JPH01121924U - - Google Patents
Info
- Publication number
- JPH01121924U JPH01121924U JP1714488U JP1714488U JPH01121924U JP H01121924 U JPH01121924 U JP H01121924U JP 1714488 U JP1714488 U JP 1714488U JP 1714488 U JP1714488 U JP 1714488U JP H01121924 U JPH01121924 U JP H01121924U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- chip
- different
- misalignment detection
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714488U JPH01121924U (enExample) | 1988-02-12 | 1988-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714488U JPH01121924U (enExample) | 1988-02-12 | 1988-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121924U true JPH01121924U (enExample) | 1989-08-18 |
Family
ID=31230665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1714488U Pending JPH01121924U (enExample) | 1988-02-12 | 1988-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121924U (enExample) |
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1988
- 1988-02-12 JP JP1714488U patent/JPH01121924U/ja active Pending