JPS6395240U - - Google Patents
Info
- Publication number
- JPS6395240U JPS6395240U JP19022986U JP19022986U JPS6395240U JP S6395240 U JPS6395240 U JP S6395240U JP 19022986 U JP19022986 U JP 19022986U JP 19022986 U JP19022986 U JP 19022986U JP S6395240 U JPS6395240 U JP S6395240U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- drying device
- supports
- forth
- extends
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19022986U JPS6395240U (enExample) | 1986-12-10 | 1986-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19022986U JPS6395240U (enExample) | 1986-12-10 | 1986-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395240U true JPS6395240U (enExample) | 1988-06-20 |
Family
ID=31143257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19022986U Pending JPS6395240U (enExample) | 1986-12-10 | 1986-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395240U (enExample) |
-
1986
- 1986-12-10 JP JP19022986U patent/JPS6395240U/ja active Pending