JPS6247133U - - Google Patents

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Publication number
JPS6247133U
JPS6247133U JP13960685U JP13960685U JPS6247133U JP S6247133 U JPS6247133 U JP S6247133U JP 13960685 U JP13960685 U JP 13960685U JP 13960685 U JP13960685 U JP 13960685U JP S6247133 U JPS6247133 U JP S6247133U
Authority
JP
Japan
Prior art keywords
transfer device
beams
wafers
heat treatment
push
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13960685U
Other languages
English (en)
Other versions
JPH0526754Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985139606U priority Critical patent/JPH0526754Y2/ja
Publication of JPS6247133U publication Critical patent/JPS6247133U/ja
Application granted granted Critical
Publication of JPH0526754Y2 publication Critical patent/JPH0526754Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Reciprocating Conveyors (AREA)

Description

【図面の簡単な説明】
第1図および第2図はこの考案の一実施例によ
るウエハ搬送装置の平面図と正面図、第3図は熱
処理プレートとアームの拡大図である。 1,2……熱処理プレート、5a,5b,5c
……上下移動ビーム、6a,6b,6c……押上
棒、7a,7b……シリンダ、9a,9b,9c
……アーム、18a,18b,18c……ウエハ
。なお、図中、同一符号は同一又は相当部分を示
す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハの写真製版の熱処理プレートにお
    ける搬送装置において、搬送アームにウエハを載
    せ変える複数の独立した上下移動ビームを有し、
    これら各ビームはシリンダの操作により上下動す
    る押上棒により同時に連動可能にしたことを特徴
    とする半導体ウエハの搬送装置。
JP1985139606U 1985-09-12 1985-09-12 Expired - Lifetime JPH0526754Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985139606U JPH0526754Y2 (ja) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985139606U JPH0526754Y2 (ja) 1985-09-12 1985-09-12

Publications (2)

Publication Number Publication Date
JPS6247133U true JPS6247133U (ja) 1987-03-23
JPH0526754Y2 JPH0526754Y2 (ja) 1993-07-07

Family

ID=31045669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985139606U Expired - Lifetime JPH0526754Y2 (ja) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPH0526754Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置

Also Published As

Publication number Publication date
JPH0526754Y2 (ja) 1993-07-07

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