JPS57136320A - Exchanger for sample in electron-ray drawing device - Google Patents

Abstract

PURPOSE:To shorten turn-around time required for drawing per one sample by mounting the three sample exchanging chambers of the first chamber, a preparatory chamber and the third chamber apart from a sample chamber for conducting the drawing of the electron-ray drawing device and taking in and out a sample cassette independently of the action of drawing. CONSTITUTION:A sample 10 is admitted into the first chamber 8 under atmospheric pressure. The first chamber 8 and the third chamber 13 are evacuated in the same extent as the sample chamber 1, and the sample 10 is moved into the preparatory chamber 2. A sample 10a in the preparatory chamber 2 previously drawn is shifted to the third chamber 13 at the same time. The sample 10 in the preparatory chamber 2 is introduced into the sample chamber 1, and drawn. Another sample is entered into the first chamber during that time, and the first chamber is evacuated together with the third chamber. The sample 10 is returned into the preparatory chamber 2 from the inside of the sample chamber 1, and another sample in the first chamber 8 is transferred into the preparartory chamber 2 while the sample 10 is moved into the third chamber 13. The sample is shifted into the sample chamber 1 from the preparatory chamber 2 at once. The first and third chambers are returned to atmospheric pressure, a new sample is admitted into the first chamber 8, and the sample is taken out of the third chamber 13. New drawing is conducted during that time.