JPS5793569A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5793569A
JPS5793569A JP55170365A JP17036580A JPS5793569A JP S5793569 A JPS5793569 A JP S5793569A JP 55170365 A JP55170365 A JP 55170365A JP 17036580 A JP17036580 A JP 17036580A JP S5793569 A JPS5793569 A JP S5793569A
Authority
JP
Japan
Prior art keywords
film
oxidized
polysilicon
base
nitrided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55170365A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230575B2 (enrdf_load_stackoverflow
Inventor
Osamu Hataishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55170365A priority Critical patent/JPS5793569A/ja
Publication of JPS5793569A publication Critical patent/JPS5793569A/ja
Publication of JPH0230575B2 publication Critical patent/JPH0230575B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
JP55170365A 1980-12-03 1980-12-03 Manufacture of semiconductor device Granted JPS5793569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55170365A JPS5793569A (en) 1980-12-03 1980-12-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55170365A JPS5793569A (en) 1980-12-03 1980-12-03 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5793569A true JPS5793569A (en) 1982-06-10
JPH0230575B2 JPH0230575B2 (enrdf_load_stackoverflow) 1990-07-06

Family

ID=15903577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55170365A Granted JPS5793569A (en) 1980-12-03 1980-12-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5793569A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134588A (ja) * 2005-11-11 2007-05-31 Sanken Electric Co Ltd 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558569A (en) * 1978-10-24 1980-05-01 Mitsubishi Electric Corp Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558569A (en) * 1978-10-24 1980-05-01 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134588A (ja) * 2005-11-11 2007-05-31 Sanken Electric Co Ltd 半導体装置

Also Published As

Publication number Publication date
JPH0230575B2 (enrdf_load_stackoverflow) 1990-07-06

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