JPS51121258A - Liquid phase growth method for semiconductor thin films - Google Patents

Liquid phase growth method for semiconductor thin films

Info

Publication number
JPS51121258A
JPS51121258A JP4704375A JP4704375A JPS51121258A JP S51121258 A JPS51121258 A JP S51121258A JP 4704375 A JP4704375 A JP 4704375A JP 4704375 A JP4704375 A JP 4704375A JP S51121258 A JPS51121258 A JP S51121258A
Authority
JP
Japan
Prior art keywords
liquid phase
thin films
semiconductor thin
growth method
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4704375A
Other languages
Japanese (ja)
Inventor
Toru Hara
Minoru Mihara
Nobuyuki Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4704375A priority Critical patent/JPS51121258A/en
Priority to US05/675,491 priority patent/US4088514A/en
Priority to DE2616700A priority patent/DE2616700C2/en
Priority to CA250,577A priority patent/CA1072220A/en
Priority to NL7604042A priority patent/NL7604042A/en
Priority to GB15878/76A priority patent/GB1514126A/en
Publication of JPS51121258A publication Critical patent/JPS51121258A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To obtain smooth crystal surface and improve reproducibility of film thickness by bringing the solute into contact with the solution to form a saturated solution and causing crystal growth after bringing the solution to supercooled condition.
COPYRIGHT: (C)1976,JPO&Japio
JP4704375A 1975-04-17 1975-04-17 Liquid phase growth method for semiconductor thin films Pending JPS51121258A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP4704375A JPS51121258A (en) 1975-04-17 1975-04-17 Liquid phase growth method for semiconductor thin films
US05/675,491 US4088514A (en) 1975-04-17 1976-04-09 Method for epitaxial growth of thin semiconductor layer from solution
DE2616700A DE2616700C2 (en) 1975-04-17 1976-04-15 Method for forming a thin layer of a semiconductor material of groups III-V by epitaxial growth, and apparatus for carrying out the method
CA250,577A CA1072220A (en) 1975-04-17 1976-04-15 Method for epitaxial growth of thin semiconductor layer from solution
NL7604042A NL7604042A (en) 1975-04-17 1976-04-15 PROCEDURE AND ARRANGEMENT FOR EPITAXIAL GROWTH, AS WELL AS PROPERTIES OBTAINED UNDER THE APPLICATION OF THIS PROCEDURE.
GB15878/76A GB1514126A (en) 1975-04-17 1976-04-20 Method for epitaxial growth of thin semiconductor layer from solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4704375A JPS51121258A (en) 1975-04-17 1975-04-17 Liquid phase growth method for semiconductor thin films

Publications (1)

Publication Number Publication Date
JPS51121258A true JPS51121258A (en) 1976-10-23

Family

ID=12764126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4704375A Pending JPS51121258A (en) 1975-04-17 1975-04-17 Liquid phase growth method for semiconductor thin films

Country Status (1)

Country Link
JP (1) JPS51121258A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932581A (en) * 1972-07-22 1974-03-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932581A (en) * 1972-07-22 1974-03-25

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