JPS57190332A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57190332A
JPS57190332A JP7547481A JP7547481A JPS57190332A JP S57190332 A JPS57190332 A JP S57190332A JP 7547481 A JP7547481 A JP 7547481A JP 7547481 A JP7547481 A JP 7547481A JP S57190332 A JPS57190332 A JP S57190332A
Authority
JP
Japan
Prior art keywords
film
polycrystal
trapezoid
etched
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7547481A
Other languages
English (en)
Inventor
Wakao Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP7547481A priority Critical patent/JPS57190332A/ja
Publication of JPS57190332A publication Critical patent/JPS57190332A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7547481A 1981-05-19 1981-05-19 Manufacture of semiconductor device Pending JPS57190332A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7547481A JPS57190332A (en) 1981-05-19 1981-05-19 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7547481A JPS57190332A (en) 1981-05-19 1981-05-19 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS57190332A true JPS57190332A (en) 1982-11-22

Family

ID=13577329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7547481A Pending JPS57190332A (en) 1981-05-19 1981-05-19 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57190332A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211773A (en) * 1975-07-17 1977-01-28 Toshiba Corp Method of manufacturing semiconductor device
JPS5240978A (en) * 1975-09-27 1977-03-30 Fujitsu Ltd Process for production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211773A (en) * 1975-07-17 1977-01-28 Toshiba Corp Method of manufacturing semiconductor device
JPS5240978A (en) * 1975-09-27 1977-03-30 Fujitsu Ltd Process for production of semiconductor device

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