JPS5780724A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS5780724A
JPS5780724A JP55156575A JP15657580A JPS5780724A JP S5780724 A JPS5780724 A JP S5780724A JP 55156575 A JP55156575 A JP 55156575A JP 15657580 A JP15657580 A JP 15657580A JP S5780724 A JPS5780724 A JP S5780724A
Authority
JP
Japan
Prior art keywords
chip
base
point
coordinates
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55156575A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0140492B2 (enExample
Inventor
Kiwao Nakazawa
Shoichi Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55156575A priority Critical patent/JPS5780724A/ja
Priority to US06/225,049 priority patent/US4385838A/en
Publication of JPS5780724A publication Critical patent/JPS5780724A/ja
Publication of JPH0140492B2 publication Critical patent/JPH0140492B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP55156575A 1980-01-19 1980-11-07 Positioning device Granted JPS5780724A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP55156575A JPS5780724A (en) 1980-11-07 1980-11-07 Positioning device
US06/225,049 US4385838A (en) 1980-01-19 1981-01-14 Alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55156575A JPS5780724A (en) 1980-11-07 1980-11-07 Positioning device

Publications (2)

Publication Number Publication Date
JPS5780724A true JPS5780724A (en) 1982-05-20
JPH0140492B2 JPH0140492B2 (enExample) 1989-08-29

Family

ID=15630753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55156575A Granted JPS5780724A (en) 1980-01-19 1980-11-07 Positioning device

Country Status (1)

Country Link
JP (1) JPS5780724A (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176934A (ja) * 1982-04-09 1983-10-17 Oki Electric Ind Co Ltd ウエ−ハアラインメント方法
JPS5954225A (ja) * 1982-09-21 1984-03-29 Hitachi Ltd 投影露光方法
JPS60130742A (ja) * 1983-12-19 1985-07-12 Nippon Kogaku Kk <Nikon> 投影露光装置の位置合せ装置
JPS60175051A (ja) * 1984-02-21 1985-09-09 Canon Inc 半導体焼付方法
JPS60179745A (ja) * 1984-02-28 1985-09-13 Nippon Kogaku Kk <Nikon> パターン転写方法、及び転写装置
JPS60245134A (ja) * 1984-05-18 1985-12-04 Nippon Kogaku Kk <Nikon> 位置決め装置、及び該装置を用いた基板の位置決め方法
JPS6254434A (ja) * 1985-09-03 1987-03-10 Nippon Kogaku Kk <Nikon> 露光方法
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS63132425A (ja) * 1986-07-14 1988-06-04 Oki Electric Ind Co Ltd 縮小露光機の位置決め方法
JPH01161832A (ja) * 1987-12-18 1989-06-26 Nikon Corp 投影露光装置及び露光方法
JPH038319A (ja) * 1990-02-14 1991-01-16 Nikon Corp 露光装置の位置合わせ装置及び方法
JPH06283419A (ja) * 1993-08-23 1994-10-07 Nikon Corp 位置決め装置
JPH07183213A (ja) * 1994-09-30 1995-07-21 Hitachi Ltd 投影露光方法
US8064730B2 (en) 2003-09-22 2011-11-22 Asml Netherlands B.V. Device manufacturing method, orientation determination method and lithographic apparatus
US8646153B2 (en) 2010-06-07 2014-02-11 Mitsubishi Electric Corporation Hinge mechanism, and monitor opening and closing mechanism
JP2023104683A (ja) * 2022-01-18 2023-07-28 キヤノン株式会社 検出装置、検出方法、露光装置及び物品の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105376A (en) * 1977-02-25 1978-09-13 Hitachi Ltd Positioning unit
JPS541553A (en) * 1977-06-07 1979-01-08 Toshiba Corp Group management control method of elevator
JPS5541739A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Micro-projection type mask alignment device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105376A (en) * 1977-02-25 1978-09-13 Hitachi Ltd Positioning unit
JPS541553A (en) * 1977-06-07 1979-01-08 Toshiba Corp Group management control method of elevator
JPS5541739A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Micro-projection type mask alignment device

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176934A (ja) * 1982-04-09 1983-10-17 Oki Electric Ind Co Ltd ウエ−ハアラインメント方法
JPS5954225A (ja) * 1982-09-21 1984-03-29 Hitachi Ltd 投影露光方法
JPS60130742A (ja) * 1983-12-19 1985-07-12 Nippon Kogaku Kk <Nikon> 投影露光装置の位置合せ装置
JPS60175051A (ja) * 1984-02-21 1985-09-09 Canon Inc 半導体焼付方法
JPS60179745A (ja) * 1984-02-28 1985-09-13 Nippon Kogaku Kk <Nikon> パターン転写方法、及び転写装置
JPS60245134A (ja) * 1984-05-18 1985-12-04 Nippon Kogaku Kk <Nikon> 位置決め装置、及び該装置を用いた基板の位置決め方法
JPS6254434A (ja) * 1985-09-03 1987-03-10 Nippon Kogaku Kk <Nikon> 露光方法
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS63132425A (ja) * 1986-07-14 1988-06-04 Oki Electric Ind Co Ltd 縮小露光機の位置決め方法
JPH01161832A (ja) * 1987-12-18 1989-06-26 Nikon Corp 投影露光装置及び露光方法
JPH038319A (ja) * 1990-02-14 1991-01-16 Nikon Corp 露光装置の位置合わせ装置及び方法
JPH06283419A (ja) * 1993-08-23 1994-10-07 Nikon Corp 位置決め装置
JPH07183213A (ja) * 1994-09-30 1995-07-21 Hitachi Ltd 投影露光方法
US8064730B2 (en) 2003-09-22 2011-11-22 Asml Netherlands B.V. Device manufacturing method, orientation determination method and lithographic apparatus
US8646153B2 (en) 2010-06-07 2014-02-11 Mitsubishi Electric Corporation Hinge mechanism, and monitor opening and closing mechanism
JP2023104683A (ja) * 2022-01-18 2023-07-28 キヤノン株式会社 検出装置、検出方法、露光装置及び物品の製造方法

Also Published As

Publication number Publication date
JPH0140492B2 (enExample) 1989-08-29

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