JPS57129817A - Manufacture of trichlorosilane - Google Patents

Manufacture of trichlorosilane

Info

Publication number
JPS57129817A
JPS57129817A JP1314281A JP1314281A JPS57129817A JP S57129817 A JPS57129817 A JP S57129817A JP 1314281 A JP1314281 A JP 1314281A JP 1314281 A JP1314281 A JP 1314281A JP S57129817 A JPS57129817 A JP S57129817A
Authority
JP
Japan
Prior art keywords
gaseous
reactor
trichlorosilane
fed
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1314281A
Other languages
Japanese (ja)
Inventor
Eiichi Nakayama
Fumiteru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Titanium Co Ltd
Original Assignee
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Titanium Co Ltd filed Critical Osaka Titanium Co Ltd
Priority to JP1314281A priority Critical patent/JPS57129817A/en
Publication of JPS57129817A publication Critical patent/JPS57129817A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase the conversion rate of trichlorosilane by packing a fluidized bed reactor with formed wire net bodies and silicon particles, feeding reactive gases to form a fluidized bed, and maintaining the bed at a prescribed temp. to improve the particle-gas contact efficiency.
CONSTITUTION: A fluidized bed reactor 1 is packed with formed wire net bodies 3 as packing and a mixture 4 of metallic silicon particles with catalyst particles. The internal air of the reactor 1 is replaced with gaseous Ar, and the interior of the reactor 1 is maintained at 350W900°C with a heater 2. A gaseous mixture consisting of silicon tetrachloride and hydrogen or of the components and hydrogen chloride is fed into the reactor 1 from the bottom under atmospheric pressure or high pressure to cause a fluidized reaction. The gaseous product is taken out of an upper part of the reactor 1 and fed to a condenser C through a dust collector S. In the condenser C trichlorosilane is separated from gaseous H2 and gaseous HCl by condensation. The condensate is then fed to a rectifier R and separated in to trichlorosilane and silicon tetrachloride. The separated silicon tetrachloride, gaseous H2 and gaseous HCl are utilized in said reaction again.
COPYRIGHT: (C)1982,JPO&Japio
JP1314281A 1981-01-30 1981-01-30 Manufacture of trichlorosilane Pending JPS57129817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1314281A JPS57129817A (en) 1981-01-30 1981-01-30 Manufacture of trichlorosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1314281A JPS57129817A (en) 1981-01-30 1981-01-30 Manufacture of trichlorosilane

Publications (1)

Publication Number Publication Date
JPS57129817A true JPS57129817A (en) 1982-08-12

Family

ID=11824902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1314281A Pending JPS57129817A (en) 1981-01-30 1981-01-30 Manufacture of trichlorosilane

Country Status (1)

Country Link
JP (1) JPS57129817A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4861574A (en) * 1987-03-23 1989-08-29 Mitsubishi Kinzoku Kabushiki Kaisha Process for preparing chloropolysilanes
JP2012507469A (en) * 2008-11-05 2012-03-29 ロード・リミテッド・エルピー Apparatus and process for hydrogenation of silicon tetrahalides and silicon to trihalosilanes
JP2013517207A (en) * 2010-01-18 2013-05-16 エボニック デグサ ゲーエムベーハー Flow tube reactor for reacting silicon tetrachloride to obtain trichlorosilane
EP2825506A4 (en) * 2012-03-14 2015-12-02 Sitec Gmbh Trichlorosilane production
WO2016031362A1 (en) * 2014-08-28 2016-03-03 東亞合成株式会社 Trichlorosilane production method
CN105435788A (en) * 2014-06-16 2016-03-30 新特能源股份有限公司 Silicon tetrachloride reduction method of dechlorination hydrogenation technology and preparation method of copper-silicon alloy catalyst containing Cu-Si metallic bond

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847500A (en) * 1971-10-21 1973-07-05
JPS5060496A (en) * 1973-09-29 1975-05-24
JPS5273837A (en) * 1975-12-16 1977-06-21 Mitsubishi Gas Chem Co Inc Production of aromatic nitriles

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847500A (en) * 1971-10-21 1973-07-05
JPS5060496A (en) * 1973-09-29 1975-05-24
JPS5273837A (en) * 1975-12-16 1977-06-21 Mitsubishi Gas Chem Co Inc Production of aromatic nitriles

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4861574A (en) * 1987-03-23 1989-08-29 Mitsubishi Kinzoku Kabushiki Kaisha Process for preparing chloropolysilanes
JP2012507469A (en) * 2008-11-05 2012-03-29 ロード・リミテッド・エルピー Apparatus and process for hydrogenation of silicon tetrahalides and silicon to trihalosilanes
JP2013517207A (en) * 2010-01-18 2013-05-16 エボニック デグサ ゲーエムベーハー Flow tube reactor for reacting silicon tetrachloride to obtain trichlorosilane
EP2825506A4 (en) * 2012-03-14 2015-12-02 Sitec Gmbh Trichlorosilane production
CN105435788A (en) * 2014-06-16 2016-03-30 新特能源股份有限公司 Silicon tetrachloride reduction method of dechlorination hydrogenation technology and preparation method of copper-silicon alloy catalyst containing Cu-Si metallic bond
WO2016031362A1 (en) * 2014-08-28 2016-03-03 東亞合成株式会社 Trichlorosilane production method
JPWO2016031362A1 (en) * 2014-08-28 2017-07-13 東亞合成株式会社 Method for producing trichlorosilane

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