GB2081501B - Device for detecting secondary electrons in a scanning electron microscope - Google Patents

Device for detecting secondary electrons in a scanning electron microscope

Info

Publication number
GB2081501B
GB2081501B GB8122416A GB8122416A GB2081501B GB 2081501 B GB2081501 B GB 2081501B GB 8122416 A GB8122416 A GB 8122416A GB 8122416 A GB8122416 A GB 8122416A GB 2081501 B GB2081501 B GB 2081501B
Authority
GB
United Kingdom
Prior art keywords
electron microscope
scanning electron
secondary electrons
detecting secondary
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8122416A
Other versions
GB2081501A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB2081501A publication Critical patent/GB2081501A/en
Application granted granted Critical
Publication of GB2081501B publication Critical patent/GB2081501B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D319/10—1,4-Dioxanes; Hydrogenated 1,4-dioxanes
    • C07D319/14—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems
    • C07D319/16—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems condensed with one six-membered ring
    • C07D319/18—Ethylenedioxybenzenes, not substituted on the hetero ring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/418—Imaging electron microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/505—Detectors scintillation
    • G01N2223/5055—Detectors scintillation scintillation crystal coupled to PMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
GB8122416A 1979-06-28 1981-07-21 Device for detecting secondary electrons in a scanning electron microscope Expired GB2081501B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU48510/79A AU521225B2 (en) 1977-04-19 1979-06-28 Alkylenedioxy phenyl derivatives
JP10551680A JPS5730253A (en) 1979-06-28 1980-07-31 Secondary electron detector for scan type electron microscope

Publications (2)

Publication Number Publication Date
GB2081501A GB2081501A (en) 1982-02-17
GB2081501B true GB2081501B (en) 1984-05-31

Family

ID=25628249

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8122416A Expired GB2081501B (en) 1979-06-28 1981-07-21 Device for detecting secondary electrons in a scanning electron microscope

Country Status (5)

Country Link
JP (1) JPS5730253A (en)
AU (1) AU521225B2 (en)
DE (1) DE3126575C2 (en)
FR (1) FR2488044A1 (en)
GB (1) GB2081501B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161235A (en) * 1982-03-19 1983-09-24 Internatl Precision Inc Scanning type electron beam device
JPS58148867U (en) * 1982-03-30 1983-10-06 株式会社島津製作所 Secondary electron detection device
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPS60154416A (en) * 1984-01-23 1985-08-14 昭和電線電纜株式会社 Method of producing high foamable polyethylene insulated wire
JPS60212953A (en) * 1984-04-06 1985-10-25 Hitachi Ltd Secondary electron detector for electron ray device
JPH0452888Y2 (en) * 1985-08-23 1992-12-11
DE3766092D1 (en) * 1986-12-12 1990-12-13 Integrated Circuit Testing DETECTOR ARRANGEMENT WITH A DETECTOR LENS FOR BODY RADIATORS.
JP2620370B2 (en) * 1989-05-01 1997-06-11 住友電気工業株式会社 Insulated wire, its manufacturing method and coaxial insulated wire
JPH0755990B2 (en) * 1989-11-02 1995-06-14 宇部興産株式会社 Expandable polyolefin resin composition for coating electric wires
JP3081393B2 (en) * 1992-10-15 2000-08-28 株式会社日立製作所 Scanning electron microscope
DE19729526C2 (en) * 1997-07-10 1999-07-22 Frank Siegelin Heated sample table for in-situ imaging in scanning electron microscopes at high temperatures
MXPA01002102A (en) 1998-09-03 2003-02-24 Kyowa Hakko Kogyo Kk Oxygenic heterocyclic compounds.
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
GB2442027B (en) * 2006-09-23 2009-08-26 Zeiss Carl Smt Ltd Charged particle beam instrument and method of detecting charged particles
CN115662866B (en) * 2022-11-29 2023-03-14 北京中科科仪股份有限公司 Secondary electron detection device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
GB1304344A (en) * 1969-02-01 1973-01-24
JPS4936496B1 (en) * 1970-04-18 1974-10-01

Also Published As

Publication number Publication date
DE3126575C2 (en) 1984-07-26
JPS5730253A (en) 1982-02-18
AU521225B2 (en) 1982-03-25
FR2488044B1 (en) 1985-01-04
FR2488044A1 (en) 1982-02-05
GB2081501A (en) 1982-02-17
AU4851079A (en) 1979-10-25
DE3126575A1 (en) 1982-04-22

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee