JPS57207375A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57207375A JPS57207375A JP9183281A JP9183281A JPS57207375A JP S57207375 A JPS57207375 A JP S57207375A JP 9183281 A JP9183281 A JP 9183281A JP 9183281 A JP9183281 A JP 9183281A JP S57207375 A JPS57207375 A JP S57207375A
- Authority
- JP
- Japan
- Prior art keywords
- film
- polycrystal
- patterned
- films
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910021332 silicide Inorganic materials 0.000 abstract 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H01L29/78—
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9183281A JPS57207375A (en) | 1981-06-15 | 1981-06-15 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9183281A JPS57207375A (en) | 1981-06-15 | 1981-06-15 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57207375A true JPS57207375A (en) | 1982-12-20 |
Family
ID=14037566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9183281A Pending JPS57207375A (en) | 1981-06-15 | 1981-06-15 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57207375A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4653173A (en) * | 1985-03-04 | 1987-03-31 | Signetics Corporation | Method of manufacturing an insulated gate field effect device |
-
1981
- 1981-06-15 JP JP9183281A patent/JPS57207375A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4653173A (en) * | 1985-03-04 | 1987-03-31 | Signetics Corporation | Method of manufacturing an insulated gate field effect device |
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