JPS57166077A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS57166077A
JPS57166077A JP56052727A JP5272781A JPS57166077A JP S57166077 A JPS57166077 A JP S57166077A JP 56052727 A JP56052727 A JP 56052727A JP 5272781 A JP5272781 A JP 5272781A JP S57166077 A JPS57166077 A JP S57166077A
Authority
JP
Japan
Prior art keywords
electrode
film
substrate
maximized
minimized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56052727A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556026B2 (enExample
Inventor
Masanori Fukumoto
Koichi Kugimiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56052727A priority Critical patent/JPS57166077A/ja
Publication of JPS57166077A publication Critical patent/JPS57166077A/ja
Publication of JPH0556026B2 publication Critical patent/JPH0556026B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP56052727A 1981-04-07 1981-04-07 Semiconductor device and manufacture thereof Granted JPS57166077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56052727A JPS57166077A (en) 1981-04-07 1981-04-07 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56052727A JPS57166077A (en) 1981-04-07 1981-04-07 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57166077A true JPS57166077A (en) 1982-10-13
JPH0556026B2 JPH0556026B2 (enExample) 1993-08-18

Family

ID=12922948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56052727A Granted JPS57166077A (en) 1981-04-07 1981-04-07 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57166077A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5832466A (ja) * 1981-08-20 1983-02-25 Sanyo Electric Co Ltd Ｍｏｓｆｅｔの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591871A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5591873A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5748268A (en) * 1980-09-05 1982-03-19 Hitachi Ltd Manufacture of mos semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591871A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5591873A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device
JPS5748268A (en) * 1980-09-05 1982-03-19 Hitachi Ltd Manufacture of mos semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5832466A (ja) * 1981-08-20 1983-02-25 Sanyo Electric Co Ltd Ｍｏｓｆｅｔの製造方法

Also Published As

Publication number Publication date
JPH0556026B2 (enExample) 1993-08-18

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