JPS5799781A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5799781A
JPS5799781A JP56124869A JP12486981A JPS5799781A JP S5799781 A JPS5799781 A JP S5799781A JP 56124869 A JP56124869 A JP 56124869A JP 12486981 A JP12486981 A JP 12486981A JP S5799781 A JPS5799781 A JP S5799781A
Authority
JP
Japan
Prior art keywords
sio2
electrodes
si3n4
mask
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56124869A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427694B2 (enrdf_load_stackoverflow
Inventor
Masanori Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56124869A priority Critical patent/JPS5799781A/ja
Publication of JPS5799781A publication Critical patent/JPS5799781A/ja
Publication of JPH0427694B2 publication Critical patent/JPH0427694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56124869A 1981-08-10 1981-08-10 Manufacture of semiconductor device Granted JPS5799781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56124869A JPS5799781A (en) 1981-08-10 1981-08-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56124869A JPS5799781A (en) 1981-08-10 1981-08-10 Manufacture of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP654177A Division JPS5284989A (en) 1977-01-24 1977-01-24 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5799781A true JPS5799781A (en) 1982-06-21
JPH0427694B2 JPH0427694B2 (enrdf_load_stackoverflow) 1992-05-12

Family

ID=14896105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56124869A Granted JPS5799781A (en) 1981-08-10 1981-08-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5799781A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932635A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932635A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-25

Also Published As

Publication number Publication date
JPH0427694B2 (enrdf_load_stackoverflow) 1992-05-12

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