JPS55155456A - Heater for scan electron microscope - Google Patents

Heater for scan electron microscope

Info

Publication number
JPS55155456A
JPS55155456A JP6141179A JP6141179A JPS55155456A JP S55155456 A JPS55155456 A JP S55155456A JP 6141179 A JP6141179 A JP 6141179A JP 6141179 A JP6141179 A JP 6141179A JP S55155456 A JPS55155456 A JP S55155456A
Authority
JP
Japan
Prior art keywords
heater
electron microscope
scan electron
scan
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6141179A
Other languages
Japanese (ja)
Inventor
Kazuo Kuwabara
Akito Nitsuta
Masayoshi Tanaka
Sadayuki Hakamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSUTORON JAPAN CO Ltd
Original Assignee
INSUTORON JAPAN CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSUTORON JAPAN CO Ltd filed Critical INSUTORON JAPAN CO Ltd
Priority to JP6141179A priority Critical patent/JPS55155456A/en
Publication of JPS55155456A publication Critical patent/JPS55155456A/en
Pending legal-status Critical Current

Links

JP6141179A 1979-05-18 1979-05-18 Heater for scan electron microscope Pending JPS55155456A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6141179A JPS55155456A (en) 1979-05-18 1979-05-18 Heater for scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6141179A JPS55155456A (en) 1979-05-18 1979-05-18 Heater for scan electron microscope

Publications (1)

Publication Number Publication Date
JPS55155456A true JPS55155456A (en) 1980-12-03

Family

ID=13170345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6141179A Pending JPS55155456A (en) 1979-05-18 1979-05-18 Heater for scan electron microscope

Country Status (1)

Country Link
JP (1) JPS55155456A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319728A (en) * 1986-07-14 1988-01-27 Denki Kagaku Kogyo Kk Hot cathode
JPS6358747A (en) * 1986-08-29 1988-03-14 Agency Of Ind Science & Technol Electron microscope
JPH03273134A (en) * 1990-03-23 1991-12-04 Shimadzu Corp Material testing machine with scanning electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319728A (en) * 1986-07-14 1988-01-27 Denki Kagaku Kogyo Kk Hot cathode
JPH0456415B2 (en) * 1986-07-14 1992-09-08 Denki Kagaku Kogyo Kk
JPS6358747A (en) * 1986-08-29 1988-03-14 Agency Of Ind Science & Technol Electron microscope
JPH03273134A (en) * 1990-03-23 1991-12-04 Shimadzu Corp Material testing machine with scanning electron microscope

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