JPS5488083A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5488083A JPS5488083A JP15678977A JP15678977A JPS5488083A JP S5488083 A JPS5488083 A JP S5488083A JP 15678977 A JP15678977 A JP 15678977A JP 15678977 A JP15678977 A JP 15678977A JP S5488083 A JPS5488083 A JP S5488083A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- exposed
- reference line
- chip mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make easy the mask alignment and the detection of chip mark, by forming the reference line in prarllel with the facet of wafer on the mask in advance, in placing the mask on a given position on the wafer.
CONSTITUTION: The reference line 14 is formed on the position on the mask 11 corresponding to the facet of the wafer 12. In aligning the mask 11 and the wafer 12, when the reference line 14 and the faset 16 are made parallel, the position toward Y direction of the chip mark 13 in each chip is within slight error range, and the chip mark 13 can be detected by only scanning the pattern over somewhat broader range only toward X before the objective pattern is exposed with electron beams. Accordingly, in detecting the chip mark 13 with electron beams, very narrow range can be scanned and exposed, and the region on the wafer to form the circuit can not be exposed.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15678977A JPS5488083A (en) | 1977-12-26 | 1977-12-26 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15678977A JPS5488083A (en) | 1977-12-26 | 1977-12-26 | Manufacture for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5488083A true JPS5488083A (en) | 1979-07-12 |
Family
ID=15635333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15678977A Pending JPS5488083A (en) | 1977-12-26 | 1977-12-26 | Manufacture for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5488083A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2014091603A1 (en) * | 2012-12-13 | 2017-01-05 | 富士機械製造株式会社 | Viscous fluid printing device |
-
1977
- 1977-12-26 JP JP15678977A patent/JPS5488083A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2014091603A1 (en) * | 2012-12-13 | 2017-01-05 | 富士機械製造株式会社 | Viscous fluid printing device |
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