JPS58118125A - 基板の搬送装置 - Google Patents

基板の搬送装置

Info

Publication number
JPS58118125A
JPS58118125A JP57000737A JP73782A JPS58118125A JP S58118125 A JPS58118125 A JP S58118125A JP 57000737 A JP57000737 A JP 57000737A JP 73782 A JP73782 A JP 73782A JP S58118125 A JPS58118125 A JP S58118125A
Authority
JP
Japan
Prior art keywords
substrate
chuck
fork
spindle chuck
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57000737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632142B2 (enExample
Inventor
Michio Hashimoto
橋本　道夫
Fumio Sakitani
文雄 崎谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tatsumo KK
Original Assignee
Tatsumo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tatsumo KK filed Critical Tatsumo KK
Priority to JP57000737A priority Critical patent/JPS58118125A/ja
Publication of JPS58118125A publication Critical patent/JPS58118125A/ja
Publication of JPS632142B2 publication Critical patent/JPS632142B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP57000737A 1982-01-05 1982-01-05 基板の搬送装置 Granted JPS58118125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57000737A JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57000737A JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Publications (2)

Publication Number Publication Date
JPS58118125A true JPS58118125A (ja) 1983-07-14
JPS632142B2 JPS632142B2 (enExample) 1988-01-18

Family

ID=11482031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57000737A Granted JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Country Status (1)

Country Link
JP (1) JPS58118125A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098638A (ja) * 1983-11-02 1985-06-01 Seiei Kosan Kk 乾板等移送装置
JPS6247133U (enExample) * 1985-09-12 1987-03-23
JPS6247132U (enExample) * 1985-09-12 1987-03-23
JPS62195143A (ja) * 1986-02-21 1987-08-27 Nippon Kogaku Kk <Nikon> 基板の高速変換装置及び方法
JPS63213355A (ja) * 1987-02-27 1988-09-06 Dainippon Screen Mfg Co Ltd 基板移載装置
JPS63178329U (enExample) * 1988-04-13 1988-11-18
JPS63282022A (ja) * 1987-05-15 1988-11-18 Hitachi Electronics Eng Co Ltd ワ−ク搬送装置
JP2002261145A (ja) * 2001-03-02 2002-09-13 Kanayama Seiki Co Ltd ウェーハ取出・収納装置
JP2017114045A (ja) * 2015-12-25 2017-06-29 ローランドディー．ジー．株式会社 インクジェットプリンタ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102561159B1 (ko) * 2021-06-28 2023-07-27 오석환 전기전도성이 향상된 버스바의 결합 구조체, 결합 방법 및 이를 이용한 배전반

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enExample) * 1974-06-25 1976-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enExample) * 1974-06-25 1976-01-12

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098638A (ja) * 1983-11-02 1985-06-01 Seiei Kosan Kk 乾板等移送装置
JPS6247133U (enExample) * 1985-09-12 1987-03-23
JPS6247132U (enExample) * 1985-09-12 1987-03-23
JPS62195143A (ja) * 1986-02-21 1987-08-27 Nippon Kogaku Kk <Nikon> 基板の高速変換装置及び方法
JPS63213355A (ja) * 1987-02-27 1988-09-06 Dainippon Screen Mfg Co Ltd 基板移載装置
JPS63282022A (ja) * 1987-05-15 1988-11-18 Hitachi Electronics Eng Co Ltd ワ−ク搬送装置
JPS63178329U (enExample) * 1988-04-13 1988-11-18
JP2002261145A (ja) * 2001-03-02 2002-09-13 Kanayama Seiki Co Ltd ウェーハ取出・収納装置
JP2017114045A (ja) * 2015-12-25 2017-06-29 ローランドディー．ジー．株式会社 インクジェットプリンタ

Also Published As

Publication number Publication date
JPS632142B2 (enExample) 1988-01-18

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