CN203568858U - Production system for synthesis of silicon tetrachloride - Google Patents
Production system for synthesis of silicon tetrachloride Download PDFInfo
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- CN203568858U CN203568858U CN201320506096.XU CN201320506096U CN203568858U CN 203568858 U CN203568858 U CN 203568858U CN 201320506096 U CN201320506096 U CN 201320506096U CN 203568858 U CN203568858 U CN 203568858U
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Abstract
The utility model relates to a production system for synthesis of silicon tetrachloride. The system comprises a production device and a rectification device; the production device comprises a chlorine generation device, a silicon powder feeding device, a fluidized bed reactor, a cyclone separation device, a bag-type dust collector, a spray tower and an alkaline washing tower; the chlorine generation device is connected with the fluidized bed reactor; the silicon powder feeding device is connected with the fluidized bed reactor; the fluidized bed reactor is provided with a heat exchanger; the heat exchanger is connected with the cyclone separation device; the lower part of the cyclone separation device is in backflow connection to the fluidized bed reactor; the cyclone separation device is connected with the bag-type dust collector; the upper part of the bag-type dust collector is connected with the spray tower; the upper part of the spray tower is connected with a condenser; the discharge opening of the condenser is connected with a silicon tetrachloride crude product storage tank; the silicon tetrachloride crude product storage tank is connected with the rectification device; the gas outlet of the condenser is connected with the alkaline washing tower. The device disclosed by the utility model has a simple structure and high raw material utilization efficiency; in a crude product, silicon tetrachloride selectivity is over 95 percent.
Description
Technical field
The utility model belongs to organosilane monomer synthesis technical field, relates in particular to the synthetic production system of a kind of silicon tetrachloride.
Background technology
Silicon tetrachloride, molecular formula: SiCl
4, for colourless, be corrosive, non-combustible liquid, have suffocative stink.While being exposed to wet air, form dense smoke, hydrogenchloride is emitted in hydrolysis rapidly.57.6 ℃ of boiling points.Fusing point-70.0 ℃.Can be used for manufacturing silicoorganic compound, as thermal silica, tetraethoxy, organic silicone oil, high-temperature insulation paint, silicone resin, silicon rubber and heat resistant pad lining material.High purity silicon tetrachloride is for manufacturing the material of polysilicon, high-purity silicon dioxide and inorganic silicon compound, silica fiber, and war industry is for the manufacture of NC mixture, and metallurgical industry is for the manufacture of corrosion-resistant ferrosilicon, and foundary industry is used as releasing agent etc.At present, the impact of photovoltaic industry external owing to being subject to " two anti-", almost in the situation of being annihilated, the raw material trichlorosilane device of polysilicon, also almost in full end-of-life state, only has few device to move in carry-deficit, and this has just caused the silicon tetrachloride as by-product of this industry fewer and feweri, silicon tetrachloride becomes tight pin product by the by product of giving it up, price, from freely, increases to more than 4000 yuan/ton, and also can't buy on market.
Publication number be the Chinese patent of CN102712485A disclose a kind of by organic compound combustion generate electricity ash that manufacture technique produces, preferably organic compound combustion is converted to ignition energy under the existence of the grey carbonaceous material that the generating set of electric power produces to the method for the silicon-containing material chlorination production silicon tetrachloride that by silicon-containing material, preferably contains silicic acid biomass.Publication number is that the Chinese patent of CN102686514A also discloses a kind of granulation body and chlorine, oxygen that utilizes silicon-dioxide and carbonaceous material to form and carries out common chlorination reaction, generate the chlorinating step of silicon tetrachloride, and then silicon tetrachloride is generated to polysilicon with reductive agent metallic reducing.It is a kind of by the mixture of fine and/or unbodied silicon-dioxide, carbon and energy donor being changed to manufacture with chlorine the method for silicon tetrachloride that publication number is that the Chinese patent of CN101472839 also discloses.Energy donor is Pure Silicon Metal or silicon alloy, and the interpolation of donor has realized the thermopositive reaction of self-supporting on the one hand, has caused on the other hand showing of reacting initial temperature to be reduced.
Patent USP4490344, USP4604272, USP4847059, DE3438444/A1 and EP00077138 are by adding the mode of catalyzer, reduce chlorine, silicon-dioxide and carbon reaction and produce the method for the temperature of silicon tetrachloride, main group and the chlorine-containing compound of subgroup, preferably boron trichloride and phosphoryl chloride etc. that the catalyzer using is the periodic table of elements the 5th.
Publication number is that the Chinese patent of CN1114559C discloses and a kind ofly by by least having the chlorosilane of a HSi key in silicon, ferro-alloy metal or molecule, reacts under catalyst action with hydrogenchloride, thereby highly selective is produced the method for silicon tetrachloride.The utility model provides a kind of catalyzer of manufacturing the method for silicon tetrachloride comprise at least one periodictable VIII family's metallic element or its compound and be a kind ofly selected from periodictable VB family's period 3 and under the mixture of the element simple substance in cycle exists subsequently, make at least to have in silicon metal or molecule chlorosilane and the hcl reaction of a HSi key.USP3754077, USP4130632 disclose a kind of silicon, aluminium alloy and hydrogenchloride or chlorine gas of utilizing and have reacted, and generate the method for trichlorosilane or silicon tetrachloride.USP4980143 has introduced a kind of reaction with silica flour at hydrogenchloride in the process that generates trichlorosilane and silicon tetrachloride mixture, by changing the reaction conditionss such as temperature, can improve the content of silicon tetrachloride in mixed chlorosilane.Owing to there are a plurality of chlorosilane components in reaction process in these, later separation purifying process step is comparatively loaded down with trivial details.
The people such as the Fu Xuehong (research of the synthetic silicon tetrachloride of abandoned catalyst in direct synthesis methylchlorosilane, organosilicon material, 2011, 25(6): 397-401, the 13 Chinese organosilicon seminar collection of thesis in 2006), Yan Shicheng (the research of the synthetic silicon tetrachloride new technology of abandoned catalyst in direct synthesis methylchlorosilane, Northeast Electric Power University's journal, 2010, 30(6): 36-39.) Chinese patent CN1465524A etc. has introduced with (75% the Si of the waste catalyst in methyl chlorosilane monomer production process, 10 ~ 15% Cu) be main raw material, in the fluidized-bed reactor that is 600mm at diameter, synthesize the method for silicon tetrachloride with chlorine generation gas-solid reaction.
Summary of the invention
In order to solve above-mentioned technical problem, the purpose of this utility model is to provide the synthetic production system of a kind of silicon tetrachloride, and this system architecture is simple, and prepared using efficiency is high, and in crude product, silicon tetrachloride selectivity is more than 95%, and product postprocessing operation is simple.
In order to realize above-mentioned object, the utility model has adopted following technical scheme:
The production system that a kind of silicon tetrachloride is synthetic, this system comprises production equipment and rectifier unit, and described production equipment comprises chlorine generating unit, silica flour feeding device, fluidized-bed reactor, cyclone separator, fiber bag precipitator, spray column and soda-wash tower, chlorine generating unit connects the inlet mouth of fluidized-bed reactor, silica flour feeding device connects the charging opening of fluidized-bed reactor, the skin of fluidized-bed reactor is provided with heating jacket, the air outlet on fluidized-bed reactor top is connected with interchanger, the discharge port of interchanger connects cyclone separator, the discharge gate of cyclone separator bottom refluxes respectively and is connected to described fluidized-bed reactor, the air outlet on cyclone separator top connects described fiber bag precipitator, the air outlet on fiber bag precipitator top connects described spray column, the air outlet on spray column top is connected with condenser, the discharge port of condenser is connected with silicon tetrachloride crude product storage tank, described silicon tetrachloride crude product storage tank connects described rectifier unit, the air outlet of described condenser connects described soda-wash tower.
As preferably, the bottom of described fiber bag precipitator is connected with fine powder withdrawing can; The bottom of described spray column is connected with slag slurry storage tank.
As preferably, the discharge port of described condenser connects branch line, and branch line one end connects described silicon tetrachloride crude product storage tank, and the other end connects the shower nozzle of described spray column.
As preferably, described cyclone separator comprises primary cyclone and secondary cyclone, the air outlet on primary cyclone top connects described secondary cyclone, the discharge gate of primary cyclone and secondary cyclone bottom refluxes respectively and is connected to described fluidized-bed reactor, and the air outlet on secondary cyclone top connects described fiber bag precipitator.
As preferably, described chlorine generating unit comprises liquid chlorine storage tank, chlorine liquid carburetor and vacuum buffer tank, is provided with canned-motor pump and is connected between the described outlet of liquid chlorine storage tank and the entrance of chlorine liquid carburetor, and chlorine liquid carburetor connects described vacuum buffer tank.
As preferably, above described silica flour feeding device, be connected with nitrogen pipeline, nitrogen pipeline is provided with valve, and silica flour is added to fluidized-bed reactor bottom.
As preferably, described heating jacket adopts oil bath heating, and heating jacket is provided with thermal oil entrance and thermal oil outlet.
As preferably, described rectifier unit comprises de-low tower, rectifying tower and silicon tetrachloride finished product storage tank, described silicon tetrachloride crude product storage tank is connected with de-low tower, the top of de-low tower is connected with the first condenser, the outlet of the first condenser is connected with low-boiling-point substance storage tank, described de-low tower bottom is connected with silicon tetrachloride and high boiling material storage tank, and silicon tetrachloride is connected with rectifying tower with high boiling material storage tank; The top of described rectifying tower is connected with the second condenser, the outlet of the second condenser is connected with branch line, branch line Yi Ge branch is connected to rectifying tower by valve return is set, and another branch connects described silicon tetrachloride finished product storage tank by valve is set.
As preferably, described rectifier unit also comprises water wash column, and the entrance of water wash column connects respectively described low-boiling-point substance storage tank and the blow-off valve in silicon tetrachloride finished product storage tank, and the top of water wash column is provided with drain, and the bottom of water wash column is provided with storage tank.
As preferably, the bottom of described rectifying tower is provided with reboiler, and the bottom of rectifying tower is connected with high boiling material storage tank; The storage tank of described water wash column bottom is connected with water pump, and water pump circulation is connected to the top spray of rectifying tower.
As preferably, between the entrance of the outlet of described silicon tetrachloride crude product storage tank and de-low tower, by being set, the first canned-motor pump is connected, between silicon tetrachloride and high boiling material storage tank and the entrance of rectifying tower, by being set, secondary shielding pump is connected.
The utility model is owing to having adopted above-mentioned technical scheme, and described method not only raw material is easy to get, and reaction conditions is gentle, and product is easy to purifying, and product yield and purity all higher, simple to operate, be easy to realize industrialization.Described device has been realized employing chlorine and silica flour direct production silicon tetrachloride, and this apparatus structure is simple, and prepared using efficiency is high, and in crude product, silicon tetrachloride selectivity is more than 95%.Described rectifier unit can be produced the rectifying of silicon tetrachloride crude product for direct method, and the silicon tetrachloride purity of producing is good, for direct method production silicon tetrachloride provides technical support, have simple in structure, the feature that environment protection emission performance is good.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model production equipment.
Fig. 2 is the structural representation of the utility model rectifier unit.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is made a detailed explanation.
A kind of synthetic method of silicon tetrachloride, the method comprises production stage and the rectification step of the thick product of silicon tetrachloride, the production stage of the described thick product of silicon tetrachloride be take silica flour as main raw material, do not adding under the situation of any catalyzer, carry out gas-solid direct synthesis with chlorine and react and prepare silicon tetrachloride, reactor is fluidized-bed; Controlling temperature of reaction is 300 ℃, and pressure is 0.15MPa, and the fluidizing gas velocity of chlorine is 0.10m/s; Reaction equation is:
A kind of synthetic method of silicon tetrachloride, the method comprises production stage and the rectification step of the thick product of silicon tetrachloride, the production stage of the described thick product of silicon tetrachloride be take silica flour as main raw material, do not adding under the situation of any catalyzer, carry out gas-solid direct synthesis with chlorine and react and prepare silicon tetrachloride, reactor is fluidized-bed; Controlling temperature of reaction is 320 ℃, and pressure is 0.10MPa, and the fluidizing gas velocity of chlorine is 0.08m/s; Reaction equation is:
A kind of synthetic method of silicon tetrachloride, the method comprises production stage and the rectification step of the thick product of silicon tetrachloride, the production stage of the described thick product of silicon tetrachloride be take silica flour as main raw material, do not adding under the situation of any catalyzer, carry out gas-solid direct synthesis with chlorine and react and prepare silicon tetrachloride, reactor is fluidized-bed; Controlling temperature of reaction is 280 ℃, and pressure is 0.20MPa, and the fluidizing gas velocity of chlorine is 0.10m/s; Reaction equation is:
。
embodiment 4
The production system of the synthetic method described in embodiment 1 ~ 3, this system comprises production equipment and rectifier unit.
Production equipment as shown in Figure 1, this device comprises liquid chlorine storage tank 1, chlorine liquid carburetor 3, silica flour feeding device 5, fluidized-bed reactor 6, primary cyclone 10, secondary cyclone 11, fiber bag precipitator 12, spray column 14, soda-wash tower 18 etc.Wherein between the entrance of the outlet of liquid chlorine storage tank 1 and chlorine liquid carburetor 3, with canned-motor pump 2, be connected, be convenient to carrying out continuously of reaction.Between chlorine liquid carburetor 3 and fluidized-bed reactor 6, be connected with vacuum buffer tank 4, be convenient to stable being passed in fluidized-bed reactor 6 of gas velocity of the chlorine after vaporization.Described silica flour feeding device 5 is connected with nitrogen pipeline 21 above, and nitrogen pipeline 21 is provided with valve, by valve, is controlled and continuously silica flour is added to fluidized-bed reactor 6 bottoms.Fluidized-bed reactor adopts the heating jacket of oil bath heating, and heating jacket is provided with thermal oil entrance 8 and thermal oil outlet 7.The air outlet on fluidized-bed reactor 6 tops is connected with interchanger 9, the discharge port of interchanger 9 connects described primary cyclone 10, the air outlet on primary cyclone 10 tops connects described secondary cyclone 11, and the discharge gate of primary cyclone 10 and secondary cyclone 11 bottoms refluxes respectively and is connected to described fluidized-bed reactor 6.Fluidized-bed reactor 6 outlet products are after interchanger 9 coolings, gas crude product is after primary cyclone 10 is separated with secondary cyclone 11, and the most of solid fine silica powder in gas crude product reclaims to enter in fluidized-bed reactor 6 and continues as raw material reaction.The air outlet on described secondary cyclone 11 tops connects described fiber bag precipitator 12, the bottom of fiber bag precipitator 12 is connected with fine powder withdrawing can 13, makes thinner silica flour a small amount of in gas crude product by entering fine powder withdrawing can 13 after sack cleaner 12 recovery.Sack cleaner 12 outlet products enter spray column 14, the SiCl of spray liquid for using through the condensed partial reflux of condenser 16
4crude product, the air outlet on spray column 14 tops is connected with condenser 16, and the discharge port of condenser 16 connects branch line, and branch line one end is connected with silicon tetrachloride crude product storage tank 17, the other end connects the shower nozzle of described spray column 14, and spray column 14 bottoms are the high slag slurry storage tank 15 that boils of liquid.The SiCl of silicon tetrachloride crude product storage tank 17 for gathering
4crude product, can be used for further rectification and purification and uses.Condenser 16 unreacted is out chlorine gas mixture completely, generates the products such as clorox through soda-wash tower 18 with NaOH solution reaction, and product clorox enters clorox storage tank 19 and collects, and other noncondensable gas is discharged through drain 20.
The principle of work of the utility model production equipment is: the liquid chlorine in liquid chlorine storage tank 1 is input in chlorine liquid carburetor 3 and vaporizes to certain temperature through canned-motor pump 2, chlorine gas regulates laggard fluidized-bed reactor 6 bottoms that enter by surge tank 4, directly reacts in fluidized-bed reactor 6 with the raw material silica flour from silica flour feeding device 5.Fluidized-bed reactor 6 outlet crude products are after one-level cyclonic separation 10 is separated with secondary cyclone 11, and the most of solid fine silica powder in gas crude product reclaims to enter in fluidized-bed reactor 6 and continues as raw material reaction.In gas crude product, a small amount of thinner silica flour enters fine powder withdrawing can 13 after reclaiming by sack cleaner 12.Sack cleaner 12 outlet products enter spray column 14, the SiCl of spray liquid for using through the condensed partial reflux of condenser 16
4crude product, spray column 14 bottoms are the high slag slurry storage tank 15 that boils of liquid.The SiCl of storage tank 17 for gathering
4crude product, can be used for further rectification and purification and uses.Condenser 16 unreacted is out chlorine gas mixture completely, generates the products such as clorox through soda-wash tower 18 with NaOH solution reaction, and product clorox enters storage tank 19 and collects, and other noncondensable gas is discharged through drain 20.
Rectifier unit as shown in Figure 2, comprises de-low tower 22, low-boiling-point substance storage tank 24, silicon tetrachloride and high boiling material storage tank 26, rectifying tower 28, silicon tetrachloride finished product storage tank 30 and water wash column 34.Wherein between the entrance of the outlet of silicon tetrachloride crude product storage tank 17 and de-low tower 22, by the first canned-motor pump 21 is set, be connected, be convenient to carrying out continuously of rectification process.De-low tower 22 is connected with the first condenser 23 above, after the first condenser 23 condensations, enters low-boiling-point substance storage tank 24.De-low tower 22 bottoms connect described silicon tetrachloride and high boiling material storage tank 26, between silicon tetrachloride and high boiling material storage tank 26 and rectifying tower, by secondary shielding pump 27 is set, are connected.Rectifying tower 28 tops are connected with the second condenser 29, by being connected with branch line after the second condenser 29, branch line Yi Ge branch is connected to rectifying tower 28 by valve return is set, another branch connects described silicon tetrachloride finished product storage tank 30 by valve is set, rectifying tower 28 bottoms are connected with reboiler 32 and high boiling material storage tank 33, and high boiling substance imports to high boiling material storage tank 33 after running up to certain liquid level at the bottom of tower.The entrance of water wash column 34 connects respectively low-boiling-point substance storage tank 24 blow-off valve 25 and blow-off valve above 31 above.Water wash column 34 adopts aqueous solution water absorption noncondensable gas, absorbs the aqueous solution and enters after the storage tank 36 of water wash column 34 bottoms, and the aqueous solution in storage tank 36 is squeezed in water wash column 34 by water pump 18 circulations.The drain 35 of other noncondensable gas above water wash column 34 discharged.
Rectifier unit principle of work of the present utility model is: the material in silicon tetrachloride crude product storage tank 1 is input in de-low tower 22 through canned-motor pump 2.Low-boiling-point substance material is collected in low-boiling-point substance storage tank 24 after the de-low condensation of condenser 4, and heavy constituent is collected in silicon tetrachloride and high boiling material storage tank 26.Material in silicon tetrachloride and high boiling material storage tank 26 is input in rectifying tower 28 with canned-motor pump 27, and tower top silicon tetrachloride cut is after the second condenser 29 condensations, and front-end volatiles are back in rectifying tower 28 and carry out rectifying, and other extraction enter in silicon tetrachloride finished product storage tank 30.In rectifying tower 28, high boiling substance imports in high boiling material storage tank 33 after running up to certain liquid level at the bottom of tower.From low-boiling-point substance storage tank 24 blow-off valve 25 above and the noncondensable gas of silicon tetrachloride finished product storage tank 30 blow-off valve 31 above, after water wash column 34 aqueous solution circulating water washs, absorbing the aqueous solution enters after storage tank 36, the aqueous solution in storage tank 36 is squeezed in water wash column 34 by water pump 18 circulations, and the drain 35 of other noncondensable gas above water wash column 34 discharged.
Claims (10)
1. the production system that silicon tetrachloride is synthetic, it is characterized in that: this system comprises production equipment and rectifier unit, described production equipment comprises chlorine generating unit, silica flour feeding device (5), fluidized-bed reactor (6), cyclone separator (10,11), fiber bag precipitator (12), spray column (14) and soda-wash tower (18), chlorine generating unit connects the inlet mouth of fluidized-bed reactor (6), silica flour feeding device (5) connects the charging opening of fluidized-bed reactor (6), the skin of fluidized-bed reactor (6) is provided with heating jacket, the air outlet on fluidized-bed reactor (6) top is connected with interchanger (9), the discharge port of interchanger (9) connects cyclone separator (10, 11), cyclone separator (10, 11) discharge gate of bottom refluxes respectively and is connected to described fluidized-bed reactor (6), cyclone separator (10, 11) air outlet on top connects described fiber bag precipitator (12), the air outlet on fiber bag precipitator (12) top connects described spray column (14), the air outlet on spray column (14) top is connected with condenser (16), the discharge port of condenser (16) is connected with silicon tetrachloride crude product storage tank (17), described silicon tetrachloride crude product storage tank (17) connects described rectifier unit, the air outlet of described condenser (16) connects described soda-wash tower (18).
2. production system according to claim 1, is characterized in that: the bottom of fiber bag precipitator (12) is connected with fine powder withdrawing can (13); The bottom of described spray column (14) is connected with slag slurry storage tank (15).
3. production system according to claim 1, is characterized in that: the discharge port of condenser (16) connects branch line, and branch line one end connects described silicon tetrachloride crude product storage tank (17), and the other end connects the shower nozzle of described spray column (14).
4. production system according to claim 1, it is characterized in that: cyclone separator comprises primary cyclone (10) and secondary cyclone (11), the air outlet on primary cyclone (10) top connects described secondary cyclone (11), the discharge gate of primary cyclone (10) and secondary cyclone (11) bottom refluxes respectively and is connected to described fluidized-bed reactor (6), and the air outlet on secondary cyclone (11) top connects described fiber bag precipitator (12).
5. production system according to claim 1, it is characterized in that: chlorine generating unit comprises liquid chlorine storage tank (1), chlorine liquid carburetor (2) and vacuum buffer tank (4), between the described outlet of liquid chlorine storage tank (1) and the entrance of chlorine liquid carburetor (2), be provided with canned-motor pump (3) and be connected, chlorine liquid carburetor (2) connects described vacuum buffer tank (4).
6. production system according to claim 1, is characterized in that: silica flour feeding device (5) is connected with nitrogen pipeline (21) above, and nitrogen pipeline (21) is provided with valve, and silica flour is added to fluidized-bed reactor (6) bottom.
7. production system according to claim 1, it is characterized in that: rectifier unit comprises de-low tower (22), rectifying tower (28) and silicon tetrachloride finished product storage tank (30), described silicon tetrachloride crude product storage tank (17) is connected with de-low tower (22), the top of de-low tower (22) is connected with the first condenser (23), the outlet of the first condenser (23) is connected with low-boiling-point substance storage tank (24), described de-low tower (22) bottom is connected with silicon tetrachloride and high boiling material storage tank (26), silicon tetrachloride is connected with rectifying tower (28) with high boiling material storage tank (26), the top of described rectifying tower (28) is connected with the second condenser (29), the outlet of the second condenser (29) is connected with branch line, branch line Yi Ge branch is connected to rectifying tower (28) by valve return is set, and another branch connects described silicon tetrachloride finished product storage tank (30) by valve is set.
8. production system according to claim 7, it is characterized in that: rectifier unit also comprises water wash column (34), the entrance of water wash column (34) connects respectively described low-boiling-point substance storage tank (24) and the blow-off valve (25,31) in silicon tetrachloride finished product storage tank (30), the top of water wash column (34) is provided with drain (35), and the bottom of water wash column (34) is provided with storage tank (36).
9. production system according to claim 7, it is characterized in that: between the entrance of the outlet of described silicon tetrachloride crude product storage tank (17) and de-low tower (22), by the first canned-motor pump (21) is set, be connected, between the outlet of silicon tetrachloride and high boiling material storage tank (26) and the entrance of rectifying tower (28), by secondary shielding pump (27) is set, be connected.
10. production system according to claim 8, is characterized in that: the bottom of described rectifying tower (28) is provided with reboiler (32), and the bottom of rectifying tower (28) is connected with high boiling material storage tank (33); The storage tank (36) of water wash column (34) bottom is connected with water pump (37), and water pump (37) circulation is connected to the top spray of rectifying tower (28).
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| CN201320506096.XU CN203568858U (en) | 2013-08-19 | 2013-08-19 | Production system for synthesis of silicon tetrachloride |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105314638A (en) * | 2015-11-26 | 2016-02-10 | 新疆大全新能源有限公司 | Method and device for recycling silicon tetrachloride and removing high-boiling residues in trichlorosilane synthetic material |
| CN107416841A (en) * | 2017-06-22 | 2017-12-01 | 唐山三孚硅业股份有限公司 | A kind of method and device for producing silicon tetrachloride |
| CN107673359A (en) * | 2017-11-02 | 2018-02-09 | 成都蜀菱科技发展有限公司 | The preparation method and method for controlling reaction temperature of a kind of silicon tetrachloride |
| CN109467091A (en) * | 2018-12-25 | 2019-03-15 | 天津中科拓新科技有限公司 | A kind of energy saver and method of silicon tetrachloride synthesis |
-
2013
- 2013-08-19 CN CN201320506096.XU patent/CN203568858U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105314638A (en) * | 2015-11-26 | 2016-02-10 | 新疆大全新能源有限公司 | Method and device for recycling silicon tetrachloride and removing high-boiling residues in trichlorosilane synthetic material |
| CN105314638B (en) * | 2015-11-26 | 2018-01-05 | 新疆大全新能源有限公司 | Silicon tetrachloride recycling and the method and apparatus except high-boiling components in trichlorosilane synthesis material |
| CN107416841A (en) * | 2017-06-22 | 2017-12-01 | 唐山三孚硅业股份有限公司 | A kind of method and device for producing silicon tetrachloride |
| CN107673359A (en) * | 2017-11-02 | 2018-02-09 | 成都蜀菱科技发展有限公司 | The preparation method and method for controlling reaction temperature of a kind of silicon tetrachloride |
| CN107673359B (en) * | 2017-11-02 | 2020-03-31 | 成都蜀菱科技发展有限公司 | Preparation method and reaction temperature control method of silicon tetrachloride |
| CN109467091A (en) * | 2018-12-25 | 2019-03-15 | 天津中科拓新科技有限公司 | A kind of energy saver and method of silicon tetrachloride synthesis |
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