DE3683492D1 - Reinraum. - Google Patents

Reinraum.

Info

Publication number
DE3683492D1
DE3683492D1 DE8686906948T DE3683492T DE3683492D1 DE 3683492 D1 DE3683492 D1 DE 3683492D1 DE 8686906948 T DE8686906948 T DE 8686906948T DE 3683492 T DE3683492 T DE 3683492T DE 3683492 D1 DE3683492 D1 DE 3683492D1
Authority
DE
Germany
Prior art keywords
cleanroom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686906948T
Other languages
English (en)
Inventor
Yoshinobu Suzuki
Mitsufusa Manabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60265465A external-priority patent/JPS62125238A/ja
Priority claimed from JP60274236A external-priority patent/JPS62134431A/ja
Priority claimed from JP60274237A external-priority patent/JPH068695B2/ja
Priority claimed from JP60286571A external-priority patent/JPS62147249A/ja
Priority claimed from JP60287330A external-priority patent/JPS62147250A/ja
Priority claimed from JP60294699A external-priority patent/JPH0735209B2/ja
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Application granted granted Critical
Publication of DE3683492D1 publication Critical patent/DE3683492D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
DE8686906948T 1985-11-26 1986-11-26 Reinraum. Expired - Fee Related DE3683492D1 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP60265465A JPS62125238A (ja) 1985-11-26 1985-11-26 クリ−ンル−ム
JP60274236A JPS62134431A (ja) 1985-12-05 1985-12-05 クリ−ンル−ム
JP60274237A JPH068695B2 (ja) 1985-12-05 1985-12-05 クリ−ンル−ム
JP60286571A JPS62147249A (ja) 1985-12-19 1985-12-19 クリ−ンル−ム
JP60287330A JPS62147250A (ja) 1985-12-20 1985-12-20 クリ−ンル−ム
JP60294699A JPH0735209B2 (ja) 1985-12-27 1985-12-27 クリ−ンル−ム等における被加工物の搬送方法および搬送装置
PCT/JP1986/000603 WO1987003356A1 (en) 1985-11-26 1986-11-26 Clean room

Publications (1)

Publication Number Publication Date
DE3683492D1 true DE3683492D1 (de) 1992-02-27

Family

ID=27554318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686906948T Expired - Fee Related DE3683492D1 (de) 1985-11-26 1986-11-26 Reinraum.

Country Status (5)

Country Link
US (1) US4838150A (de)
EP (1) EP0250596B1 (de)
KR (1) KR880700218A (de)
DE (1) DE3683492D1 (de)
WO (1) WO1987003356A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03291436A (ja) * 1990-04-05 1991-12-20 N M B Semiconductor:Kk 半導体製造工場のクリーンルーム
JP2568006B2 (ja) * 1990-08-23 1996-12-25 インターナショナル・ビジネス・マシーンズ・コーポレイション イオン化空気により対象物から電荷を放電させる方法及びそのための装置
US5058491A (en) * 1990-08-27 1991-10-22 Taiwan Semiconductor Manufacturing Company, Ltd. Building and method for manufacture of integrated circuits
US5399531A (en) * 1990-12-17 1995-03-21 United Micrpelectronics Corporation Single semiconductor wafer transfer method and plural processing station manufacturing system
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
US5413529A (en) * 1993-09-09 1995-05-09 Intermec Corporation Multi-component housing
US5885138A (en) 1993-09-21 1999-03-23 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
DE19544328B4 (de) 1994-11-29 2014-03-20 Ebara Corp. Poliervorrichtung
JPH0926176A (ja) * 1995-07-07 1997-01-28 Canon Inc 処理システムとこれを用いたデバイス生産方法
JP3211147B2 (ja) * 1996-05-29 2001-09-25 株式会社荏原製作所 装置の排気構造
US5972060A (en) * 1996-10-09 1999-10-26 Ch2Mhill Industrial Design Corporation Apparatus for providing a purified resource in a manufacturing facility
US5997399A (en) * 1997-05-09 1999-12-07 La Calhene, Inc. Isolation chamber air curtain apparatus
JP3911904B2 (ja) 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
JPH11344243A (ja) * 1998-06-03 1999-12-14 Oki Electric Ind Co Ltd エアーシャワー装置
US6626971B1 (en) * 1998-09-15 2003-09-30 Siemens Axiva Gmbh & Co. Kg Method and device for protecting persons and/or products from air-borne particles
FR2788843B1 (fr) * 1999-01-26 2001-04-13 U N I R Ultra Propre Nutrition Dispositif de protection rapprochee de produits sensibles par diffusion d'air sterile, avec des extremites d'interface protegees
DE19913886A1 (de) * 1999-03-26 2000-09-28 Siemens Ag Anlage zur Fertigung von Halbleiterprodukten
JP2002542450A (ja) 1999-04-28 2002-12-10 ストラトテック コーポレーション 調節可能なクリーンエアフロー環境
US6439466B2 (en) 1999-09-20 2002-08-27 Jody D. Fikes Climate control system
US6267667B1 (en) 1999-09-20 2001-07-31 Jody Dewitt Fikes Air duct evacuation system
DE10029200A1 (de) * 2000-02-21 2001-08-23 Data Disc Robots Gmbh Prozeßklimatisierung
US6660054B2 (en) * 2000-09-11 2003-12-09 Misonix, Incorporated Fingerprint processing chamber with airborne contaminant containment and adsorption
JP2002122340A (ja) * 2000-10-16 2002-04-26 Sony Corp 半導体装置の製造装置
KR100405982B1 (ko) * 2001-02-12 2003-11-14 엘지전자 주식회사 천정형 공조기의 유로 구조
US6960244B2 (en) * 2001-12-17 2005-11-01 American Safe Air, Inc. System and method for removing contaminates from the air in a mail-sorting room
EP1544553B1 (de) * 2003-12-18 2009-10-07 M+W Zander Products GmbH Einrichtung zur Konditionierung von Umluft, vorzugsweise von Reinluft
DE102004005342B4 (de) * 2004-02-04 2006-01-26 Khs Maschinen- Und Anlagenbau Ag Anlage zum aseptischen Abfüllen eines flüssigen Füllgutes
KR100605106B1 (ko) * 2004-07-01 2006-07-31 삼성전자주식회사 그레이팅 패널 및 그것을 사용하는 청정실 시스템
NL1031200C2 (nl) * 2006-02-21 2007-08-22 Biddle B V Uitblaasrooster en een luchtgordijn-inrichting.
KR101214736B1 (ko) * 2007-10-26 2012-12-21 파나소닉 주식회사 클린 룸
JP5951444B2 (ja) * 2012-10-25 2016-07-13 東京エレクトロン株式会社 基板処理装置および基板処理方法
CN103753605B (zh) * 2014-02-21 2015-09-16 江西珍视明药业有限公司 一种五轴三自由度机械手臂内包材传递系统
JP2016053443A (ja) * 2014-09-03 2016-04-14 富士通株式会社 温度分布予測方法および空調管理システム
US10918758B1 (en) 2020-05-19 2021-02-16 Gregory Jerome Bess Modular self-contained downdraft ventilation system to mitigate cross contamination of airborne pathogens
GB2603480B (en) * 2021-02-03 2023-08-09 Sporting Edge Uk Ltd An air conditioning assembly

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4267769A (en) * 1979-02-22 1981-05-19 Environmental Air Control, Inc. Prefabricated knockdown clean room
JPS5812703A (ja) * 1981-07-15 1983-01-24 松下電工株式会社 単板の溝加工方法及びその装置
JPS58127033A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
JPS58136930A (ja) * 1982-02-05 1983-08-15 Takenaka Komuten Co Ltd クリ−ン作業室
JPS60144542A (ja) * 1984-01-05 1985-07-30 Daifuku Co Ltd 搬送装置
JPS61235625A (ja) * 1985-04-10 1986-10-20 Takenaka Komuten Co Ltd クリ−ンル−ム
JPH0614454A (ja) * 1992-06-19 1994-01-21 Murata Mfg Co Ltd フィルタ装置
JPH0620030A (ja) * 1992-06-30 1994-01-28 Sony Corp ３次元画像情報に基づく画像情報生成及び画像表示データ再生装置
JPH0699943A (ja) * 1992-09-24 1994-04-12 Matsushita Electric Works Ltd 袋シール機

Also Published As

Publication number Publication date
WO1987003356A1 (en) 1987-06-04
EP0250596B1 (de) 1992-01-15
EP0250596A4 (de) 1989-03-21
US4838150A (en) 1989-06-13
EP0250596A1 (de) 1988-01-07
KR880700218A (ko) 1988-02-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee