JPS5358810A - High vacuum pump - Google Patents
High vacuum pumpInfo
- Publication number
- JPS5358810A JPS5358810A JP13395176A JP13395176A JPS5358810A JP S5358810 A JPS5358810 A JP S5358810A JP 13395176 A JP13395176 A JP 13395176A JP 13395176 A JP13395176 A JP 13395176A JP S5358810 A JPS5358810 A JP S5358810A
- Authority
- JP
- Japan
- Prior art keywords
- high vacuum
- vacuum pump
- pump
- torr
- constituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
PURPOSE: The high vacuum pump having the two stage series exhaustion mechanism constituted of the molecule pump and the vane pump and so constituted that both driving shafts are driven by a single driving source and the exhausting action is performed continuously from 760 Torr to 10-6 Torr under the back pressure of the atmospheric pressure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13395176A JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13395176A JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5358810A true JPS5358810A (en) | 1978-05-27 |
JPS6137474B2 JPS6137474B2 (en) | 1986-08-23 |
Family
ID=15116876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13395176A Granted JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358810A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6238899A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPS6238898A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPS6238897A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPH01124396U (en) * | 1988-02-17 | 1989-08-24 |
-
1976
- 1976-11-08 JP JP13395176A patent/JPS5358810A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6238899A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPS6238898A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPS6238897A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
JPH01124396U (en) * | 1988-02-17 | 1989-08-24 |
Also Published As
Publication number | Publication date |
---|---|
JPS6137474B2 (en) | 1986-08-23 |
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