JPS559448A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS559448A JPS559448A JP8240778A JP8240778A JPS559448A JP S559448 A JPS559448 A JP S559448A JP 8240778 A JP8240778 A JP 8240778A JP 8240778 A JP8240778 A JP 8240778A JP S559448 A JPS559448 A JP S559448A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- poly
- etched
- diffusion layer
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To micro-work in designed dimensions by mixing selectively impurities which accelerate or decelerate etching speeds in poly-Si.
CONSTITUTION: A poly-Si layer 12 is grown on the SiO2 film 11 of a Si substrate 10 and is B-diffused to make the layer resistance about 100 Ω/mm2. Next, a P- diffusion layer 12' is made using a Si3N4 mask 13 to make the layer resistance about 10 Ω/mm2. If the substrate is etched with glacial acetic acidic etching solution, the P-diffusion layer 12' is etched fast and the B-diffusion layer 12 is etched slowly, a high accuracy poly-Si pattern 12" is obtained and desired structure is obtained when the mask 13 is removed.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8240778A JPS559448A (en) | 1978-07-05 | 1978-07-05 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8240778A JPS559448A (en) | 1978-07-05 | 1978-07-05 | Method of manufacturing semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS559448A true JPS559448A (en) | 1980-01-23 |
Family
ID=13773731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8240778A Pending JPS559448A (en) | 1978-07-05 | 1978-07-05 | Method of manufacturing semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS559448A (en) |
-
1978
- 1978-07-05 JP JP8240778A patent/JPS559448A/en active Pending
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