JPS5727047A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5727047A JPS5727047A JP10196580A JP10196580A JPS5727047A JP S5727047 A JPS5727047 A JP S5727047A JP 10196580 A JP10196580 A JP 10196580A JP 10196580 A JP10196580 A JP 10196580A JP S5727047 A JPS5727047 A JP S5727047A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor substrate
- layers
- stage difference
- discontinued
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 230000007717 exclusion Effects 0.000 abstract 2
- 230000007257 malfunction Effects 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Liquid Crystal (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10196580A JPS5727047A (en) | 1980-07-25 | 1980-07-25 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10196580A JPS5727047A (en) | 1980-07-25 | 1980-07-25 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5727047A true JPS5727047A (en) | 1982-02-13 |
| JPS641053B2 JPS641053B2 (cs) | 1989-01-10 |
Family
ID=14314574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10196580A Granted JPS5727047A (en) | 1980-07-25 | 1980-07-25 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5727047A (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1983003923A1 (en) * | 1982-04-23 | 1983-11-10 | Western Electric Company, Inc. | Semiconductor integrated circuit structures having insulated conductors |
| JPS6445160U (cs) * | 1987-09-05 | 1989-03-17 | ||
| JPH0187545U (cs) * | 1987-12-01 | 1989-06-09 | ||
| US4985373A (en) * | 1982-04-23 | 1991-01-15 | At&T Bell Laboratories | Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048877A (cs) * | 1973-09-03 | 1975-05-01 | ||
| JPS5287359A (en) * | 1976-01-14 | 1977-07-21 | Toshiba Corp | Production of semiconductor device |
| JPS5538075A (en) * | 1978-09-12 | 1980-03-17 | Fujitsu Ltd | Wiring |
-
1980
- 1980-07-25 JP JP10196580A patent/JPS5727047A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048877A (cs) * | 1973-09-03 | 1975-05-01 | ||
| JPS5287359A (en) * | 1976-01-14 | 1977-07-21 | Toshiba Corp | Production of semiconductor device |
| JPS5538075A (en) * | 1978-09-12 | 1980-03-17 | Fujitsu Ltd | Wiring |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1983003923A1 (en) * | 1982-04-23 | 1983-11-10 | Western Electric Company, Inc. | Semiconductor integrated circuit structures having insulated conductors |
| US4985373A (en) * | 1982-04-23 | 1991-01-15 | At&T Bell Laboratories | Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures |
| JPS6445160U (cs) * | 1987-09-05 | 1989-03-17 | ||
| JPH0187545U (cs) * | 1987-12-01 | 1989-06-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS641053B2 (cs) | 1989-01-10 |
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