JPS6247133U - - Google Patents
Info
- Publication number
- JPS6247133U JPS6247133U JP13960685U JP13960685U JPS6247133U JP S6247133 U JPS6247133 U JP S6247133U JP 13960685 U JP13960685 U JP 13960685U JP 13960685 U JP13960685 U JP 13960685U JP S6247133 U JPS6247133 U JP S6247133U
- Authority
- JP
- Japan
- Prior art keywords
- transfer device
- beams
- wafers
- heat treatment
- push
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000206 photolithography Methods 0.000 claims 1
Landscapes
- Reciprocating Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985139606U JPH0526754Y2 (enExample) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985139606U JPH0526754Y2 (enExample) | 1985-09-12 | 1985-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247133U true JPS6247133U (enExample) | 1987-03-23 |
| JPH0526754Y2 JPH0526754Y2 (enExample) | 1993-07-07 |
Family
ID=31045669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985139606U Expired - Lifetime JPH0526754Y2 (enExample) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526754Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
-
1985
- 1985-09-12 JP JP1985139606U patent/JPH0526754Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526754Y2 (enExample) | 1993-07-07 |