JPS57140312A - Manufacture of trichlorosilane - Google Patents

Abstract

PURPOSE: To inexpensively manufacture SiHCl₃ at a high rate of conversion by charging formed wire net bodies as packing onto the porous partition walls of a fluidized bed reactor provided with multistage divided chambers, packing the reactor with Si and catalyst particles, and causing a fluidized reaction using a gaseous mixture of SiCl₄ with H₂.

CONSTITUTION: Formed wire net bodies 3 as packing are changed into the multistage divided chambers 6 of a fluidized bed reactor 1, and the chambers are packed with metallic Si particles or a mixture 4 of the particles with catalyst particles. Gaseous Ar is fed from the bottom of the reactor 1 to replace the internal air of the reactor 1, the internal temp. of the reactor 1 is maintained at 350W900°C with a heater 2, and a gaseous mixture of SiCl₄ with H₂ is fed under atmospheric pressure or high pressure optionally together with HCl to a cause a fluidized reaction. The gaseous product is passed through a dust collector S and separated into SiCl₄+SiHCl₃ and gaseous H₂+HCl by condensation with a condenser C. Said condensate is separated into SiHCl₃ as a product and SiCl₄ with a rectifying column R, and the SiCl₄ is evaporated with an evaporator E and fed to the reactor 1 together with the H₂ and HCl.

COPYRIGHT: (C)1982,JPO&Japio