KR840003329A - 청정실장치 - Google Patents

청정실장치

Info

Publication number
KR840003329A
KR840003329A KR1019830000169A KR830000169A KR840003329A KR 840003329 A KR840003329 A KR 840003329A KR 1019830000169 A KR1019830000169 A KR 1019830000169A KR 830000169 A KR830000169 A KR 830000169A KR 840003329 A KR840003329 A KR 840003329A
Authority
KR
South Korea
Prior art keywords
clean room
room device
clean
room
Prior art date
Application number
KR1019830000169A
Other languages
English (en)
Other versions
KR910006190B1 (ko
Inventor
가쓰히도 야기
고오조오 다까하시
유우지 이사야마
Original Assignee
가부시기가이샤 히다찌세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 히다찌세이사꾸쇼 filed Critical 가부시기가이샤 히다찌세이사꾸쇼
Publication of KR840003329A publication Critical patent/KR840003329A/ko
Application granted granted Critical
Publication of KR910006190B1 publication Critical patent/KR910006190B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
KR1019830000169A 1982-01-25 1983-01-18 청정실장치 KR910006190B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP57008851A JPS58127033A (ja) 1982-01-25 1982-01-25 清浄室装置
JP82-8851 1982-01-25

Publications (2)

Publication Number Publication Date
KR840003329A true KR840003329A (ko) 1984-08-20
KR910006190B1 KR910006190B1 (ko) 1991-08-16

Family

ID=11704237

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019830000169A KR910006190B1 (ko) 1982-01-25 1983-01-18 청정실장치

Country Status (2)

Country Link
JP (1) JPS58127033A (ko)
KR (1) KR910006190B1 (ko)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965716U (ja) * 1982-10-27 1984-05-02 株式会社竹中工務店 空気清浄装置
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
EP0183709A1 (en) * 1984-03-12 1986-06-11 FOSTER, Leo J. Portable clean air space system
US4586486A (en) * 1984-07-06 1986-05-06 National Air Systems, Inc. Multilevel air distribution panel for air ventilation hood
JPS6164313A (ja) * 1984-09-07 1986-04-02 Toyo Netsu Kogyo Kk フアンフイルタ−ユニツト
JPS61114236U (ko) * 1984-12-27 1986-07-19
JPS626630U (ko) * 1985-06-25 1987-01-16
JPH021775Y2 (ko) * 1985-09-25 1990-01-17
DE3683492D1 (de) * 1985-11-26 1992-02-27 Shimizu Construction Co Ltd Reinraum.
JPS63148039A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd 清浄作業室の清浄方法
JP2526071B2 (ja) * 1987-09-14 1996-08-21 株式会社竹中工務店 局所循環型クリ―ンル―ム
JP2816225B2 (ja) * 1990-03-22 1998-10-27 株式会社日立製作所 空気清浄システム
US5401212A (en) * 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
US5431599A (en) * 1990-08-29 1995-07-11 Intelligent Enclosures Corporation Environmental control system
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US20010039715A1 (en) * 1999-11-02 2001-11-15 Pommer Substrate manufacturing plant having minimum footprint skinned lines
KR20030094438A (ko) * 2002-06-04 2003-12-12 주식회사선양테크 이동식 공기청정실
JP2008229830A (ja) 2007-03-23 2008-10-02 Showa Denko Kk 円盤状基板の製造方法
JP5457128B2 (ja) * 2009-10-05 2014-04-02 新晃工業株式会社 ２台給気ファンを備えた空気調和装置
JP5513989B2 (ja) * 2010-05-27 2014-06-04 株式会社竹中工務店 クリーンルーム
CN106345190B (zh) * 2016-10-25 2018-11-20 张家口和圣科技发展有限公司 一种除尘筒脉冲反吹装置
JP6957308B2 (ja) * 2017-10-20 2021-11-02 株式会社テクノ菱和 空調システム
JP7491773B2 (ja) * 2020-08-19 2024-05-28 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162336A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner
JPS56162335A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner

Also Published As

Publication number Publication date
JPS6314257B2 (ko) 1988-03-30
KR910006190B1 (ko) 1991-08-16
JPS58127033A (ja) 1983-07-28

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