JPS6336033U - - Google Patents
Info
- Publication number
- JPS6336033U JPS6336033U JP12711686U JP12711686U JPS6336033U JP S6336033 U JPS6336033 U JP S6336033U JP 12711686 U JP12711686 U JP 12711686U JP 12711686 U JP12711686 U JP 12711686U JP S6336033 U JPS6336033 U JP S6336033U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- alignment
- alignment mark
- dimensions
- marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12711686U JPS6336033U (enExample) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12711686U JPS6336033U (enExample) | 1986-08-22 | 1986-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336033U true JPS6336033U (enExample) | 1988-03-08 |
Family
ID=31021558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12711686U Pending JPS6336033U (enExample) | 1986-08-22 | 1986-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336033U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
| JPS57112021A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS59188648A (ja) * | 1983-04-11 | 1984-10-26 | Oki Electric Ind Co Ltd | マスク合せキ− |
-
1986
- 1986-08-22 JP JP12711686U patent/JPS6336033U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
| JPS57112021A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS59188648A (ja) * | 1983-04-11 | 1984-10-26 | Oki Electric Ind Co Ltd | マスク合せキ− |