JPS5286085A - Production of semiconductive device - Google Patents

Production of semiconductive device

Info

Publication number
JPS5286085A
JPS5286085A JP207076A JP207076A JPS5286085A JP S5286085 A JPS5286085 A JP S5286085A JP 207076 A JP207076 A JP 207076A JP 207076 A JP207076 A JP 207076A JP S5286085 A JPS5286085 A JP S5286085A
Authority
JP
Japan
Prior art keywords
membrane
coated
contact hole
production
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP207076A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP207076A priority Critical patent/JPS5286085A/en
Publication of JPS5286085A publication Critical patent/JPS5286085A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the safety voltage of insulating membrane on the MIS type FET by protecting the gate insualting membrane by the high melting point metallic membrane before the contact hole is opned in this way, however, formerly the metallic gate electrode is coated after the substrate contact hole is formed on the coated gate insulating membrane.
COPYRIGHT: (C)1977,JPO&Japio
JP207076A 1976-01-12 1976-01-12 Production of semiconductive device Pending JPS5286085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP207076A JPS5286085A (en) 1976-01-12 1976-01-12 Production of semiconductive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP207076A JPS5286085A (en) 1976-01-12 1976-01-12 Production of semiconductive device

Publications (1)

Publication Number Publication Date
JPS5286085A true JPS5286085A (en) 1977-07-16

Family

ID=11519074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP207076A Pending JPS5286085A (en) 1976-01-12 1976-01-12 Production of semiconductive device

Country Status (1)

Country Link
JP (1) JPS5286085A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544773A (en) * 1978-09-26 1980-03-29 Matsushita Electric Ind Co Ltd Producing method for insulative gate type semiconductor device
JPS5861669A (en) * 1981-10-09 1983-04-12 Toshiba Corp Preparation of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544773A (en) * 1978-09-26 1980-03-29 Matsushita Electric Ind Co Ltd Producing method for insulative gate type semiconductor device
JPS5861669A (en) * 1981-10-09 1983-04-12 Toshiba Corp Preparation of semiconductor device

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