JPS5777095A - Liquid phase epitaxial growing apparatus - Google Patents
Liquid phase epitaxial growing apparatusInfo
- Publication number
- JPS5777095A JPS5777095A JP15093180A JP15093180A JPS5777095A JP S5777095 A JPS5777095 A JP S5777095A JP 15093180 A JP15093180 A JP 15093180A JP 15093180 A JP15093180 A JP 15093180A JP S5777095 A JPS5777095 A JP S5777095A
- Authority
- JP
- Japan
- Prior art keywords
- recess
- remainder
- liq
- phase
- growing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To easily take out the remainder of a semiconductor material after solidification by forming a recess coated internally with quartz for holding the remainder in the support of the titled apparatus used in a sliding method.
CONSTITUTION: This liq. phase epitaxial growing apparatus is composed of a support table 11 provided with an embedded dummy substrate 3 made of CdTe and an embedded substrate 4 made of CdTe for growth and of a sliding member 12 moving on the table 11 while sliding and provided with a through hole 15 retain inging the liq, phase 6 of a semiconductor crystal material for epitaxial growth on the substrate 4. A recess 13 for holding the remainder of the liq. phase 6 is formed in the table 11, and the inside of the recess is coated with a quartz glass film 14. As a result, the remainder put in the recess 13 does not stick to the table 11 even after solidification and can be taken out easily.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15093180A JPS5777095A (en) | 1980-10-27 | 1980-10-27 | Liquid phase epitaxial growing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15093180A JPS5777095A (en) | 1980-10-27 | 1980-10-27 | Liquid phase epitaxial growing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5777095A true JPS5777095A (en) | 1982-05-14 |
Family
ID=15507532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15093180A Pending JPS5777095A (en) | 1980-10-27 | 1980-10-27 | Liquid phase epitaxial growing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5777095A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
-
1980
- 1980-10-27 JP JP15093180A patent/JPS5777095A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
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