JPS5772323A - Thin plate flattening equipment - Google Patents
Thin plate flattening equipmentInfo
- Publication number
- JPS5772323A JPS5772323A JP55147539A JP14753980A JPS5772323A JP S5772323 A JPS5772323 A JP S5772323A JP 55147539 A JP55147539 A JP 55147539A JP 14753980 A JP14753980 A JP 14753980A JP S5772323 A JPS5772323 A JP S5772323A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thin plate
- flattened
- calculated
- uneveness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To improve an accuracy of flattening without lowering a through put by a method wherein uneveness and its magnitude of the surface of a thin plate are calculated and the thin plate is changed in the thickness direction according to the calculated value and is flattened. CONSTITUTION:A wafer 4 is drawn out from a cartridge 17 by a transfer means 18 and is transferred onto an absorbing means 20. Then the flatness of the wafer 4 is measured by a flatness measuring means and the uneveness and its magnitude of the surface of the wafer 4 are calculated according to those measured data. This calculated value is transmitted to a control means 23 and the control means 23 controls a wafer deforming means 21, so that the wafer 4 is slightly displaced in the thickness direction and its surface is flattened. When the wafer 4 is flattened a carriage 19 is moved and a pattern of a mask 1 is imaged and printed on the wafer 4 by an optical exposure system 24.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55147539A JPS5772323A (en) | 1980-10-23 | 1980-10-23 | Thin plate flattening equipment |
DE3110341A DE3110341C2 (en) | 1980-03-19 | 1981-03-17 | Method and apparatus for aligning a thin substrate in the image plane of a copier |
US06/245,193 US4391511A (en) | 1980-03-19 | 1981-03-18 | Light exposure device and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55147539A JPS5772323A (en) | 1980-10-23 | 1980-10-23 | Thin plate flattening equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5772323A true JPS5772323A (en) | 1982-05-06 |
Family
ID=15432597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55147539A Pending JPS5772323A (en) | 1980-03-19 | 1980-10-23 | Thin plate flattening equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5772323A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012015508A (en) * | 2010-06-30 | 2012-01-19 | Asml Holding Nv | Reticle clamping system |
US9956869B2 (en) | 2010-07-26 | 2018-05-01 | Kautex Textron Gmbh & Co. Kg | Fuel tank made of thermoplastic material |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888871A (en) * | 1972-02-02 | 1973-11-21 | ||
JPS4922868A (en) * | 1972-06-20 | 1974-02-28 | ||
JPS5314425A (en) * | 1976-07-27 | 1978-02-09 | Sharp Corp | Liquid fuel combustion device |
JPS54146580A (en) * | 1978-05-09 | 1979-11-15 | Nippon Telegr & Teleph Corp <Ntt> | Thin plate flattening correction mechanism |
-
1980
- 1980-10-23 JP JP55147539A patent/JPS5772323A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888871A (en) * | 1972-02-02 | 1973-11-21 | ||
JPS4922868A (en) * | 1972-06-20 | 1974-02-28 | ||
JPS5314425A (en) * | 1976-07-27 | 1978-02-09 | Sharp Corp | Liquid fuel combustion device |
JPS54146580A (en) * | 1978-05-09 | 1979-11-15 | Nippon Telegr & Teleph Corp <Ntt> | Thin plate flattening correction mechanism |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012015508A (en) * | 2010-06-30 | 2012-01-19 | Asml Holding Nv | Reticle clamping system |
US9274439B2 (en) | 2010-06-30 | 2016-03-01 | Asml Holding N.V. | Reticle clamping system |
US9956869B2 (en) | 2010-07-26 | 2018-05-01 | Kautex Textron Gmbh & Co. Kg | Fuel tank made of thermoplastic material |
US11130400B2 (en) | 2010-07-26 | 2021-09-28 | Kautex Textron Gmbh & Co. Kg | Fuel tank made of thermoplastic material |
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