JPS575344A - Detecting method for pinhole of insulating film - Google Patents
Detecting method for pinhole of insulating filmInfo
- Publication number
- JPS575344A JPS575344A JP8000680A JP8000680A JPS575344A JP S575344 A JPS575344 A JP S575344A JP 8000680 A JP8000680 A JP 8000680A JP 8000680 A JP8000680 A JP 8000680A JP S575344 A JPS575344 A JP S575344A
- Authority
- JP
- Japan
- Prior art keywords
- pinhole
- insulating film
- electrodes
- film
- etchant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To detect the pinhole of an insulating film by forming a plurality of electrodes on the film formed on a conductive substrate and dipping it in an etchant. CONSTITUTION:A pinhole detecting insulating film 22 is formed on a conductive substrate 21, and electrodes 23 are arranged at the same pitch on the film 22. When a semiconductor substrate thus formed is, for example, dipped in a weak etchant made of about 2% of hydrofluoric acid, the electrodes arranged on the insulating film in which the pinhole exists reach the pinhole since the etchant is immersed in the boundary between the electrodes 23 and the film 22, and are etched and erased in approx. 5min. The electrodes arranged on the part in which no pinhole exists are retained without being etched. Thus, the pinhole can be simply detected without application of a voltage to the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8000680A JPS575344A (en) | 1980-06-13 | 1980-06-13 | Detecting method for pinhole of insulating film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8000680A JPS575344A (en) | 1980-06-13 | 1980-06-13 | Detecting method for pinhole of insulating film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS575344A true JPS575344A (en) | 1982-01-12 |
Family
ID=13706236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8000680A Pending JPS575344A (en) | 1980-06-13 | 1980-06-13 | Detecting method for pinhole of insulating film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS575344A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015510243A (en) * | 2012-02-07 | 2015-04-02 | オヴォニック バッテリー カンパニー インコーポレイテッド | Rechargeable battery cell with improved high temperature performance |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153983A (en) * | 1974-05-31 | 1975-12-11 |
-
1980
- 1980-06-13 JP JP8000680A patent/JPS575344A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153983A (en) * | 1974-05-31 | 1975-12-11 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015510243A (en) * | 2012-02-07 | 2015-04-02 | オヴォニック バッテリー カンパニー インコーポレイテッド | Rechargeable battery cell with improved high temperature performance |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0048829A3 (en) | Method of making electrical contacts on a silicon solar cell | |
ATE1346T1 (en) | METHOD OF CONTACTING THE ADHESIVE-SIDE ELECTRODE OF AN ELECTRICAL COMPONENT. | |
JPS6450948A (en) | Ion activity measuring sensor, manufacture thereof and sensor attachment circuit therefor | |
SE7707389L (en) | PROCEED TO METAL SUBSTRATE COATING | |
DK265082A (en) | PROCEDURE FOR PROTECTION AGAINST CORROSION AND APPARATUS FOR USE IN SUCH A PROCEDURE | |
JPS575344A (en) | Detecting method for pinhole of insulating film | |
JPS56125844A (en) | Manufacture of semiconductor element | |
JPS56152247A (en) | Testing method for semiconductor device | |
JPS52131484A (en) | Semiconductor device | |
JPS5762533A (en) | Manufacture of semiconductor device | |
JPS548465A (en) | Etching method | |
JPS53135842A (en) | Ion etching process | |
JPS5496366A (en) | Semiconductor device | |
JPS5774649A (en) | Inspecting method for insulating layer | |
JPS5562737A (en) | Wiring method for semiconductor element | |
JPS649666A (en) | Manufacture of photoelectromotive device | |
JPS577954A (en) | Manufacture of hybrid integrated circuit | |
JPS6490569A (en) | Photodetector | |
JPS5335488A (en) | Production of photoconductive element | |
JPS5367351A (en) | Measuring method of resistivity and intrinsic contact resistance | |
JPS57134965A (en) | Semiconductor device | |
JPS5546567A (en) | Method of fabricating semiconductor device | |
JPS5797627A (en) | Formation of electric wiring | |
JPS5268377A (en) | Characteristics measurement for semiconductor element | |
JPS56166462A (en) | Manufacture of combustion detecting element |