JPS5794338A - Vapor deposition device - Google Patents
Vapor deposition deviceInfo
- Publication number
- JPS5794338A JPS5794338A JP17030480A JP17030480A JPS5794338A JP S5794338 A JPS5794338 A JP S5794338A JP 17030480 A JP17030480 A JP 17030480A JP 17030480 A JP17030480 A JP 17030480A JP S5794338 A JPS5794338 A JP S5794338A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- chamber
- communicates
- cooling chamber
- ion cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve efficiency of vapor deposition by providing an ion cleaning chamber and a preliminary vacuum chamber in the front stage of a vapor deposition chamber and providing the first cooling chamber and second cooling chamber in the rear stage.
CONSTITUTION: In the front stage of a vapor deposition chamber 5 of a vapor deposition device that makes vapor deposition on a substrate 1, an ion cleaning chamber 3 that cleans the substrate and a preliminary vacuum chamber 4 which communicates with the ion cleaning chamber 3 are provided, and the first cooling chamber 6 that communicates with the vapor deposition chamber 5 and the second cooling chamber 7 that communicates with the first cooling chamber 6 are provided in the rear stage. Thus, continuous vapor deposition is made possible by sending substrates successively in the vapor deposition chamber 5 to improve efficiency of vapor depositing operation.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17030480A JPS5794338A (en) | 1980-12-04 | 1980-12-04 | Vapor deposition device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17030480A JPS5794338A (en) | 1980-12-04 | 1980-12-04 | Vapor deposition device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5794338A true JPS5794338A (en) | 1982-06-11 |
JPS6411334B2 JPS6411334B2 (en) | 1989-02-23 |
Family
ID=15902479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17030480A Granted JPS5794338A (en) | 1980-12-04 | 1980-12-04 | Vapor deposition device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5794338A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082280A (en) * | 1983-10-05 | 1985-05-10 | Hitachi Ltd | Joining device for clean surface |
JPS6147069U (en) * | 1984-08-25 | 1986-03-29 | 株式会社島津製作所 | Processing material transfer device |
JPS6194558U (en) * | 1984-11-28 | 1986-06-18 | ||
US11116379B2 (en) | 2016-08-04 | 2021-09-14 | Lg Electronics Inc. | Dishwasher |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5511083A (en) * | 1978-04-07 | 1980-01-25 | Varian Associates | Spatter coating system and vacuum vale* transporter and spatter source arranging device for said system |
JPS55116432A (en) * | 1979-03-02 | 1980-09-08 | Anelva Corp | Vacuum apparatus |
-
1980
- 1980-12-04 JP JP17030480A patent/JPS5794338A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5511083A (en) * | 1978-04-07 | 1980-01-25 | Varian Associates | Spatter coating system and vacuum vale* transporter and spatter source arranging device for said system |
JPS55116432A (en) * | 1979-03-02 | 1980-09-08 | Anelva Corp | Vacuum apparatus |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082280A (en) * | 1983-10-05 | 1985-05-10 | Hitachi Ltd | Joining device for clean surface |
JPS6147069U (en) * | 1984-08-25 | 1986-03-29 | 株式会社島津製作所 | Processing material transfer device |
JPS6194558U (en) * | 1984-11-28 | 1986-06-18 | ||
US11116379B2 (en) | 2016-08-04 | 2021-09-14 | Lg Electronics Inc. | Dishwasher |
Also Published As
Publication number | Publication date |
---|---|
JPS6411334B2 (en) | 1989-02-23 |
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