29 1985-10-29 Hitachi Ltd. Rearrangeable partial environmental control device
JPS6164313A (ja) * 1984-09-07 1986-04-02 Toyo Netsu Kogyo Kk フアンフイルタ−ユニツト
US4586486A (en) * 1984-07-06 1986-05-06 National Air Systems, Inc. Multilevel air distribution panel for air ventilation hood
JPS61114236U (enrdf_load_stackoverflow) * 1984-12-27 1986-07-19
JPS626630U (enrdf_load_stackoverflow) * 1985-06-25 1987-01-16
JPS6254406U (enrdf_load_stackoverflow) * 1985-09-25 1987-04-04
WO1987003356A1 (en) * 1985-11-26 1987-06-04 Shimizu Construction Co., Ltd. Clean room
JPS63148039A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd 清浄作業室の清浄方法
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room
JPH03271645A (ja) * 1990-03-22 1991-12-03 Hitachi Ltd 空気清浄システム
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US5401212A (en) * 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
US5431599A (en) * 1990-08-29 1995-07-11 Intelligent Enclosures Corporation Environmental control system
WO2001033924A1 (en) * 1999-11-02 2001-05-10 Alliedsignal Inc. Substrate manufacturing plant having minimum footprint skinned lines
KR20030094438A (ko) * 2002-06-04 2003-12-12 주식회사선양테크 이동식 공기청정실
JP2011247492A (ja) * 2010-05-27 2011-12-08 Takenaka Komuten Co Ltd クリーンルーム
US8137161B2 (en) 2007-03-23 2012-03-20 Showa Denko K.K. Disk-shaped substrate manufacturing method
CN106345190A (zh) * 2016-10-25 2017-01-25 张家口和圣科技发展有限公司 一种除尘筒脉冲反吹装置
JP2019078422A (ja) * 2017-10-20 2019-05-23 株式会社テクノ菱和 空調システム
JP2022034851A (ja) * 2020-08-19 2022-03-04 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5457128B2 (ja) * 2009-10-05 2014-04-02 新晃工業株式会社 ２台給気ファンを備えた空気調和装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162336A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner
JPS56162335A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162336A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner
JPS56162335A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965716U (ja) * 1982-10-27 1984-05-02 株式会社竹中工務店 空気清浄装置
US4549472A (en) * 1983-09-29 1985-10-29 Hitachi Ltd. Rearrangeable partial environmental control device
WO1985004240A1 (en) * 1984-03-12 1985-09-26 Foster Leo J Portable clean air space system
US4586486A (en) * 1984-07-06 1986-05-06 National Air Systems, Inc. Multilevel air distribution panel for air ventilation hood
JPS6164313A (ja) * 1984-09-07 1986-04-02 Toyo Netsu Kogyo Kk フアンフイルタ−ユニツト
JPS61114236U (enrdf_load_stackoverflow) * 1984-12-27 1986-07-19
JPS626630U (enrdf_load_stackoverflow) * 1985-06-25 1987-01-16
JPS6254406U (enrdf_load_stackoverflow) * 1985-09-25 1987-04-04
WO1987003356A1 (en) * 1985-11-26 1987-06-04 Shimizu Construction Co., Ltd. Clean room
JPS63148039A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd 清浄作業室の清浄方法
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room
JPH03271645A (ja) * 1990-03-22 1991-12-03 Hitachi Ltd 空気清浄システム
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US5401212A (en) * 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
US5431599A (en) * 1990-08-29 1995-07-11 Intelligent Enclosures Corporation Environmental control system
WO2001033924A1 (en) * 1999-11-02 2001-05-10 Alliedsignal Inc. Substrate manufacturing plant having minimum footprint skinned lines
KR20030094438A (ko) * 2002-06-04 2003-12-12 주식회사선양테크 이동식 공기청정실
US8137161B2 (en) 2007-03-23 2012-03-20 Showa Denko K.K. Disk-shaped substrate manufacturing method
JP2011247492A (ja) * 2010-05-27 2011-12-08 Takenaka Komuten Co Ltd クリーンルーム
CN106345190A (zh) * 2016-10-25 2017-01-25 张家口和圣科技发展有限公司 一种除尘筒脉冲反吹装置
CN106345190B (zh) * 2016-10-25 2018-11-20 张家口和圣科技发展有限公司 一种除尘筒脉冲反吹装置
JP2019078422A (ja) * 2017-10-20 2019-05-23 株式会社テクノ菱和 空調システム
JP2022034851A (ja) * 2020-08-19 2022-03-04 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム

Also Published As

Publication number Publication date
KR840003329A (ko) 1984-08-20
KR910006190B1 (ko) 1991-08-16
JPS6314257B2 (enrdf_load_stackoverflow) 1988-03-30

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