JPS6247132U - - Google Patents

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Publication number
JPS6247132U
JPS6247132U JP13960585U JP13960585U JPS6247132U JP S6247132 U JPS6247132 U JP S6247132U JP 13960585 U JP13960585 U JP 13960585U JP 13960585 U JP13960585 U JP 13960585U JP S6247132 U JPS6247132 U JP S6247132U
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
treatment plate
vertically moving
moving beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13960585U
Other languages
English (en)
Other versions
JPH0526753Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985139605U priority Critical patent/JPH0526753Y2/ja
Publication of JPS6247132U publication Critical patent/JPS6247132U/ja
Application granted granted Critical
Publication of JPH0526753Y2 publication Critical patent/JPH0526753Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるウエハ搬送
装置の平面図、第２図は同じく正面図、第３図は
搬送アームの拡大図である。 図において、１，２は熱処理プレート、３は搬
送ベルト、４は出口ベルト、５は上下移動ビーム
、６はシリンダ、７ａ，７ｂ，７ｃはアーム、１
６ａ，１６ｂ，１６ｃはウエハ、１７，１８は位
置決めピンである。なお、図中同一符号は同一又
は相当部分を示す。
補正 昭６１．４．２５ 図面の簡単な説明を次のように補正する。 明細書第７頁第１２行の「出口ベルト」という
記載を「出口搬送ベルト」と補正する。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハの熱処理プレートにおける搬送装
    置において、搬送アームにウエハを乗せ変える上
    下移動ビームを有し、上記熱処理プレート上にウ
    エハを位置決めする複数のピンを該ウエハ外周を
    取り囲んで突設したことを特徴とするウエハ搬送
    装置。
JP1985139605U 1985-09-12 1985-09-12 Expired - Lifetime JPH0526753Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985139605U JPH0526753Y2 (ja) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985139605U JPH0526753Y2 (ja) 1985-09-12 1985-09-12

Publications (2)

Publication Number Publication Date
JPS6247132U true JPS6247132U (ja) 1987-03-23
JPH0526753Y2 JPH0526753Y2 (ja) 1993-07-07

Family

ID=31045667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985139605U Expired - Lifetime JPH0526753Y2 (ja) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPH0526753Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置
JPS58223340A (ja) * 1982-06-22 1983-12-24 Dainippon Screen Mfg Co Ltd 半導体ウエハの乾燥装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置
JPS58223340A (ja) * 1982-06-22 1983-12-24 Dainippon Screen Mfg Co Ltd 半導体ウエハの乾燥装置

Also Published As

Publication number Publication date
JPH0526753Y2 (ja) 1993-07-07

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