JPS5759361A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5759361A JPS5759361A JP13441780A JP13441780A JPS5759361A JP S5759361 A JPS5759361 A JP S5759361A JP 13441780 A JP13441780 A JP 13441780A JP 13441780 A JP13441780 A JP 13441780A JP S5759361 A JPS5759361 A JP S5759361A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- buried layer
- silicon
- semiconductor device
- resistance value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE:To increase the operation speed of the semiconductor device by using a buried layer having small resistance value. CONSTITUTION:The surface of a P<-> type silicon substrate 5 is coated with Pt through a thin-film forming method, such as sputtering, evaporation, etc., the whole is thermally treated and one part is combined with silicon and a platinum silicide layer 1 or a mixture layer 8 of Pt and silicon is shaped, and an N<-> type epitaxial layer 9 is formed to the surface. Consequently, the layer 8 is left as the buried layer 10. P<+> isolation regions 11 are shaped, and a transistor such as an NPN transistor is formed. The resistance value of the buried layer 10 is 1OMEGA or lower at every unit area, and is approximately 1/10 of a buried layer by Sb or As.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13441780A JPS5759361A (en) | 1980-09-29 | 1980-09-29 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13441780A JPS5759361A (en) | 1980-09-29 | 1980-09-29 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5759361A true JPS5759361A (en) | 1982-04-09 |
Family
ID=15127892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13441780A Pending JPS5759361A (en) | 1980-09-29 | 1980-09-29 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5759361A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60222360A (en) * | 1984-04-20 | 1985-11-06 | 株式会社京三製作所 | Auxiliary stepping device |
JPS60170259U (en) * | 1984-04-20 | 1985-11-12 | 株式会社京三製作所 | Auxiliary step device |
JPS60170258U (en) * | 1984-04-20 | 1985-11-12 | 株式会社京三製作所 | Auxiliary step device |
-
1980
- 1980-09-29 JP JP13441780A patent/JPS5759361A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60222360A (en) * | 1984-04-20 | 1985-11-06 | 株式会社京三製作所 | Auxiliary stepping device |
JPS60170259U (en) * | 1984-04-20 | 1985-11-12 | 株式会社京三製作所 | Auxiliary step device |
JPS60170258U (en) * | 1984-04-20 | 1985-11-12 | 株式会社京三製作所 | Auxiliary step device |
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