JPS5792838A - Cassette to cassette substrate process device - Google Patents

Cassette to cassette substrate process device

Info

Publication number
JPS5792838A
JPS5792838A JP16905780A JP16905780A JPS5792838A JP S5792838 A JPS5792838 A JP S5792838A JP 16905780 A JP16905780 A JP 16905780A JP 16905780 A JP16905780 A JP 16905780A JP S5792838 A JPS5792838 A JP S5792838A
Authority
JP
Japan
Prior art keywords
cassette
chamber
substrates
accommodated
exhausted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16905780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6128030B2 (no
Inventor
Nobuyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP16905780A priority Critical patent/JPS5792838A/ja
Publication of JPS5792838A publication Critical patent/JPS5792838A/ja
Publication of JPS6128030B2 publication Critical patent/JPS6128030B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16905780A 1980-12-02 1980-12-02 Cassette to cassette substrate process device Granted JPS5792838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16905780A JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16905780A JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Publications (2)

Publication Number Publication Date
JPS5792838A true JPS5792838A (en) 1982-06-09
JPS6128030B2 JPS6128030B2 (no) 1986-06-28

Family

ID=15879535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16905780A Granted JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Country Status (1)

Country Link
JP (1) JPS5792838A (no)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015917A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 分子線エピタキシ装置
JPS60117615A (ja) * 1983-11-30 1985-06-25 Hitachi Ltd 分子線エピタキシ装置
JPS6136925A (ja) * 1984-07-23 1986-02-21 アルカテル・エヌ・ブイ エピタキシヤル成長法による半導体層構造の製造装置
JPS61121654U (no) * 1985-01-17 1986-07-31

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104580A (en) * 1977-02-25 1978-09-11 Ulvac Corp Vacuum continuous treatment apparatus
JPS5526047U (no) * 1978-08-07 1980-02-20

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52134591A (en) * 1976-05-06 1977-11-10 Komatsu Seisakusho:Kk Automatic continuous packaging method of pickles, etc.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104580A (en) * 1977-02-25 1978-09-11 Ulvac Corp Vacuum continuous treatment apparatus
JPS5526047U (no) * 1978-08-07 1980-02-20

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015917A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 分子線エピタキシ装置
JPS60117615A (ja) * 1983-11-30 1985-06-25 Hitachi Ltd 分子線エピタキシ装置
JPH0568849B2 (no) * 1983-11-30 1993-09-29 Hitachi Ltd
JPS6136925A (ja) * 1984-07-23 1986-02-21 アルカテル・エヌ・ブイ エピタキシヤル成長法による半導体層構造の製造装置
JPS61121654U (no) * 1985-01-17 1986-07-31

Also Published As

Publication number Publication date
JPS6128030B2 (no) 1986-06-28

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