JPS55155456A - Heater for scan electron microscope - Google Patents
Heater for scan electron microscopeInfo
- Publication number
- JPS55155456A JPS55155456A JP6141179A JP6141179A JPS55155456A JP S55155456 A JPS55155456 A JP S55155456A JP 6141179 A JP6141179 A JP 6141179A JP 6141179 A JP6141179 A JP 6141179A JP S55155456 A JPS55155456 A JP S55155456A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- electron microscope
- scan electron
- scan
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6141179A JPS55155456A (en) | 1979-05-18 | 1979-05-18 | Heater for scan electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6141179A JPS55155456A (en) | 1979-05-18 | 1979-05-18 | Heater for scan electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55155456A true JPS55155456A (en) | 1980-12-03 |
Family
ID=13170345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6141179A Pending JPS55155456A (en) | 1979-05-18 | 1979-05-18 | Heater for scan electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55155456A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6319728A (en) * | 1986-07-14 | 1988-01-27 | Denki Kagaku Kogyo Kk | Hot cathode |
JPS6358747A (en) * | 1986-08-29 | 1988-03-14 | Agency Of Ind Science & Technol | Electron microscope |
JPH03273134A (en) * | 1990-03-23 | 1991-12-04 | Shimadzu Corp | Material testing machine with scanning electron microscope |
-
1979
- 1979-05-18 JP JP6141179A patent/JPS55155456A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6319728A (en) * | 1986-07-14 | 1988-01-27 | Denki Kagaku Kogyo Kk | Hot cathode |
JPH0456415B2 (en) * | 1986-07-14 | 1992-09-08 | Denki Kagaku Kogyo Kk | |
JPS6358747A (en) * | 1986-08-29 | 1988-03-14 | Agency Of Ind Science & Technol | Electron microscope |
JPH03273134A (en) * | 1990-03-23 | 1991-12-04 | Shimadzu Corp | Material testing machine with scanning electron microscope |
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