JPS5323560A - Liquid phase epitaxial growth method - Google Patents

Liquid phase epitaxial growth method

Info

Publication number
JPS5323560A
JPS5323560A JP9768976A JP9768976A JPS5323560A JP S5323560 A JPS5323560 A JP S5323560A JP 9768976 A JP9768976 A JP 9768976A JP 9768976 A JP9768976 A JP 9768976A JP S5323560 A JPS5323560 A JP S5323560A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
growth method
phase epitaxial
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9768976A
Other languages
Japanese (ja)
Other versions
JPS5527459B2 (en
Inventor
Takashi Fukui
Yoshiharu Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9768976A priority Critical patent/JPS5323560A/en
Publication of JPS5323560A publication Critical patent/JPS5323560A/en
Publication of JPS5527459B2 publication Critical patent/JPS5527459B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a homogeneous, defect-free and high-quality multilayer structure by cleaning the ground surface with the cleaning solution containing a strong reductive element Al, Mg, Be or Te which does not make direct contribution to crystal growth and having the compsotiion close to that of an epitaxial growing solution of the next layer.
COPYRIGHT: (C)1978,JPO&Japio
JP9768976A 1976-08-18 1976-08-18 Liquid phase epitaxial growth method Granted JPS5323560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9768976A JPS5323560A (en) 1976-08-18 1976-08-18 Liquid phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9768976A JPS5323560A (en) 1976-08-18 1976-08-18 Liquid phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5323560A true JPS5323560A (en) 1978-03-04
JPS5527459B2 JPS5527459B2 (en) 1980-07-21

Family

ID=14198916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9768976A Granted JPS5323560A (en) 1976-08-18 1976-08-18 Liquid phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5323560A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590499A (en) * 1978-12-25 1980-07-09 Nec Corp Liquid phase epitaxial growing
JPS63288619A (en) * 1987-05-18 1988-11-25 Mitsubishi Electric Corp Electric discharge machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190267A (en) * 1975-02-04 1976-08-07 Handotaihakumakuno seisakuhoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190267A (en) * 1975-02-04 1976-08-07 Handotaihakumakuno seisakuhoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590499A (en) * 1978-12-25 1980-07-09 Nec Corp Liquid phase epitaxial growing
JPS6236998B2 (en) * 1978-12-25 1987-08-10 Nippon Electric Co
JPS63288619A (en) * 1987-05-18 1988-11-25 Mitsubishi Electric Corp Electric discharge machine

Also Published As

Publication number Publication date
JPS5527459B2 (en) 1980-07-21

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