CN202099066U - Device for preparing silicane - Google Patents
Device for preparing silicane Download PDFInfo
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- CN202099066U CN202099066U CN2011201721729U CN201120172172U CN202099066U CN 202099066 U CN202099066 U CN 202099066U CN 2011201721729 U CN2011201721729 U CN 2011201721729U CN 201120172172 U CN201120172172 U CN 201120172172U CN 202099066 U CN202099066 U CN 202099066U
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Abstract
The utility model discloses a device for preparing silicane, which comprises a trichlorosilane reactor, a dichlorosilane reactor, a silicane reactor and a silicane collection tank, wherein the trichlorosilane reactor is connected with a silicon powder/catalyst supply port through a pipe and connected with a hydrogen gas supply port, a silicon tetrachloride storage tank and a hydrogen chloride storage tank through pipes; the dichlorosilane reactor and the trichlorosilane reactor are connected through a pipe, and the dichlorosilane reactor is connected with the hydrogen gas supply port through a pipe; the silicane reactor and the dichlorosilane reactor are connected through a pipe, and the silicane reactor is connected with the hydrogen gas supply port through a pipe; and the silicane collection tank and the silicane reactor are connected through a pipe. The device for preparing silicane improves the transformation rate of reactions, reduces the energy consumption, increases the production efficiency of silicane, and reduces the production cost.
Description
Technical field
The utility model relates to the preparation field of silane, more particularly, relates to a kind of preparation facilities of silane.
Background technology
Silane has another name called silicomethane, silicon tetrahydride, molecular formula SiH
4, SiH
4Be strong reducible agent, contact, can demonstrate very strong activity, belong to inflammable, explosive dangerous gas with oxidizing substance, alkali or heavy metal salt solution.Silane is the basic raw material of a series of silicon compounds such as manufacture order crystal silicon, polysilicon, non-crystalline silicon, metal silicide, silicon nitride, silit, silicon oxide, in widespread use electronics and the semi-conductor industry.
The preparation method of existing silane; Usually be raw material with the silicon tetrachloride that cheaply is easy to get, through process steps such as hydrogenation, disproportionation, thermolysis, hydrogen recovery, i.e. UCC prepared silane; Because preparation technology is closed cycle; Almost no coupling product is discharged, thereby in industry, is able to large-scale application, and the reaction that this technology relates to is following:
Wherein, metal Cu catalyzer is adopted in the first step reaction, belongs to high temperature (500-700 ℃) high pressure building-up reactions, and energy consumption is higher, and a transformation efficiency of reaction is 20 ~ 25%; Second step, the 3rd step are the chlorosilane disproportionation reaction, and reaction conditions is suitable, can adopt identical catalyzer, and (60-100 ℃) carries out under lower temperature, and transformation efficiency is lower, and a transformation efficiency is below 8%.
In above-mentioned technology, chlorosilane is as intermediates, and whole technology becomes closed cycle, is equivalent to H
2With SiH
4Addition reaction.Yet, two weak points are arranged in this technology: the first, the transformation efficiency of step 2, three disproportionation reaction is low, reactant need constantly to separate purify after reaction again; The second, by product mainly is SiCl
4, need to separate the further hydrogenation of back of purifying after reaction finishes, so; A utilization ratio of reactant is low; Caused the energy consumption of entire reaction higher, and therefore the cost of silane product has caused the high of silane product cost almost by the process energy consumption decision.
Summary of the invention
The utility model is intended to solve the preparation technology and the corresponding with it preparation facilities that adopt existing silane and prepares silane, the technical problem that transformation efficiency is low, cost is high.
In view of the above, the utility model discloses a kind of preparation facilities of silane, comprising: trichlorosilane reactor drum, dichloro hydrogen pasc reaction device, silane reaction device, silane holding tank;
Said trichlorosilane reactor drum passes through the supply opening of pipe connection silica flour and catalyzer, and through pipe connection hydrogen supply mouth, silicon tetrachloride hold-up vessel and hydrogenchloride hold-up vessel;
Said dichloro hydrogen pasc reaction device and trichlorosilane reactor drum are through pipe connection, and dichloro hydrogen pasc reaction device is through pipe connection hydrogen supply mouth;
Said silane reaction device and dichloro hydrogen pasc reaction device are through pipe connection, and the silane reaction device is through pipe connection hydrogen supply mouth;
Said silane holding tank and silane reaction device pass through pipe connection.
In the preparation facilities of the silane of the utility model; The lower end of said trichlorosilane reactor drum is provided with the gas-liquid import; The outside of said gas-liquid import is provided with primary heater; Said hydrogen supply mouth, silicon tetrachloride hold-up vessel, hydrogenchloride hold-up vessel be through pipe connection to said primary heater, and connect on the pipeline of silicon tetrachloride hold-up vessel, hydrogenchloride hold-up vessel topping-up pump is installed.
In the preparation facilities of the silane of the utility model, connect on the pipeline of said trichlorosilane reactor drum and said dichloro hydrogen pasc reaction device trash eliminator, first knockout tower, second knockout tower are installed successively.
In the preparation facilities of the silane of the utility model, said trichlorosilane reactor drum is provided with the reactant outlet, and said trash eliminator is through the said reactant outlet of pipe connection; Be connected with interchanger on the said trash eliminator; The lower end of trash eliminator is provided with the solid impurity relief outlet; The upper end of trash eliminator is provided with hydrogen outlet, and said hydrogen outlet is through pipe connection to hydrogen supply mouth, and the side of trash eliminator also is provided with the mix products outlet; Said mix products outlet is equipped with first buffer tank and fresh feed pump through pipe connection to the first knockout tower on the pipeline of the outlet of connection mix products and first knockout tower.
In the preparation facilities of the silane of the utility model; Said first knockout tower is provided with silicon tetrachloride outlet and chlorosilane outlet; Said chlorosilane outlet is positioned at the top of silicon tetrachloride outlet; Said silicon tetrachloride outlet is through pipe connection to said silicon tetrachloride hold-up vessel, and said chlorosilane outlet is equipped with second buffer tank and fresh feed pump through pipe connection to the second knockout tower on the pipeline between the chlorosilane outlet and second knockout tower.
In the preparation facilities of the silane of the utility model; Said second knockout tower is provided with trichlorosilane outlet and the outlet of dichloro hydrogen silicon; Said dichloro hydrogen silicon outlet is positioned at the top of trichlorosilane outlet; Said trichlorosilane outlet is equipped with the 3rd buffer tank and fresh feed pump through pipe connection to said dichloro hydrogen pasc reaction device on the pipeline between trichlorosilane outlet and the dichloro hydrogen pasc reaction device; Said dichloro hydrogen silicon outlet is equipped with the 4th buffer tank and fresh feed pump through pipe connection to said silane reaction device on the pipeline between outlet of dichloro hydrogen silicon and the silane reaction device.
In the preparation facilities of the silane of the utility model; The upper end of said dichloro hydrogen pasc reaction device is provided with the reactant outlet; Said reactant outlet is connected to said first knockout tower; The lower end of said dichloro hydrogen pasc reaction device is provided with material inlet, and the outside of said material inlet is provided with secondary heater, and said hydrogen supply mouth, the 3rd buffer tank are through pipe connection to said secondary heater.
In the preparation facilities of the silane of the utility model; The upper end of said silane reaction device is provided with the reactant outlet; Said reactant outlet is connected to said second knockout tower; The lower end of said silane reaction device is provided with material inlet, and the outside of said material inlet is provided with the 3rd well heater, and said hydrogen supply mouth, the 4th buffer tank are through pipe connection to said the 3rd well heater.
In the preparation facilities of the silane of the utility model; The preparation facilities of said silane also comprises the 3rd knockout tower and the 4th knockout tower; The upper end of said first knockout tower and second knockout tower is equipped with gas liquid outlet; Said the 3rd knockout tower is provided with the outlet of gas-liquid inlet, hydrogenchloride outlet, silane and hydrogen; Said gas-liquid inlet passes through pipe connection with the gas liquid outlet of said first knockout tower and second knockout tower, and said hydrogenchloride outlet is connected to the hydrogenchloride hold-up vessel, and the outlet of said silane and hydrogen is connected through pipeline with the 4th knockout tower.
In the preparation facilities of the silane of the utility model, all be connected with interchanger on said first knockout tower, second knockout tower and the 3rd knockout tower.
In the preparation facilities of the silane of the utility model; Said the 4th knockout tower is provided with silane outlet and hydrogen outlet; Said hydrogen outlet is located at the top of silane outlet, and said silane outlet is connected to the silane holding tank, and said hydrogen outlet is connected to said hydrogen supply mouth.
The preparation facilities of the silane of the utility model is used to realize the new preparation technology of silane, through adding H in chlorosilane disproportionation step
2, make hydrogen participate in disproportionation reaction, make the main by product of disproportionation step from SiCl
4Change HCl into, a transformation efficiency of raw material greatly improves, and the HCl by product can be participated in the SiCl of the first step
4Hydrogenation, improved the transformation efficiency of reaction, and; The parts of the preparation facilities of the silane of the utility model and pipeline are provided with rationally, and whole device is closed cycle, make various raw materials and by product can access reasonable utilization; Energy consumption reduces, and the production efficiency of silane increases, and cost reduces.
Description of drawings
Fig. 1 is the synoptic diagram of preparation facilities of the silane of the utility model preferred embodiment.
Embodiment
In order to make the utility model technical problem to be solved, technical scheme and beneficial effect clearer,, the utility model is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
The preparation facilities of the silane of the utility model is used to realize the preparation technology of following new silane, adds H in chlorosilane disproportionation step in this preparation process
2, make hydrogen participate in disproportionation reaction, increased a transformation efficiency of chlorosilane disproportionation; Make the main by product of disproportionation step from SiCl
4Change HCl into, reduced SiCl
4Growing amount and treatment capacity, improved a raw-material utilization ratio; And the HCl by product that generates in the technology can be participated in the SiCl of the first step
4Hydrogenation, improved the transformation efficiency of reaction.The reaction that the preparation technology of this silane relates to is following:
The reaction conditions of reaction (1) is: temperature of reaction 200-600 ℃, reaction pressure is 1-5Mpa, adopts the Cu catalyzer; The reaction conditions of reaction (2), (3) is: temperature of reaction 40-100 ℃, reaction pressure is 0.1-0.8Mpa, adopts the D301 catalyzer.
Simultaneously, the preparation facilities of the silane of the utility model provides the preparation technology who uses this new silane to produce the complete operational path of high purity silane, and whole technology becomes closed cycle, and no coupling product generates.
To describe the preparation facilities of the silane of the utility model preferred embodiment below in detail, as shown in Figure 1, it mainly comprises: trichlorosilane reactor drum 11, dichloro hydrogen pasc reaction device 12, silane reaction device 13, silane holding tank 21; Said trichlorosilane reactor drum 11 is through the supply opening 30 of pipe connection silica flour and catalyzer, and passes through the pipe connection first hydrogen supply mouth 31, silicon tetrachloride hold-up vessel 22 and hydrogenchloride hold-up vessel 23; Said dichloro hydrogen pasc reaction device 12 passes through pipe connection with trichlorosilane reactor drum 11, and dichloro hydrogen pasc reaction device 12 is through the pipe connection second hydrogen supply mouth 32; Said silane reaction device 13 passes through pipe connection with dichloro hydrogen pasc reaction device 12, and silane reaction device 13 is through the pipe connection second hydrogen supply mouth 32; Said silane holding tank 21 passes through pipe connection with silane reaction device 13.
Specifically, for realization response (1), said trichlorosilane reactor drum 11 is provided with the solid feed inlet, is connected with pipeline between the supply opening 30 of said solid feed inlet and silica flour and catalyzer, and said pipeline is provided with feeder 61; The lower end of trichlorosilane reactor drum 11 is provided with the gas-liquid import; The outside of said gas-liquid import is provided with primary heater 41; The said first hydrogen supply mouth 31, silicon tetrachloride hold-up vessel 22, hydrogenchloride hold-up vessel 23 be through pipe connection to said primary heater 41, and connect on the pipeline of silicon tetrachloride hold-up vessel 22, hydrogenchloride hold-up vessel 23 topping-up pump 51,52 is installed.
Si powder and catalyzer add through feeder 61 from the supply opening 30 of silica flour and catalyzer, and hydrogen adds from the first hydrogen supply mouth 31, the SiCl of storage in the silicon tetrachloride hold-up vessel 22
4The HCl of storage in the hydrogenchloride hold-up vessel 23; After primary heater 41 heating, get into trichlorosilane reactor drum 11 (can be fluidized-bed reactor) through converging highly compressed hydrogen after topping-up pump 51,52 superchargings respectively, with Si powder and the catalyst reaction generation SiHCl in the trichlorosilane reactor drum 11
3, reaction formula is:
Through above-mentioned parts and pipeline setting, accomplish the reaction of reaction formula (1), at this moment, except generating required product S iHCl
3Possibly also contain unreacted SiCl outward,
4, H
2, Si, HCl, and possibly further react and generate other product such as SiH
2Cl
2, SiH
4Thereby, need separate and reclaim accordingly and utilize reacted product.
In the present embodiment, connect trash eliminator 70, first knockout tower 71, second knockout tower 72 are installed on the pipeline of said trichlorosilane reactor drum 11 and said dichloro hydrogen pasc reaction device 12 successively.
The top of said trichlorosilane reactor drum 11 is provided with the reactant outlet, and said trash eliminator 70 is through the said reactant outlet of pipe connection; Be connected with first interchanger 701 on the said trash eliminator 70; The lower end of trash eliminator 70 is provided with solid impurity relief outlet 33; The upper end of trash eliminator 70 is provided with hydrogen outlet; Said hydrogen outlet is equipped with booster fan 91 through pipe connection to the first hydrogen supply mouth 31 on the pipeline of the connection hydrogen outlet and the first hydrogen supply mouth 31, and the side of trash eliminator 70 also is provided with the mix products outlet; Said mix products outlet is equipped with first buffer tank 81 and liquid feed pump 53 through pipe connection to the first knockout tower 71 on the pipeline of the outlet of connection mix products and first knockout tower 71.
Accomplish the reactant outlet entering pipeline of the reacted gas mixture of the first step (1) from trichlorosilane reactor drum 11 tops; (for example: Si) discharge isolate solid impurity through trash eliminator 70 through solid impurity relief outlet 33; Gaseous component is after 701 condensations of first interchanger, and chlorosilane mixture (comprises SiCl
4, SiHCl
3, SiH
2Cl
2, SiH
4) getting into first buffer tank 81, the hydrogen that does not coagulate returns the first hydrogen supply mouth 31 through booster fan 91, continues to participate in the reaction of the first step (1).
Chlorosilane mixture in first buffer tank 81 is pumped into first knockout tower 71 through liquid feed pump 53.In the present embodiment; Said first knockout tower 71 is provided with silicon tetrachloride outlet and chlorosilane outlet; Said is the bottom that first knockout tower 71 is located in the silicon tetrachloride outlet; Said chlorosilane outlet is positioned at the top of silicon tetrachloride outlet; Said silicon tetrachloride outlet is through pipe connection to said silicon tetrachloride hold-up vessel 22, and said chlorosilane outlet is equipped with second buffer tank 82 and liquid feed pump 54 through pipe connection to the second knockout tower 72 on the pipeline between the chlorosilane outlet and second knockout tower 72.Chlorosilane mixture is pumped into the separation that first knockout tower 71 is realized chlorosilane mixture through liquid feed pump 53, is connected with second interchanger 711 on first knockout tower 71, wherein, and the SiCl of heavy constituent
4Get into silicon tetrachloride hold-up vessel 22, can continue to participate in the reaction of the first step (1), SiHCl
3, SiH
2Cl
2Get into second buffer tank 82 through second interchanger 711, and be pumped into second knockout tower 72 through liquid feed pump 54.And SiH
4, H
2, HCl gets into follow-up knockout towers through second interchanger 711 back and handles, and sees for details follow-up.
In the present embodiment; Said second knockout tower 72 is provided with trichlorosilane outlet and the outlet of dichloro hydrogen silicon; The bottom of second knockout tower 72 is located in said trichlorosilane outlet; Said dichloro hydrogen silicon outlet is positioned at the top of trichlorosilane outlet, and said trichlorosilane outlet is equipped with the 3rd buffer tank 83 and liquid feed pump 55 through pipe connection to said dichloro hydrogen pasc reaction device 12 on the pipeline between trichlorosilane outlet and the dichloro hydrogen pasc reaction device 12; Said dichloro hydrogen silicon outlet is equipped with the 4th buffer tank 84 and liquid feed pump 56 through pipe connection to said silane reaction device 13 on the pipeline between outlet of dichloro hydrogen silicon and the silane reaction device 13.Through the SiHCl after 71 separation of first knockout tower
3, SiH
2Cl
2Be pumped in second knockout tower 72 through liquid feed pump 54 and further separate, wherein, the SiHCl of heavy constituent
3Get into the 3rd buffer tank 83, be used to participate in the reaction of step (2), the SiH of light constituent
2Cl
2Get into the 4th buffer tank 84, be used to participate in the reaction of step (3).
Parts and pipeline setting about the reaction of step (2): in the present embodiment; The upper end of said dichloro hydrogen pasc reaction device 12 is provided with the reactant outlet; Said reactant outlet is connected to said first knockout tower 71; The lower end of said dichloro hydrogen pasc reaction device 12 is provided with material inlet; The outside of said material inlet is provided with secondary heater 42, and the said second hydrogen supply mouth 32, the 3rd buffer tank 83 be through pipe connection to said secondary heater 42, connects on the pipeline of the second hydrogen supply mouth 32 and secondary heater 42 booster fan 92 is installed.Get into the SiHCl of the 3rd buffer tank 83
3After liquid feed pump 55 superchargings, converge the hydrogen that gets into through booster fan 92 from the second hydrogen supply mouth 32, after secondary heater 42 heating, get into dichloro hydrogen pasc reaction device 12, reaction generates SiH
2Cl
2, reaction formula is:
Through above-mentioned parts and pipeline setting, accomplish the reaction of reaction formula (2), at this moment, except generating required product S iH
2Cl
2Outward, by product HCl, possibly also contain unreacted SiHCl
3, H
2, and may further react generation product such as SiH
4The upper end of said dichloro hydrogen pasc reaction device 12 is provided with the reactant outlet; Said reactant outlet is connected to said first knockout tower 71; Owing to connect first knockout tower 71, second knockout tower 72 are installed successively on the pipeline of said dichloro hydrogen pasc reaction device 12 and silane reaction device 13, the structure through first knockout tower 71, second knockout tower 72 is connected with pipeline, can realize the separation and the utilization of product; Wherein, SiH
4, H
2, HCl gets into follow-up knockout tower and handles, and sees for details follow-up; Unreacted SiHCl
3Separation through first knockout tower 71, second knockout tower 72 continues to get into the 3rd buffer tank 83, participates in the reaction of step (2); Product S iH
2Cl
2Through the separation of first knockout tower 71, second knockout tower 72 with purify and get into the 4th buffer tank 84, be used to participate in the reaction of step (3).
Parts and pipeline setting about the reaction of step (3): in the present embodiment; The upper end of said silane reaction device 13 is provided with the reactant outlet; Said reactant outlet is connected to said second knockout tower 72; The lower end of said silane reaction device 13 is provided with material inlet; The outside of said material inlet is provided with the 3rd well heater 43, and the said second hydrogen supply mouth 32, the 4th buffer tank 84 be through pipe connection to said the 3rd well heater 43, connects on the pipeline of the second hydrogen supply mouth 32 and the 3rd well heater 43 booster fan 93 is installed.Through separating of first knockout tower 71 and second knockout tower 72, get into the SiH of the 4th buffer tank 84
2Cl
2After liquid feed pump 56 superchargings, converge the hydrogen that gets into through booster fan 93 from the second hydrogen supply mouth 32, after 43 heating of the 3rd well heater, get into silane reaction device 13, reaction generates final product SiH
4, reaction formula is:
Through above-mentioned parts and pipeline setting, accomplish the reaction of reaction formula (3), at this moment, except generating required final product SiH
4, and outside the by product HCl, possibly also contain unreacted SiH
2Cl
2, H
2The upper end of said silane reaction device 13 is provided with the reactant outlet, and said reactant outlet is connected to said second knockout tower 72, and structure and pipeline setting through second knockout tower 72 can realize the separation and the utilization of product, wherein, and unreacted SiH
2Cl
2Separation through second knockout tower 72 continues to get into the 4th buffer tank 84, participates in the reaction of step (3), and SiH
4, H
2, HCl gets into follow-up knockout tower and handles, and sees subsequent descriptions for details.
In the utility model; The preparation facilities of said silane also comprises the 3rd knockout tower 73 and the 4th knockout tower 74; The upper end of said first knockout tower 71 and second knockout tower 72 is equipped with gas liquid outlet; Said the 3rd knockout tower 73 is provided with the outlet of gas-liquid inlet, hydrogenchloride outlet, silane and hydrogen, and the bottom of the 3rd knockout tower 73 is located in said hydrogenchloride outlet, and the outlet of silane and hydrogen is positioned at the top of hydrogenchloride outlet; Said gas-liquid inlet passes through pipe connection with the gas liquid outlet of said first knockout tower 71 and second knockout tower 72, and said hydrogenchloride outlet is connected to hydrogenchloride hold-up vessel 23; The outlet of said silane and hydrogen is connected through pipeline with the 4th knockout tower 74.Through reaction and the reaction product analysis of above-mentioned steps 1-3, can know that first knockout tower 71, second knockout tower 72 also accommodate SiH
4, HCl, H
2, be connected with interchanger 711,721,731, SiH on said first knockout tower 71, second knockout tower 72, the 3rd knockout tower 73
4, HCl, H
2Get into the 3rd knockout tower 73 from the gas liquid outlet of first knockout tower 71 and second knockout tower 72 through interchanger 711,721 backs; Realize separating through very low temperature rectifying; Wherein, The HCl of heavy constituent gets into hydrogenchloride hold-up vessel 23 through the hydrogenchloride outlet, gets back to trichlorosilane reactor drum 11 through topping-up pump 52, can continue to participate in the reaction of the first step (1); H
2, SiH
4Getting into the 4th knockout tower 74 from the outlet of silane and hydrogen further separates.In the present embodiment; Said the 4th knockout tower 74 is provided with silane outlet and hydrogen outlet, and the bottom of the 4th knockout tower 74 is located in said silane outlet, and said hydrogen outlet is located at the top of silane outlet; Said silane outlet is connected to silane holding tank 21; Said hydrogen outlet is equipped with booster fan 94, H through pipe connection to the said second hydrogen supply mouth 32 on the pipeline of the connection hydrogen outlet and the second hydrogen supply mouth 32
2, SiH
4In the 4th knockout tower 74, realize separating, wherein, H
2Under the effect of booster fan 94, turn back to the second hydrogen supply mouth 32, can continue to participate in the chlorosilane disproportionation reaction of second and third step, SiH through pipeline
4Then get into silane holding tank 21, collect, obtain final required product silane through silane holding tank 21.
In sum, the preparation facilities of the silane of the utility model is used to realize the new preparation technology of silane, through adding H in chlorosilane disproportionation step
2, make hydrogen participate in disproportionation reaction, make the main by product of disproportionation step from SiCl
4Change HCl into, a transformation efficiency of raw material greatly improves, and the HCl by product can be participated in the hydrogenation of the SiCl4 of the first step; Improved the transformation efficiency of reaction, and the parts of the preparation facilities of the silane of the utility model and pipeline are provided with rationally; Being provided with of each reactor drum and separator is rational in infrastructure, and whole device is closed cycle, makes various raw materials and by product can access reasonable utilization; Energy consumption reduces, and the production efficiency of silane increases, and cost reduces.
Be to be understood that; In this article; Described " reactor drum ", " knockout tower ", " topping-up pump " " fresh feed pump ", " buffer tank ", " feeder ", " well heater ", " interchanger ", " booster fan " are the common equipment in this area; Its structure is all known by those skilled in the art with effect, is not done at this and give unnecessary details.
Those skilled in the art know easily; The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (11)
1. the preparation facilities of a silane is characterized in that, comprising: trichlorosilane reactor drum, dichloro hydrogen pasc reaction device, silane reaction device, silane holding tank;
Said trichlorosilane reactor drum passes through the supply opening of pipe connection silica flour and catalyzer, and through pipe connection hydrogen supply mouth, silicon tetrachloride hold-up vessel and hydrogenchloride hold-up vessel;
Said dichloro hydrogen pasc reaction device and trichlorosilane reactor drum are through pipe connection, and dichloro hydrogen pasc reaction device is through pipe connection hydrogen supply mouth;
Said silane reaction device and dichloro hydrogen pasc reaction device are through pipe connection, and the silane reaction device is through pipe connection hydrogen supply mouth;
Said silane holding tank and silane reaction device pass through pipe connection.
2. the preparation facilities of silane according to claim 1; It is characterized in that; The lower end of said trichlorosilane reactor drum is provided with the gas-liquid import; The outside of said gas-liquid import is provided with primary heater, and said hydrogen supply mouth, silicon tetrachloride hold-up vessel, hydrogenchloride hold-up vessel be through pipe connection to said primary heater, and connects on the pipeline of silicon tetrachloride hold-up vessel, hydrogenchloride hold-up vessel topping-up pump is installed.
3. the preparation facilities of silane according to claim 1 is characterized in that, connects on the pipeline of said trichlorosilane reactor drum and said dichloro hydrogen pasc reaction device trash eliminator, first knockout tower, second knockout tower are installed successively.
4. the preparation facilities of silane according to claim 3 is characterized in that, said trichlorosilane reactor drum is provided with the reactant outlet, and said trash eliminator is through the said reactant outlet of pipe connection; Be connected with interchanger on the said trash eliminator; The lower end of trash eliminator is provided with the solid impurity relief outlet; The upper end of trash eliminator is provided with hydrogen outlet, and said hydrogen outlet is through pipe connection to hydrogen supply mouth, and the side of trash eliminator also is provided with the mix products outlet; Said mix products outlet is equipped with first buffer tank and fresh feed pump through pipe connection to the first knockout tower on the pipeline of the outlet of connection mix products and first knockout tower.
5. the preparation facilities of silane according to claim 3; It is characterized in that; Said first knockout tower is provided with silicon tetrachloride outlet and chlorosilane outlet, and said chlorosilane outlet is positioned at the top of silicon tetrachloride outlet, and said silicon tetrachloride outlet is through pipe connection to said silicon tetrachloride hold-up vessel; Said chlorosilane outlet is equipped with second buffer tank and fresh feed pump through pipe connection to the second knockout tower on the pipeline between the chlorosilane outlet and second knockout tower.
6. the preparation facilities of silane according to claim 5; It is characterized in that; Said second knockout tower is provided with trichlorosilane outlet and the outlet of dichloro hydrogen silicon; Said dichloro hydrogen silicon outlet is positioned at the top of trichlorosilane outlet, and said trichlorosilane outlet is equipped with the 3rd buffer tank and fresh feed pump through pipe connection to said dichloro hydrogen pasc reaction device on the pipeline between trichlorosilane outlet and the dichloro hydrogen pasc reaction device; Said dichloro hydrogen silicon outlet is equipped with the 4th buffer tank and fresh feed pump through pipe connection to said silane reaction device on the pipeline between outlet of dichloro hydrogen silicon and the silane reaction device.
7. the preparation facilities of silane according to claim 6; It is characterized in that; The upper end of said dichloro hydrogen pasc reaction device is provided with the reactant outlet, and said reactant outlet is connected to said first knockout tower, and the lower end of said dichloro hydrogen pasc reaction device is provided with material inlet; The outside of said material inlet is provided with secondary heater, and said hydrogen supply mouth, the 3rd buffer tank are through pipe connection to said secondary heater.
8. the preparation facilities of silane according to claim 6; It is characterized in that; The upper end of said silane reaction device is provided with the reactant outlet, and said reactant outlet is connected to said second knockout tower, and the lower end of said silane reaction device is provided with material inlet; The outside of said material inlet is provided with the 3rd well heater, and said hydrogen supply mouth, the 4th buffer tank are through pipe connection to said the 3rd well heater.
9. according to the preparation facilities of any described silane of claim 3-8; It is characterized in that; The preparation facilities of said silane also comprises the 3rd knockout tower and the 4th knockout tower; The upper end of said first knockout tower and second knockout tower is equipped with gas liquid outlet, and said the 3rd knockout tower is provided with the outlet of gas-liquid inlet, hydrogenchloride outlet, silane and hydrogen, and said gas-liquid inlet passes through pipe connection with the gas liquid outlet of said first knockout tower and second knockout tower; Said hydrogenchloride outlet is connected to the hydrogenchloride hold-up vessel, and the outlet of said silane and hydrogen is connected through pipeline with the 4th knockout tower.
10. the preparation facilities of silane according to claim 9 is characterized in that, all is connected with interchanger on said first knockout tower, second knockout tower and the 3rd knockout tower.
11. the preparation facilities of silane according to claim 9; It is characterized in that; Said the 4th knockout tower is provided with silane outlet and hydrogen outlet; Said hydrogen outlet is located at the top of silane outlet, and said silane outlet is connected to the silane holding tank, and said hydrogen outlet is connected to said hydrogen supply mouth.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201721729U CN202099066U (en) | 2011-05-26 | 2011-05-26 | Device for preparing silicane |
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|---|---|---|---|
| CN2011201721729U CN202099066U (en) | 2011-05-26 | 2011-05-26 | Device for preparing silicane |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112860A (en) * | 2013-02-26 | 2013-05-22 | 天津大学 | Method for preparing high-purity silicane in co-production by improved siemens method |
| CN110642255A (en) * | 2019-11-12 | 2020-01-03 | 四川永祥新能源有限公司 | Method and device for treating hexachlorodisilane in polycrystalline silicon production |
-
2011
- 2011-05-26 CN CN2011201721729U patent/CN202099066U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112860A (en) * | 2013-02-26 | 2013-05-22 | 天津大学 | Method for preparing high-purity silicane in co-production by improved siemens method |
| CN103112860B (en) * | 2013-02-26 | 2015-09-02 | 天津大学 | The method of high purity silane is prepared in improved Siemens coproduction |
| CN110642255A (en) * | 2019-11-12 | 2020-01-03 | 四川永祥新能源有限公司 | Method and device for treating hexachlorodisilane in polycrystalline silicon production |
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