JPS5323267A - Differential exhausting vacuum chamber - Google Patents

Differential exhausting vacuum chamber

Info

Publication number
JPS5323267A
JPS5323267A JP9710176A JP9710176A JPS5323267A JP S5323267 A JPS5323267 A JP S5323267A JP 9710176 A JP9710176 A JP 9710176A JP 9710176 A JP9710176 A JP 9710176A JP S5323267 A JPS5323267 A JP S5323267A
Authority
JP
Japan
Prior art keywords
vacuum chamber
exhausting vacuum
differential exhausting
differential
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9710176A
Other languages
Japanese (ja)
Inventor
Naotake Saito
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9710176A priority Critical patent/JPS5323267A/en
Publication of JPS5323267A publication Critical patent/JPS5323267A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A differential exhausting vacuum chamber is partitioned by using iris plates having a small aperture into the same number of small chambers as that of pump-exhaust tubes provided to the circumference, and small chambers are made correspond to pumps, thereby improving the unit.
COPYRIGHT: (C)1978,JPO&Japio
JP9710176A 1976-08-16 1976-08-16 Differential exhausting vacuum chamber Pending JPS5323267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9710176A JPS5323267A (en) 1976-08-16 1976-08-16 Differential exhausting vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9710176A JPS5323267A (en) 1976-08-16 1976-08-16 Differential exhausting vacuum chamber

Publications (1)

Publication Number Publication Date
JPS5323267A true JPS5323267A (en) 1978-03-03

Family

ID=14183213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9710176A Pending JPS5323267A (en) 1976-08-16 1976-08-16 Differential exhausting vacuum chamber

Country Status (1)

Country Link
JP (1) JPS5323267A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109648A (en) * 1987-10-21 1989-04-26 Nec Corp Beam plasma type ion gun
WO2008054093A1 (en) * 2006-10-31 2008-05-08 Korean Basic Science Institute 3-dimensional differential pumping system and method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109648A (en) * 1987-10-21 1989-04-26 Nec Corp Beam plasma type ion gun
WO2008054093A1 (en) * 2006-10-31 2008-05-08 Korean Basic Science Institute 3-dimensional differential pumping system and method thereof
KR100852953B1 (en) 2006-10-31 2008-08-19 한국기초과학지원연구원 A solid differential pumping system and a method thereof
US7755039B2 (en) 2006-10-31 2010-07-13 Korea Basic Science Institute 3-dimensional differential pumping system and method thereof

Similar Documents

Publication Publication Date Title
JPS52149509A (en) Combustion chamber
JPS5323267A (en) Differential exhausting vacuum chamber
JPS5214202A (en) Mechanical fuel pump
JPS5240854A (en) High frequency heating unit
JPS51151062A (en) Electron tube
JPS52135659A (en) Magnetron and its manufacturing method
JPS51113215A (en) Piston type accumulater.
JPS5358810A (en) High vacuum pump
JPS5289835A (en) Liquid fuel vapor preheat combustor
JPS5416708A (en) Low noize fan
JPS51147008A (en) Discharge pressure fluctuation proof fin system for centrifugal fan
JPS5411717A (en) Active coupler
JPS5267842A (en) High frequency heater
JPS5279759A (en) Multi-stage accelerating tube
JPS51128581A (en) Diaphragm type pressure element
JPS51140060A (en) Plus pressure type vacuum pinset
JPS51142972A (en) Manufacturing method of discharge display panel
JPS5346262A (en) Manufacture for magnetron
JPS5290805A (en) Attenuator of low frequency air pressure wave
JPS5218509A (en) Construction of discharge port of rotary engine
JPS52102970A (en) Master cylinder
JPS5320150A (en) Two stage compression freezer
JPS51116665A (en) Secondary electron multiplier plate
JPS5354967A (en) Discharge display unit and its manufacture
JPS51132078A (en) Bulb inside cleane in the manufacturing process of cathode beam tube