JPS5730253A - Secondary electron detector for scan type electron microscope - Google Patents
Secondary electron detector for scan type electron microscopeInfo
- Publication number
- JPS5730253A JPS5730253A JP10551680A JP10551680A JPS5730253A JP S5730253 A JPS5730253 A JP S5730253A JP 10551680 A JP10551680 A JP 10551680A JP 10551680 A JP10551680 A JP 10551680A JP S5730253 A JPS5730253 A JP S5730253A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- acceleration
- pipe
- electron beam
- circumference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
- C07D319/10—1,4-Dioxanes; Hydrogenated 1,4-dioxanes
- C07D319/14—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems
- C07D319/16—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems condensed with one six-membered ring
- C07D319/18—Ethylenedioxybenzenes, not substituted on the hetero ring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/50—Detectors
- G01N2223/505—Detectors scintillation
- G01N2223/5055—Detectors scintillation scintillation crystal coupled to PMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU48510/79A AU521225B2 (en) | 1977-04-19 | 1979-06-28 | Alkylenedioxy phenyl derivatives |
JP10551680A JPS5730253A (en) | 1979-06-28 | 1980-07-31 | Secondary electron detector for scan type electron microscope |
DE3126575A DE3126575C2 (de) | 1979-06-28 | 1981-07-06 | Vorrichtung zur Erfassung der Sekundärelektronen in einem Rasterelektronenmikroskop |
KR1019810002642A KR850001390B1 (ko) | 1980-07-31 | 1981-07-21 | 2차 전자 검출장치 |
GB8122416A GB2081501B (en) | 1979-06-28 | 1981-07-21 | Device for detecting secondary electrons in a scanning electron microscope |
US06/286,056 US4442355A (en) | 1980-07-31 | 1981-07-22 | Device for detecting secondary electrons in a scanning electron microscope |
FR8114891A FR2488044A1 (fr) | 1979-06-28 | 1981-07-30 | Dispositif pour detecter des electrons secondaires dans un microscope electronique a balayage |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU48510/79A AU521225B2 (en) | 1977-04-19 | 1979-06-28 | Alkylenedioxy phenyl derivatives |
JP10551680A JPS5730253A (en) | 1979-06-28 | 1980-07-31 | Secondary electron detector for scan type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5730253A true JPS5730253A (en) | 1982-02-18 |
Family
ID=25628249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10551680A Pending JPS5730253A (en) | 1977-04-19 | 1980-07-31 | Secondary electron detector for scan type electron microscope |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5730253A (de) |
AU (1) | AU521225B2 (de) |
DE (1) | DE3126575C2 (de) |
FR (1) | FR2488044A1 (de) |
GB (1) | GB2081501B (de) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58148867U (ja) * | 1982-03-30 | 1983-10-06 | 株式会社島津製作所 | 2次電子検出装置 |
JPS60154416A (ja) * | 1984-01-23 | 1985-08-14 | 昭和電線電纜株式会社 | 高発泡ポリエチレン絶縁電線の製造方法 |
WO1985004757A1 (en) * | 1984-04-06 | 1985-10-24 | Hitachi, Ltd. | Secondary electron detector |
JPS6237112U (de) * | 1985-08-23 | 1987-03-05 | ||
JPH02291609A (ja) * | 1989-05-01 | 1990-12-03 | Sumitomo Electric Ind Ltd | 絶縁電線とその製造方法並びに同軸の絶縁電線 |
JPH03146532A (ja) * | 1989-11-02 | 1991-06-21 | Ube Ind Ltd | 電線被覆用の発泡性ポリオレフィン樹脂組成物 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58161235A (ja) * | 1982-03-19 | 1983-09-24 | Internatl Precision Inc | 走査型電子線装置 |
GB8327737D0 (en) * | 1983-10-17 | 1983-11-16 | Texas Instruments Ltd | Electron detector |
DE3766092D1 (de) * | 1986-12-12 | 1990-12-13 | Integrated Circuit Testing | Detektoranordnung mit einem detektorobjektiv fuer korpuskularstrahlgeraete. |
JP3081393B2 (ja) * | 1992-10-15 | 2000-08-28 | 株式会社日立製作所 | 走査電子顕微鏡 |
DE19729526C2 (de) * | 1997-07-10 | 1999-07-22 | Frank Siegelin | Beheizbarer Probentisch zur in-situ Abbildung in Rasterelektronenmikroskopen bei hihen Temperaturen |
HUP0103896A3 (en) | 1998-09-03 | 2003-01-28 | Kyowa Hakko Kogyo Kk | Oxygenic heterocyclic compounds pharmaceutical compositions containing them and their use |
GB2367686B (en) * | 2000-08-10 | 2002-12-11 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
GB2442027B (en) * | 2006-09-23 | 2009-08-26 | Zeiss Carl Smt Ltd | Charged particle beam instrument and method of detecting charged particles |
CN115662866B (zh) * | 2022-11-29 | 2023-03-14 | 北京中科科仪股份有限公司 | 一种二次电子探测装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1128107A (en) * | 1965-06-23 | 1968-09-25 | Hitachi Ltd | Scanning electron microscope |
GB1304344A (de) * | 1969-02-01 | 1973-01-24 | ||
JPS4936496B1 (de) * | 1970-04-18 | 1974-10-01 |
-
1979
- 1979-06-28 AU AU48510/79A patent/AU521225B2/en not_active Expired
-
1980
- 1980-07-31 JP JP10551680A patent/JPS5730253A/ja active Pending
-
1981
- 1981-07-06 DE DE3126575A patent/DE3126575C2/de not_active Expired
- 1981-07-21 GB GB8122416A patent/GB2081501B/en not_active Expired
- 1981-07-30 FR FR8114891A patent/FR2488044A1/fr active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58148867U (ja) * | 1982-03-30 | 1983-10-06 | 株式会社島津製作所 | 2次電子検出装置 |
JPS60154416A (ja) * | 1984-01-23 | 1985-08-14 | 昭和電線電纜株式会社 | 高発泡ポリエチレン絶縁電線の製造方法 |
JPH0578124B2 (de) * | 1984-01-23 | 1993-10-28 | Showa Electric Wire & Cable Co | |
WO1985004757A1 (en) * | 1984-04-06 | 1985-10-24 | Hitachi, Ltd. | Secondary electron detector |
JPS6237112U (de) * | 1985-08-23 | 1987-03-05 | ||
JPH0452888Y2 (de) * | 1985-08-23 | 1992-12-11 | ||
JPH02291609A (ja) * | 1989-05-01 | 1990-12-03 | Sumitomo Electric Ind Ltd | 絶縁電線とその製造方法並びに同軸の絶縁電線 |
JPH03146532A (ja) * | 1989-11-02 | 1991-06-21 | Ube Ind Ltd | 電線被覆用の発泡性ポリオレフィン樹脂組成物 |
Also Published As
Publication number | Publication date |
---|---|
AU4851079A (en) | 1979-10-25 |
AU521225B2 (en) | 1982-03-25 |
FR2488044A1 (fr) | 1982-02-05 |
DE3126575C2 (de) | 1984-07-26 |
FR2488044B1 (de) | 1985-01-04 |
DE3126575A1 (de) | 1982-04-22 |
GB2081501B (en) | 1984-05-31 |
GB2081501A (en) | 1982-02-17 |
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