JPS577954A - Manufacture of hybrid integrated circuit - Google Patents
Manufacture of hybrid integrated circuitInfo
- Publication number
- JPS577954A JPS577954A JP8128780A JP8128780A JPS577954A JP S577954 A JPS577954 A JP S577954A JP 8128780 A JP8128780 A JP 8128780A JP 8128780 A JP8128780 A JP 8128780A JP S577954 A JPS577954 A JP S577954A
- Authority
- JP
- Japan
- Prior art keywords
- film
- capacitor
- resistance
- etching
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
PURPOSE:To minize resist work by a method wherein a film having a selective ctching property and an anode oxidizing property to tantalum is put between a resistance film and a capacitor film, and used as an etching stopper. CONSTITUTION:The resistance film 11 of tantalum nitride and an Al film 12 are fomed on a substrate 10, the capacitor film 13 of alpha-Ta is made up on the film 12 by means of sputtering, and these films are removed by means of etching leaving a resistance section 14 and a capacitor section 15. A section functioning as an electrode 13' of the capacitor is coated with a resist 16, the capacitor film is formed primarily and an oxide film 17 is built up, and the capacitor film 13 is removed by means of dry etching. The Al film 12 serves as the etching stopper at that time. The Al film is removed by means of etching, the capacitor film 13' is formed secondarily and an oxide film 17' is made up, and the electrodes 19, 20 of the capacitor and a resistance terminal 21 are left from a NiCr-Au film 18 on the film 17'.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8128780A JPS577954A (en) | 1980-06-18 | 1980-06-18 | Manufacture of hybrid integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8128780A JPS577954A (en) | 1980-06-18 | 1980-06-18 | Manufacture of hybrid integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS577954A true JPS577954A (en) | 1982-01-16 |
Family
ID=13742154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8128780A Pending JPS577954A (en) | 1980-06-18 | 1980-06-18 | Manufacture of hybrid integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS577954A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110400741A (en) * | 2019-07-25 | 2019-11-01 | 上海航天电子通讯设备研究所 | A kind of preparation method of the passive Resistor-Capacitor Unit of LCP flexible base board |
-
1980
- 1980-06-18 JP JP8128780A patent/JPS577954A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110400741A (en) * | 2019-07-25 | 2019-11-01 | 上海航天电子通讯设备研究所 | A kind of preparation method of the passive Resistor-Capacitor Unit of LCP flexible base board |
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