JPS57156318A - Production of trichlorosilane - Google Patents

Production of trichlorosilane

Info

Publication number
JPS57156318A
JPS57156318A JP3749181A JP3749181A JPS57156318A JP S57156318 A JPS57156318 A JP S57156318A JP 3749181 A JP3749181 A JP 3749181A JP 3749181 A JP3749181 A JP 3749181A JP S57156318 A JPS57156318 A JP S57156318A
Authority
JP
Japan
Prior art keywords
gas
sihcl
hcl
mixture
sicl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3749181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222004B2 (enrdf_load_stackoverflow
Inventor
Hideo Ito
Mitsutoshi Ubukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUJIYUNDO SILICON KK
Original Assignee
KOUJIYUNDO SILICON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUJIYUNDO SILICON KK filed Critical KOUJIYUNDO SILICON KK
Priority to JP3749181A priority Critical patent/JPS57156318A/ja
Publication of JPS57156318A publication Critical patent/JPS57156318A/ja
Publication of JPH0222004B2 publication Critical patent/JPH0222004B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP3749181A 1981-03-16 1981-03-16 Production of trichlorosilane Granted JPS57156318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3749181A JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3749181A JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Publications (2)

Publication Number Publication Date
JPS57156318A true JPS57156318A (en) 1982-09-27
JPH0222004B2 JPH0222004B2 (enrdf_load_stackoverflow) 1990-05-17

Family

ID=12498986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3749181A Granted JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Country Status (1)

Country Link
JP (1) JPS57156318A (enrdf_load_stackoverflow)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
US4836997A (en) * 1982-07-26 1989-06-06 Rhone-Poulenc Specialites Chimiques Plasma production of trichorosilane, SiHCl3
US4980143A (en) * 1988-08-20 1990-12-25 Huels Aktiengesellschaft Process for increasing the percentage of silicon tetrachloride
US6932954B2 (en) 2001-10-19 2005-08-23 Tokuyama Corporation Method for producing silicon
WO2008053750A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
WO2008053760A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
WO2008053786A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
WO2008053759A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
WO2008056550A1 (fr) * 2006-11-07 2008-05-15 Mitsubishi Materials Corporation Procédé de fabrication de trichlorosilane et appareil de production de trichlorosilane
WO2008146741A1 (ja) * 2007-05-25 2008-12-04 Mitsubishi Materials Corporation トリクロロシランの製造方法と製造装置および多結晶シリコンの製造方法
WO2010050241A1 (ja) * 2008-10-30 2010-05-06 三菱マテリアル株式会社 トリクロロシランの製造方法および利用方法
JP2010105865A (ja) * 2008-10-30 2010-05-13 Mitsubishi Materials Corp トリクロロシランの製造方法および利用方法
JP2013500928A (ja) * 2009-08-04 2013-01-10 シュミット シリコン テクノロジー ゲゼルシャフト ミット ベシュレンクテル ハフツング トリクロロシランを製造するための設備および方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118017A (en) * 1981-01-16 1982-07-22 Koujiyundo Silicon Kk Manufacture of trichlorosilane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118017A (en) * 1981-01-16 1982-07-22 Koujiyundo Silicon Kk Manufacture of trichlorosilane

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4836997A (en) * 1982-07-26 1989-06-06 Rhone-Poulenc Specialites Chimiques Plasma production of trichorosilane, SiHCl3
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
US4980143A (en) * 1988-08-20 1990-12-25 Huels Aktiengesellschaft Process for increasing the percentage of silicon tetrachloride
CN100436315C (zh) * 2001-10-19 2008-11-26 株式会社德山 硅的制造方法
US6932954B2 (en) 2001-10-19 2005-08-23 Tokuyama Corporation Method for producing silicon
US7964155B2 (en) 2006-10-31 2011-06-21 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane
EP2000434A4 (en) * 2006-10-31 2011-02-16 Mitsubishi Materials Corp DEVICE FOR PREPARING TRICHLOROSILANES
WO2008053759A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
US9493359B2 (en) 2006-10-31 2016-11-15 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane
JP2008133170A (ja) * 2006-10-31 2008-06-12 Mitsubishi Materials Corp トリクロロシラン製造装置
US9416014B2 (en) 2006-10-31 2016-08-16 Mitsubishi Materials Corporation Method for producing trichlorosilane
WO2008053760A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
US7998428B2 (en) 2006-10-31 2011-08-16 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane
WO2008053750A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
WO2008053786A1 (fr) * 2006-10-31 2008-05-08 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
EP2085359A4 (en) * 2006-11-07 2011-02-23 Mitsubishi Materials Corp PROCESS FOR THE PREPARATION OF TRICHLOROSILANE AND DEVICE FOR THE PRODUCTION OF TRICHLORSILANE
KR101388323B1 (ko) * 2006-11-07 2014-04-22 미쓰비시 마테리알 가부시키가이샤 트리클로로실란의 제조 방법 및 트리클로로실란 제조 장치
JP2008137885A (ja) * 2006-11-07 2008-06-19 Mitsubishi Materials Corp トリクロロシランの製造方法およびトリクロロシラン製造装置
WO2008056550A1 (fr) * 2006-11-07 2008-05-15 Mitsubishi Materials Corporation Procédé de fabrication de trichlorosilane et appareil de production de trichlorosilane
JP2009007240A (ja) * 2007-05-25 2009-01-15 Mitsubishi Materials Corp トリクロロシランの製造方法と製造装置および多結晶シリコンの製造方法
WO2008146741A1 (ja) * 2007-05-25 2008-12-04 Mitsubishi Materials Corporation トリクロロシランの製造方法と製造装置および多結晶シリコンの製造方法
EP2154110A4 (en) * 2007-05-25 2015-07-15 Mitsubishi Materials Corp METHOD AND DEVICE FOR PREPARING TRICHLORSILANE AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
US9994455B2 (en) 2007-05-25 2018-06-12 Mitsubishi Materials Corporation Apparatus and method for manufacturing trichlorosilane and method for manufacturing polycrystalline silicon
JP2010105865A (ja) * 2008-10-30 2010-05-13 Mitsubishi Materials Corp トリクロロシランの製造方法および利用方法
WO2010050241A1 (ja) * 2008-10-30 2010-05-06 三菱マテリアル株式会社 トリクロロシランの製造方法および利用方法
US8168152B2 (en) 2008-10-30 2012-05-01 Mitsubishi Materials Corporation Method for producing trichlorosilane and method for utilizing trichlorosilane
JP2013500928A (ja) * 2009-08-04 2013-01-10 シュミット シリコン テクノロジー ゲゼルシャフト ミット ベシュレンクテル ハフツング トリクロロシランを製造するための設備および方法

Also Published As

Publication number Publication date
JPH0222004B2 (enrdf_load_stackoverflow) 1990-05-17

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